XLAQ/XLDQ 11 E 30 40 55 75 F 17 26 41 52 G 40 39 63 68 H 87 91 129 142 J XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 40 50 65 70 Note) The heater (Option) is not available with XLAQ-16. 471 Aluminum One-touch Connection and Release High Vacuum Angle Valve 2-step Control, Single Acting/Bellows Seal, O-ring Seal XLDQ Series How to Order XLDQ M9N A 40 q w e r t y w Actuator port direction q Flange size Rear flange
20C (68F) bend the tubing into a U shape.
Size A B C D (g6) DD (h9) F H J K With auto switch Without auto switch U W BA CA CB Valve dimensions Key dimensionsNote) S SB SC SD SE S VH VJ VK VL b l 50 62 48 46 15 25 2.5 36 M8 x 1.25 depth 8 5 156 (189) 1.5 5 14.5 33 144 (177) 98 17 17 9.5 7.5 39.5 4 21 8 5 0 0.030 25 63 76 60 57 17 30 2.5 41 M10 x 1.5 depth 12 5 175 (213.5) 1.5 5 21.5 33 163 (201.5) 117 19.5 20 11 8 39.5 11 21 8 6
(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 82 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 84 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 98 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 102 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22 11
Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: C (Metal Stopper Both Ends), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal
Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -
Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: Metal Stopper Both Ends, Function: Axial Piping Type, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -
Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -
Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 15mm, Adjuster: Metal Stopper Both Ends, Function: Axial Piping Type, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -
Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 5mm, Adjuster: Metal Stopper Extension End, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -
Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: w/o Adjuster, Function: Axial Piping Type, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -
Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: Metal Stopper Both Ends, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -
Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 5mm, Adjuster: CS (Metal Stopper Extension End), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal
Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: w/o Adjuster, Function: P (Axial Piping Type), Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal
Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal
Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: C (Metal Stopper Both Ends), Function: P (Axial Piping Type), Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal
Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal
Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: Standard, Stroke: 15mm, Adjuster: C (Metal Stopper Both Ends), Function: P (Axial Piping Type), Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal
11 11 11 MY V 124 144 169 194 219 A 59.5 34.5 34.5 34.5 34.5 34.5 W V CY B 135.5 160.5 185.5 210.5 235.5 260.5 MXW16 W 39.5 14.5 14.5 14.5 14.5 14.5 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com V 155.5 180.5 205.5 230.5 225.5 280.5 A CX 68.5 43.5 43.5
C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114