Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

dia 1.6 Cross section 0.34mm2 VP VG 59 PE port R 3 1 P (30) VP 25.5 11 M5 X 0.8 External pilot port (Only external pilot style (R)) 2-Rc(PT)1/4 P(SUP)port 20 12.5 38.5 2-Rc(PT)1/4 R(EXH)port VQ The broken line indicates DIN rail mounted style [-D]. 43.5 11 VQZ L plug connector (L) DIN terminal (Y) VZ 300 (Lead wire) 86(87) VS 83(84) 90 MAX.10 61(64.5) 87 Pg.7 Cover dia 1.5 Cross section

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

VCL

Dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size B D E F H K L M N A C Model Note) Q V R Q R Q R S Q R S U 22 23 45 44 43 58 40.5 46.5 99 43 66 83 13.5 28 31 56.5 12.5 28 14 12.8 M4 4.5 64 1/8 VCL21 22 23 46 44 44 58 41.5 46.5 99 44 66 86 18 36 31 58.5 12.5 28 18 12.8 M4 6 67.5 1/4 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 99 22 40 36.5 11 15 32 20 19

Hand Valve Series VH 1

Rc NPT G Function 0 1 2 3 position closed center 3 position exhaust center 2 position Flow Characteristics VH200 VH300 VH400 Effective area S = 55 mm2 Effective area S = 7.5 mm2 Effective area S = 20 mm2 Supply pressure MPa Supply pressure MPa Supply pressure MPa Supply pressure MPa Supply pressure MPa Supply pressure MPa Supply pressure MPa Supply pressure MPa 1.0 1.0 1.0 1.0 1.0 1.0 Valve

Compact Cylinder

Auto switches are shipped together, (but not assembled). 2 JCQ Series Specifications Bore size [mm] 12 16 20 25 32 40 50 63 80 100 Action Double acting, Single rod Fluid Air Proof pressure 1.0 MPa Maximum operating pressure 0.7 MPa 1 Minimum operating pressure 0.07 MPa 0.05 MPa Ambient and fluid temperature 5 to 60C Lubrication Not required (Non-lube) Piston speed 50 to 500 mm/s 1 50 to 300

IDX-OM-W094

R . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 12 T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 13-1 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDFA60/70/80/90 Series IDX-OM-W094 1 1.1 z z z z z z z z z () 6.2 z 1.1.1 3 IDFA60/70/80/90 Series 1-1 IDX-OM-W094 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFA60/70/80/90 Series 1-

Process Pump Series PA3000/5000/PAX1000 Series PB1000

First find the ratio of the discharge rate for fresh water when viscosity is 15mPa s from the graph to the left. It is determined to be 48%. 2. Next, the viscosity of 15mPa s and the discharge rate of 200l/min in the required specification example are converted to the discharge rate for fresh water.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

For subsonic range Where P1 + 0.1013 = (1 to 2) (P2 + 0.1013) Formula based on Cv factor Q = 197.8Cv P (P2 + 0.1013) kg/h Formula based on effective area Q = 11.0S P (P2 + 0.1013) kg/h [650] (133) 0.2 [646] (120) 0.1 S = 2.8mm S = 5.9mm S = 9.2mm S = 11.7mm S = 6.3mm S = 9.7mm S = 14.4mm S = 10.8mm S = 15.3mm S = 24.8mm Flow rate Q kg/h VCS212 VCS213 VCS214 VCS215 VCS 13 VCS314 VCS315

ncq8mp

NCQ8B056-S-PS NCQ8B056-S-PS 056 (9/16") NCQ8B075-S-PS NCQ8B075-S-PS 075 (3/4") NCQ8B106-S-PS NCQ8B106-S-PS 106 (1 1/16") Piston seal is included. NCQ8B150-S-PS NCQ8B150-S-PS 150 (1 1/2") NCQ8B200-S-PS NCQ8B200-S-PS 200 (2") NCQ8B250-S-PS NCQ8B250-S-PS 250 (2 1/2") Construction Single Acting Spring Extend 11 12 10 Seal Kit Parts List No.

VCA

S = 6mm 5. S = 15mm 4. S = 10mm 7. S = 27mm 5. S = 15mm 7. S = 27mm 10. S = 38mm VCA21 200 300 400 500 600 700 VCA21 VCA31 VCA31 VCA41 VCA41 VCA41 Other 200 400 400 600 800 1000 1200 1.

Ejector Valve Unit, Series ZYY/ZYX

Note 2) V, S and R specifications are 45T or 45T1 only.

Compact

(s P. 11 ) (2) The weight of a transferred object and transfer speed should be within the allowable range as shown in the graphs. (3) Overhang L3 should be 30 mm or less. V m L3 30 mm Caution (1) If a load is applied in the direction as shown on the right side, an eccentric load will be applied to the guide.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Material Note PBT PBT Description Body A Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring Gasket 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 1 2 3 4 5 6 7 8 9 10 11 12 13 14 Body A Elbow body Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Electroless nickel plated Electroless nickel plated Electroless nickel plated Brass

ZB-OM00301

LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02 2 S / 1 S 12 12 PV PD 2 PD PVPD 01 Rc1/8 M5 M50.8PVPD 01N NPT1/8 2 01F G1/8 M5 M50.8 M50.8 M-5P ZB03 ZB04 ZB05 ZB06 PV N.C.

Multistage Ejector (N)ZL Series

Note 2) Since surge voltage is prevented by a rectifier in the case of AC, there is no "S" type.

AC Servo Motor Driver (MECHATROLINK-II type)

54 3375 LEFB32 S LEFB40 S LEJB40 T 27 131072 3375 LEJB63 T 42 2625 H 24 1500 LEJS40 A 16 1000 LEJ B 8 500 65536 H 30 1875 A 20 1250 LEJS63 B 10 625 *The travel distance of the actuator per 1 pulse should be 1 [m/pulse]. 26 - 4.5 Positioning Completed Width This signal indicates that servomotor movement has been completed during position control.

CE

-3 (1)CEU5 CE1-R** (2) (3) (4) (5) *(CEU5**-D)EMC CEU5) 5. 5-1 () CE1 14.5mT CE1 15000 18cm 5-2 0.1mm 0.0 0.2 0.1 A B (1)0.8mm (2) sin cos 2 0.8mm (3)1/8 90,0.1mm/ (4)0.1mm 5-3 CE1 A /B 90 A B 3 2 2 1 1 0 A ON90B ON B ON90A ON A B 6. 6-1 11 11 DC12V DC24V DC12V24V CEU5 CEU5 MODE 2 90 CEU5 4 10,11 SMC 13 CEU5 13 23m 23m () CEU5 11 AC 10 70500mm/s 12 6-2 5,6, 12

5 Port Air Operated Valve

VFA3000 DXT031-30-11 DXT156-9-8 Note VFA5000 HNBR 7 Gasket 1/4: VF5000-71-1 3/8: VF5000-71-2 1/2: VF5000-71-3 8 1/4: VF3000-71-1 3/8: VF3000-71-2 Sub-plate Aluminum die-casted Round head combination screw (1 pc.) DXT031-44-1 (M4 x 39.5, With spring washer) Caution For mounting valve Tightening Torque for Mounting Valve Hexagon socket head cap screw (1 pc.)

Digital Flow Switches

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 11 For Water Digital Flow Switch Series PF2W Refer to www.smcworld.com for details of products compatible with overseas standards.