Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Low Speed, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.025～1.0, Specification: Without magnet, Port thread type

Magnet: None, Mounting: Basic Style, Bore Size: 40mm, Piping: Rc, Stroke: 25mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: None, Mounting: Basic Style, Bore Size: 40mm, Piping: Rc, Stroke: 300mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: None, Mounting: Basic Style, Bore Size: 40mm, Piping: Rc, Stroke: 100mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: None, Mounting: Basic Style, Bore Size: 40mm, Piping: Rc, Stroke: 75mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: None, Mounting: B [Basic (Double-side Bossed)], Bore Size: 40mm, Thread: Rc, Stroke: 100mm, Rod End Thread: Male Rod End

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Low Speed, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.025～1.0, Specification: Without magnet, Port thread type

Magnet: None, Mounting: B [Basic (Double-side Bossed)], Bore Size: 40mm, Thread: Rc, Stroke: 25mm, Rod End Thread: Male Rod End

Angle Seat Valve /

VXB215 B E(H) 100 300 400 500 600 200 VXB215 C F(H) 100 300 400 500 600 700 800 200 Flow rate Q [kg/h] How to read the graph The sonic range pressure to generate a flow rate of 300 kg/h is P1 0.3 MPa for the VXB215C F(H).

Modular Type Lubricators Series AL

268 B 85 124 166 200 200 274 292 B 162 196 196 270 288 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 512 Lubricator Series AL10 to AL60 Dimensions Semi-standard specifications: 1000 cm3 tank AC-A 106 2 x P (Port size) AF-A 90 A 106 AF-A 66 70 Bracket (Option) 13 3.2 AR-A 11 AL-A B C V Q OUT IN AW-A AC OUT AF AF AR With float switch Specifications AL AL Contact capacity: 15 VA (AC) 15 W (DC) Contact

KJ

11 !2 !33 !4 !5 !

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

(mm) With rod boot Bore size (mm) Stroke range (mm) l J B BB C F GA GB M NA NB P R S T CD LH LT LX LW X1 Y1 SS Z e f Q 32 M10 x 1.25 58 62 38 16 32 15 11 37 31 3/8 39 141 11 11 40 8 40 30 32 13 203 205 52 21.5 15 25 to 1400 1/3.5 stroke 40 M10 x 1.25 65 69 45 12 32 15 11 36 30 3/8 42 141 11 11 43 8 46 33 32 13 203 205 52 12 15 25 to 1400 50 M10 x 1.25 76 85 52 15 40 19 11 43 35 1/2 46 155

XL-OMY0003

XLH-25 XLH-40 XLH-50 AC90240V XLA25-60S-1 XLA25-60S-1 1 1 H4 AC100V 200/40 200/50 / AC200V 800/40 800/50 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 1 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 30 ( 7 XL-OMY0003 . <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) <

VCW

VCW 20 1 G Clip Series Lead wire length 20 30 40 300 mm 600 mm 1000 mm 1500 mm 3000 mm Nil L1 L2 L3 L4 Class 2 Class 3 Class 4 Flat head screwdriver Voltage Solenoid coil 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Electrical entry Insert a flat head screwdriver into the hook section of the clip groove.

VXZ

Frequency (Hz) 50 60(53) 18 60 51(44) 12 Model Power source VX3 7.5 6 8 11 9.5 11.5 AC VXZ22 VXA DC 50 80 21 60 67 17 AC VXZ23 VN DC LVC JIS Symbol LVA OUT LVH IN LVD N.O.

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Industrial Filters

(Refer to 11. Nominal filtration accuracy on page 118.)

Clean Exhaust Filter

L/min (ANR) 11 M5 x 0.8 3 42 R1/8 65 52 R1/8 130 53 R1/4 130 73 R1/4 200 Symbol Port size Max. flow capacity L/min (ANR) 3A 4 30 4B 6 65 5C 8 130 7D 10 200 Male thread type One-touch fitting type Symbol Applicable tubing O.D.

VP3145/3165/3185

A B A B DIN terminal: VP3165-D Conduit terminal: VP3165-T Conduit terminal with indicator light (TL) Light Light G 1/2 Max. 11 Applicable cable 6 to 12 G 1/2 Rc 1/4 ( ): With indicator light (TL) 4-10-6 7 Large Size 3 Port Solenoid Valve Rubber Seal Series VP3145/3165/3185 Dimensions: VP3185 A B Grommet: VP3185-G V100 G 1/2 SY SYJ Manual override Lead wire length 200 mm External pilot

Process Pump

(L/min [ANR]) 300 150 SUP = 0.5 MPa SUP = 0.5 MPa SUP = 0.4 MPa 200 SUP = 0.4 MPa 100 SUP = 0.3 MPa SUP = 0.3 MPa SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 5 0 0 10 0 10 15 20 25 20 30 40 50 Discharge rate (L/min) Discharge rate (L/min) PAF3413 Air Consumption (2 Hz) PAF5413 Air Consumption (1 Hz) 200 Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) 300 150 200 100 SUP = 0.5 MPa SUP