Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 200mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: LECA6, NPN, Step Data Input Type, I/O Cable Length for LEC: 3m,

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 200mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: LECA6, NPN, Step Data Input Type, I/O Cable Length for LEC: 3m,

Size: 25, Bearing Type: Sliding Bearing, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm, Stroke: 200mm, Motor Option: w/o Option, Guide Option: w/o Guide, Actuator Cable Type: Robotic Cable - Flexible cable, Actuator Cable Length: 3m, Controller Type for (LEC, JXC): w/Controller, NPN, I/O Cable Length for LEC: 3m,

Size: 25, Bearing Type: Sliding Bearing, Motor Mounting: In-line Type, Motor Type: Step Motor (Servo/24VDC), Lead: Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm, Stroke: 200mm, Motor Option: w/o Option, Guide Option: w/o Guide, Actuator Cable Type: Robotic Cable - Flexible cable, Actuator Cable Length: 3m, Controller Type for (LEC, JXC): w/Controller, NPN, I/O Cable Length for LEC: 3m, Controller

Size: 32, Bearing Type: Sliding Bearing, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 200mm, Motor Option: w/o Option, Guide Option: w/o Guide, Actuator Cable Type: Robotic Cable - Flexible cable, Actuator Cable Length: 3m, Controller Type for (LEC, JXC): w/Controller, NPN, I/O Cable Length for LEC: 3m

Size: 16, Bearing Type: Sliding Bearing, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 200mm, Motor Option: w/o Option, Guide Option: w/o Guide, Actuator Cable Type: Robotic Cable - Flexible cable, Actuator Cable Length: 3m, Controller Type for (LEC, JXC): w/Controller, NPN, I/O Cable Length for LEC:

Size: 25, Bearing Type: Sliding Bearing, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 200mm, Motor Option: w/o Option, Guide Option: w/o Guide, Actuator Cable Type: Robotic Cable - Flexible cable, Actuator Cable Length: 3m, Controller Type for (LEC, JXC): w/Controller, NPN, I/O Cable Length for LEC:

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm, Stroke: 200mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Robotic Flexible Cable, Actuator Cable

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm, Stroke: 200mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Robotic Flexible Cable, Actuator Cable

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm, Stroke: 200mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Robotic Flexible Cable, Actuator Cable

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Specifications W A D With shock absorber (mm) 11-MXPJ6 11-MXP10 11-MXP12 11-MXP16 Model MXPJ6 MXP10 MXP6 MXP12 MXP16 Model Cylinder bore size (mm) 6 10 12 16 Surface C to surface A 0.02 Parallelism Surface D to surface B 0.02 M5 x 0.8 M3 x 0.5 Port size Surface C to surface A 0.004 Traveling parallelism Fluid Air Surface D to surface B 0.004 Action Double acting M dimension tolerance 0.05

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size 100 200 205 300 400 M5 standard 3.2 1/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 1/4 standard 4 6 8 10 12 3/8 standard 1/2 standard With One-touch fittings Use 1/8" tube.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08, 09 06, 07 Number of needle rotations Number of needle rotations 543 Series AS-FG Construction: Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.

Air Slide Table Series MXQ

Maximum allowable moment: Mmax (Nm) Table 4 0.4 Pitch/Yaw moment: Mpmax/Mymax Stroke (mm) Roll moment: Mrmax 0.3 Stroke (mm) Model 10 20 30 40 50 75 100 125 150 84 10 20 30 40 50 75 100 125 150 0.2 MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 1.4 1.4 1.4 2.8 2.8 3.5 3.5 3.5 5.1 5.1 2.0 2.0 2.8 3.7 7.9 5.1 5.1 6.0 6.9 7.4 7.9 7.4 50 100 200 300 500 700 4.7 4.7 4.7 7.2 7.2 11 11 11 13 13 15 14

Peltier-type Chiller Thermo-con/ Compact Type

For details, refer to the optional accessory (page 11). 6 HEF Series Cooling Capacity Circulating fluid: Water, Flow rate: 1 L/min Circulating fluid: Water, Flow rate: 1 L/min, When constant fan speed mode is selected 600 600 500 500 Cooling capacity [W] Cooling capacity [W] Ambient temperature 25C 400 400 Ambient temperature 25C 300 300 200 200 Ambient temperature 35C Ambient temperature

240

MXH MXH Vertical Horizontal MXS L1: Load eccentricity MXQ m Mounting orientation m MXQ L H MXF L H MXW Maximum speed (mm/s) Up to 100 Up to 300 x Up to 500 Up to 100 100 b 50 v 200 n 50 m Up to 300 100 , 200 .

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rod boot Intermediate strokes are available.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

1MPa: Approx. 10.2kgf/cm2 0.2MPa 0.2MPa 100 100 0.1MPa 0.1MPa 0 0 20 20 40 40 60 60 Gripping point L mm Gripping point L mm MHS2-63D MHS2-63D Note: 1N = 0.2248lbf 1in = 25.4mm 1MPa = 145psi Pressure 0.6MPa Pressure 0.6MPa 600 600 Gripping force N 0.5MPa 0.5MPa Gripping force N 0.4MPa 0.4MPa 400 400 0.3MPa 0.3MPa 0.2MPa 0.2MPa 200 200 0.1MPa 0.1MPa 0 0 20 20 40 40 60 60 Gripping point L mm

XM, XY

Conductance (L/s) Note 1) Initial exhaust valve 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 1.3 x 10-10 {1 x 10-10} at ambient temperatures, excluding gas permeation (Standard material: FKM) Internal Leakage (Pam3/s) 1.3 x 10-11 {1 x 10-11} at ambient temperatures, excluding gas permeation (Standard material: FKM) External Main exhaust valve 0.10 0.21 0.24 0.26 0.28 Operating time (s) Initial

Microspeed Cylinder

Bore size (mm) 20 25 32 40 20 25 32 40 Clean room series Standard stroke (mm) 10(Relieving type) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 11(Vacuum type) Specifications Bore size (mm) 10(Relieving type) 11(Vacuum type) 20 20 25 32 40 25 32 40 Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5MPa (217psi) 1.0MPa (145psi) 0.035MPa (5.1psi) 0.025MPa (3.6psi