HRX-OM-Q026

AL47 13 Pump breaker trip AL48 Pump inverter error AL49 Air exhaust fan stoppage 14 12: Water-cooled type model does not generate this alarm. 13: Power supply "-20" specification model does not generate this alarm.

ML2B

Reed switch D-X 20Data 10-13-17

ML2B

Reed switch D-X 20Data 10-13-17

Multistage Ejector Series ZL112/212 1

For specific product precuations on solenoid valves (Series ZL112), refer to the solenoid valve (Series SYJ500) catalog. 13-7-2 3 Precautions Be sure to read before handling. Refer to pages 13-15-3 to 13-15-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to page 13-1-5 for Precautions on every series.

High Vacuum L Type Valve

Period and Scope of Warranty 13 7. Parts Replacement Procedure 14 1 XL-OMS0001-B Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled flow (Free flow) Flow rate (l/min (ANR)) 100 180 230 260 390 660 790 1580 1710 460 920 Effective area (mm 2) 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Note) Flow rate values are measured at 0.5 MPa and 20C. 15-9-75

PSxx-OMU0002CN

No.PS-OMU0002CN-D // ZSE20A(F) ISE20A 2 8 10 11 15 15 17 19 [] 22 23 3 24 26 28 28 28 F0 30 F1 OUT1 31 F2 OUT2 34 F3 36 F4 37 F5 FUNC 39 F6 41 F10 42 F11 48 F80 49 F81 50 F82 52 F90 53 F96 55 F97 56 F98 58 F99 60 61 65 65 66 75 75 78 -1No.PS-OMU0002CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

70pvpump

115 90 74.5 FLUID I N AIR EXH AIR EXH (Pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (Pilot air supply port) (257) 112 Rc 1/4 56 165 56 Reset button RESET FLUID OUT PROCESS PUMP 167 AIR SUP 132.5 FLUID I N 125.5 103.5 AIR EXH 58.5 48.5 202 114 3.5 3 AIR EXH (Pilot air exhaust port) FLUID IN Rc 1/2, 3/4 Rc 1/4 17-5-152 13

HRX-OM-S004

Flow switch 13 Terminal No. 3 Terminal No. Black(Output1) Black (Output1) 11 Terminal No. Fig. 3-13 Wiring of the external switch (PNP open collector output) (example) HRS Series 3.3Installation 3-23 HRX-OM-S004 Chapter 3 Transport and Setting Up Setting items Table 3-10 shows the setting items of the external switch. For details, refer to 5.21 Communication function.

Thermo-chiller/Rack Mount Type

, Ion exchange resin*13 Power supply Single-phase 200 to 230 VAC, 50/60 Hz, Allowable voltage range 10%*15 Circuit protector [A] 10 Applicable earth leakage breaker capacity8 Rated current: 10 A Sensitivity current: 30 mA Electrical system Cable quantity x Size (Including grounding cable)16 3 cores x 14 AWG (3 cores x 2.0 mm2) Rated operating current (50/60 Hz)17 [A] 2.5/3.0 For Option T1

ZMA

Refer to pages 13-15-3 to 13-15-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to page 13-1-5 for Precautions on every series. Mounting Warning 1. Do not drop or bump. Do not drop, bump or apply excessive impact (1,000 m/s2) when handling.

VZS

(Put packing B w on the surface contacting to the end plate.) 4 stations (12 stations) 5 stations (13 stations) 3. For a style with a D-sub connector, open the cover !4 and insert the pin of lead wire assembly !0 as shown in the right figure.

AC Servo Motor Driver (SSCNET /H Type)

Axis No. settings 13 5. Parameter list (Driver side) 15 6.

energy saving effect

Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions.

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

JXCx-OMT0061CN

PLC 5 (PLC) 15ms30ms ->/P.55 12.4 () () (LED() ->/P.13 3.2 ) ->/P.47 11. ->/P.47 11. ->/P.47 11. ->/P.12 3. (CN1: EMG ->/P.12 3. ) 92 - 22. 10.

Auto Switch Guide

Auto Switch Internal Circuit D-H7A1 Weight (g) DC (+) Brown D-H7A1 D-H7A2 D-H7B Auto switch model Main circuit of switch Main circuit of switch Main circuit of switch 11 13 13 0.5 OUT Black Lead wire length (m) 50 57 57 3 81 92 92 5 DC () Blue Dimensions D-H7A2 DC (+) Brown OUT Black DC () Blue Indicator light D-H7B 3.5 mounting hole OUT (+) Brown Most sensitive position OUT () Blue 6-16-

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

2 56 46 32 3 75 65 51 4 94 84 70 5 6 132 122 108 7 151 141 127 8 170 160 146 9 189 179 165 10 208 198 184 11 227 217 203 12 246 236 222 13 265 255 241 14 284 274 260 15 303 293 279 16 322 312 298 17 341 331 317 18 360 350 336 19 379 369 355 20 398 388 374 113 103 89 4-13-9 10 Series VKF300 Dimensions: Manifold Base mounted Common SUP, Common EXH/Side Ported Type 42 Manifold Grommet: G DIN

AC Servo Motor Driver (SSCNET Type)

Parameter list (Driver side) . 13 6.

VM

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62