5 Port Solenoid Valve Series SQ1000/2000

A B A B A B A B A B 122.3 4 A SMC 53.6 2 B 37.6 18.5 Approx. 12 Approx. 12 EXH. outlet Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) Triangle mark indicator position Approx. 10 D side U side Station 1 2 3 4 5 6 7 8 n C10: R(EXH) port For top ports C10: P(SUP) port 4 A 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A R 62 41.5 (58) 39.5 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 25.5 1 21

MRQ

Size/Standard stroke (mm) Angle of rotation 32 40 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 A B 80 to 100 170 to 190 Refer to p.1.5-18 and 1.5-19 for middle and long strokes other than standard stroke.

0.01

A 72 27 B 41.8 15.8 SFD100-02 23 Hole shape for bracket mounting 26.2 SMC 23 14.7 90 1.5 3 51 17 Use a countersunk head screw (M3) for bracket mounting. 72 27 3.5 SFD200-C SFD200-C Dimensions Model A 125 B SFD200C08 C10 C12 8 10 126 12 126 SMC 42 24 Bracket mounting dimensions 96.5 36 4 x 3.5 114.5 4 x 7 Applicable tubing O.D.

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -, Cushion: Rubber cushion, Operating Pressure(MPa): 0.08 to 0.7, Specification: Built-in magnet, Auto Switches: H7A2, Lead

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 60, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -, Cushion: Rubber cushion, Operating Pressure(MPa): 0.08 to 0.7, Specification: Built-in magnet, Auto Switches: H7A2, Lead

(Or None in the Case of No Switch), Auto Switch Mounting Type: B (Band Mounting)

(Or None in the Case of No Switch), Auto Switch Mounting Type: B (Band Mounting)

Clean Series: 10 (Relief Type), Magnet: D (Built-in Magnet), Series: J2, Mounting: B (Basic Style), Bore Size: 10mm, Stroke: 30mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: Perpendicular to Axis, Version: Z, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: S (1 pc.), Auto Switch Mounting Type: B (Band Mounting)

(Or None in the Case of No Switch), Auto Switch Mounting Type: B (Band Mounting)

(Or None in the Case of No Switch), Auto Switch Mounting Type: B (Band Mounting)

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -, Cushion: Rubber cushion, Operating Pressure(MPa): 0.08 to 0.7, Specification: Built-in magnet, Auto Switches: H7A2, Lead

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 60, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -, Cushion: Rubber cushion, Operating Pressure(MPa): 0.08 to 0.7, Specification: Built-in magnet, Auto Switches: H7A2, Lead

Clean Series: Relief Type, Magnet: Built-in Magnet, Series: J2, Mounting: Basic Style, Bore Size: 10mm, Stroke: 15mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: Perpendicular to Axis, Version: Z, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case

Clean Series: Relief Type, Magnet: Built-in Magnet, Series: J2, Mounting: Basic Style, Bore Size: 10mm, Stroke: 30mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: Axial Direction, Version: Z, Auto Switch: M9BA--Solid State, Water Resist., 2 Wire, Horizontal, Lead Wire or Prewired Connector: 5m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Type: Band

Clean Series: Relief Type, Magnet: Built-in Magnet, Series: J2, Mounting: Basic Style, Bore Size: 10mm, Stroke: 60mm, Cushion: Air Cushion, Head Cover Port Location: Axial Direction, Version: Z, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto

Clean Series: Relief Type, Magnet: Built-in Magnet, Series: J2, Mounting: Basic Style, Bore Size: 10mm, Stroke: 60mm, Cushion: Air Cushion, Head Cover Port Location: Axial Direction, Version: Z, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical, Lead Wire or Prewired Connector: 3m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Type: Band Mounting

Clean Series: Relief Type, Magnet: Built-in Magnet, Series: J2, Mounting: Basic Style, Bore Size: 10mm, Stroke: 30mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: Perpendicular to Axis, Version: Z, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 1 pc., Auto Switch Mounting Type: Band Mounting

(Or None in the Case of No Switch), Auto Switch Mounting Type: B (Band Mounting)

FQ1

3 I.D. 10.8 x 2.4 O-ring JIS B2401-4D-P11 FPM 4 Series FQ1 Dimensions Bracket 32 V-band support 2.3 75 (25) 50 100 (80) 75 70 70 30 50 10 92 7 2-A 10 108 R3.5 R8 127 (60) R25 120 109 Part number A Applicable bore size Rc 1 Rc 3/4 Rc 1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only

Low Maintenance Filter Series FN1

Description Material Model Bore size (Nominal size B) FNR100 N V-10 FNR101 N V-10 1 2 3 Stainless steel SUS304 Cover 194 (257) Rc 1 Stainless steel SUS304 Bowl 332 (385) Stainless steel SUS304 V-band Note Parts list Note Replacement parts No. Description Material No.