45

10 stations 02 2 stations (2) Manifold base (5 stations) Available up to 20 solenoids.

240

s] Note 3) Note 6) Vertical Basic 10 to 150 20 to 300 Note 4) 10 to 150 20 to 300 Note 4) Compact 10 to 150 20 to 300 Note 4) Pushing speed [mm/s] Note 5) 10 20 10 20 Acceleration/Deceleration [mm/s2] 3000 Backlash [mm] 0.2 or less Positioning repeatability [mm] 0.05 Lost motion [mm] Note 7) 0.2 or less Impact/Vibration resistance [m/s2] Note 8) 50/20 Actuation type Slide screw Guide type

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

H G I J K L A B C D E F M R +0.058 0 -0.1 -0.2 -0.1 -0.2 -0.1 -0.3 -0.1 -0.3 AD-FI-20 AD-FI-25 AD-FI-32 9 9 16 16 +0.027 0 +0.027 0 +0.027 0 +0.027 0 36 38 55 55 16 18 22 22 9 9 12 15 20 25 32 40 10 10 15.5 15.5 20 20 24 24 14 14 20 20 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 46 46 56 64 28 30 40 43 60 60 80 88 22 22 30 30 16 16 16 24 10 10 12 16 30 30 36 44 M4 10 10 13 13 10

Thermo-chiller

HRLE090-A-20/40 HRLE090-A-20/40 [50 Hz] [60 Hz] 12 12 Ambient temperature 32C Ambient temperature 32C 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 Ambient temperature 40C 6 6 Ambient temperature 40C 4 4 Ambient temperature 45C 2 2 Ambient temperature 45C 0 0 15 20 25 Circulating fluid temperature [C] 15 20 25 Circulating fluid temperature [C] * The cooling capacity is the sum of

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 40 45 23 10 60 44 18 25 14 17.5 9.5 M8 x 1.25 18 10 20 M14 x 1.5 30 22 1/4 37 106 11 15 17 50 50 25 9 73 53 20 28 17 17 13 M10 x 1.5 20 10 22 M16 x 1.5 30 26 3/8 43 112 11 15 19 63 55 28 8 80 60 22.4 30 17 17 13 M10 x 1.5 22 10 25 M18 x 1.5 30 26 3/8 47 116 11 15 21 80 65 32 8 100 75 28 32 22 20 15 M12 x 1.75 26 13 29 M22 x 1.5 35 30

NCA1

Cushion NCA D-X Mounting 20Standard Stroke Data Bore size (in) 1.50 2, 2.50 3.25, 4 Standard stroke 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Smooth movements even at 0.4 to 2 inch/sec Auto switch mounting available.

NCA1

1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Example: NCDA1B150-0200R+0300-XC11 will stroke 2" then an additional 3" for a total stroke of 5".

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load N 0 10 20 30 50 Load N 0 10 20 30 40 Load N 40 10 10 10 L = 100mm L = 100mm L = 100mm MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

G RS H A Bore size (mm) 12, 16 20, 25 Standard stroke (mm) 5, 10, 15, 20, 25, 30 RZQ 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 MI W S Replacement Parts: Seal Kit Theoretical Output CEP1 OUT IN Unit: N Bore size (mm) Kit no.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke.

LG1H

High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations 100 LG1 21 H F 2 G X10 1 P A Frame material Aluminium alloy Stainless steel Nil W X10 Non-standard motor Frame material Guide type

CJP

Symbol A A' Bore size (mm) NN MM K J H GB GA E D C CD B CK Q R 6 10 15 +0.040 0 3 M3 x 0.5 8 6 17 11 6 10.5 3 16.5 14 4 9 7 7 M10 x 1.0 0 0.5 17 +0.065 0 5 M4 x 0.7 8 7 20 17 6 13 5 20 15 6.5 12 8 10 M12 x 1.0 0 0.5 22 +0.065 0 6 M5 x 0.8 8 9 24 18.5 6 15.5 6 24.5 20 8 14 10 12 M14 x 1.0 Symbol Z S 5 st 10 st 15 st 20 st 30 st ZZ Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15

CJP

, 15, 20 5, 10, 15, 20, (25), 30 10 Flange style 5, 10, 15, 20, (25), 30 15 Foot style 5 mm spacer is installed in the 30 mm stroke cylinder.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

pulses) 10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] -10[V] -10[V] CW direction CW direction CCW direction CCW direction A Feedback position (Note 1,2) ( 10V/1 Mpulses) B Feedback position (Note 1,2) ( 10V/10 Mpulses) 10[V] 10[V] 1M[pulse] 10M[pulse] 0 0 1M[pulse] 10M[pulse] -10[V] -10[V] CW direction CW direction CCW direction C Feedback position (Note 1,2) ( 10V/100 Mpulses)

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

] L5 [mm] L5 [mm] 600 600 600 m Wall L5 Y 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 35 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work load [kg] 7 Model

Electric Actuator Miniature Rod Type Miniature Slide table Type

) Actuator specification Horizontal Compact 10 to 200 20 to 350 Note4) Speed [mm/s] Note3) Note6) Vertical Basic 10 to 150 20 to 300 Note4) 10 to 150 20 to 300 Note4) Compact 10 to 150 20 to 300 Note4) Pushing speed [mm/s] Note5) 10 20 10 20 Acceleration / Deceleration [mm/ s2] 3000 Backlash [mm] 0.2 or less Positioning repeatability [mm] +/0.05 Lost motion [mm] Note7) 0.2 or less Impact

Step Motor Controller

LE CP 1 (14.2) (13.5) Connector C Actuator side (Terminal no.) 1 2 Cable length (L) 1 3 5 8 A B C (14) (18) A1 B1 8 1.5 m 3 m 5 m 8 m (17.7) (17.7) 5 6 1 2 Connector A A6 B6 Connector D 10 m L (11) (30.7) (14.7) 5 6 15 m (10) 20 m Controller side Produced upon receipt of order 8 10 15 20 LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) (Terminal no.) (14.2) (13.5

240

10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L

Industrial Filters

0.5, 1, 5, 10 20, 50, 75, 100 EH EB ES Plating fluids, General acids, Alkali fluids, Industrial water, Cooling water Polypropylene 0.5, 1, 5, 10 20, 50, 75, 100 EHM P.41 General acids, High-temperature fluids EHK Glass fiber 1, 5, 10, 20 Paper P.42 Cotton, Phenol impregnated, (Epoxy adhesion) 5, 10, 20 Hydraulic oil, Lubricating oil, Fuel oil EP Micromesh Stainless steel 304 (Epoxy adhesion

JIS Standard Hydraulic Cylinder

10 27 19 11 43 35 1/2 46 142 14 45 17 18 115 35 18 108 60 52 55 25 to 1400 63 30 20 M12 x 1.5 90 165 63 10 27 19 14 43 35 1/2 52 148 18 50 19 20 132 41 19 106 71 65 55 25 to 1500 80 35 20 1/4 stroke M16 x 1.5 110 190 80 11 22 22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 65 80 25 to 1800 100 39 15 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53 22 122 85 80 100