Industrial Filters

Symbol Element length Number of arranged elements 4 7 9 18 22 29 34 37 53 83 04 07 09 18 22 29 34 37 53 83 Element length FQ1 A B C D L250 L500 (L250 x 2) L750 (L250 x 3) L1000 (L250 x 4) Symbol Nominal filtration accuracy (m) Note) FN Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 50 70 74 75 100 105 120 EB ES X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Port size Port

LV50-OMQ0002

4.6 9.5 14 56 38 2.5 depth 8.5 2.6 Approx. 70g LFE38 62 53 4.6 3.5 20 68 43 2.5 depth 8.5 2.6 Approx. 70g -71No.LV50***-OMQ0002-G Dimension of the cable with M12 connector lead wire (LFE-1-A3) 4 Black Blue 3 White 2 1 Brown -72No.LV50***-OMQ0002-G Revision A : Contents revised in several places.

mb1

53 73 73 MB-B03 MB-B05 11 11 MB-B08 Rotating Angle Method for longitudinal mounting of clevis pivot bracket When there is no air cushion, the unit is equipped with rubber bumpers.

MK

0.1 50 0.15 76 M8 X 1.25 9 108 80 9 60 92 M10 X 1.5 REC Arm for width across flats RHC Rod end width across flats With arm MTS CC Model MKl32-llN MKl40-llN MKl50-llN MKl63-llN Model MKl32-llM MKl40-llM MKl50-llM MKl63-llM H A A D G B B E C C F D F G M8 X 1.25 18 6 36 6.2 67 14 18 20 9 45 35.5 25 53.5 M8 X 1.25 61 18 6 36 6.2 67 14 18 20 9 45 43 25 M10 X 1.5 77 22 8 46 8.2 88 18 23 22 65 53

Single Axis Electric Actuator Series LJ1H

m (kg) Refer to page 145 for deflection data. 32 Standard Motor/Vertical Mount Specification Series LJ1H20 Dimensions/LJ1H202PF Scale: 10% 12.5 9.5 Work piece mounting reference plane 110 67 20 4-M6 x 1 thread depth 15 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane Z section detail 8H8 depth 8 130 200 52 52.5 Stroke + 150 (table movement range) 53

Square Tube Type Air Cylinder Series MB1

53 73 73 MB-B03 MB-B05 MB-B08 Rotation Bore size (mm) A Method for longitudinal mounting of clevis bracket When there is no air cushion, the unit is equipped with rubber bumpers.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53

Stopper Cylinder

5 41 4 40 5.5 9 depth 7 1/8 1/8 1/8 24.5 24 44 28 9 15 50 107 54 25 64 8 10 53 7 50 4 50 6.6 11 depth 8 1/8 1/8 1/8 24.5 24 56 28 9 19 B + stroke R R * Refer to pages 572 and 573 for the auto switch proper mounting position and mounting height. * For the single acting type, a One-touch fitting is on the rod end only. * The position of the width across flats (K) is arbitrary and is not

MXQ

(N) Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 15 23 30 38 45 53 75 OUT IN 45 68 90 113 136 158 226 12 6 34 51 68 85 102 119 IN 170 80 121 161 201 241 281 OUT 402 16 8 60 91 121 151 181 211 IN 302 OUT 628 126 188 251 314 377 440 20 10 IN

2/3 Port Valve

80.5 74.5 79.5 82.5 125.5 142.5 24.3 63 124 2.3 52 42 25 26 28 34 4.5 14 55 60.5 73 1 84 100 92 108 135.5 137 153 154 170 83.5 89.5 88.5 94.5 91.5 97.5 28.3 33.3 80 90 2.3 2.3 62 72 50 60 30 35 31 36 35 40 43 49 5.5 6.5 17.5 20 151.5 32A, 40A, 50A Port size Main Port Rc(PT) Pilot port A B C D E F G H I J K L M Model Rc(PT) 1 8 1 4 1 4 VNA5-32A VNA6-40A VNA7-50A 1 4 1 105 120 140 77 96 113 53

MGP

MGG 42 29 11 7.5 8 8.5 9 M4 X 0.7 10 12 13 15 M4 X 0.7 4.3 4.3 5.6 5.6 M5 X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: D (Push-turn Locking Slotted Type), A,B Port: 01 (1/8), Thread Type: N (NPT), Bracket: F2 (w/Side Bracket)

Actuation: 1 (2-Position Single), Electrical Entry: LL (L-type Plug Connector w/Cover), Lead Wire Length: 30 (3000mm), Manual Override: Non-locking Push Type, A,B Port: C4 (ø4 One-touch Fitting, Metric), Thread Type: Rc, Bracket: F1 (w/Foot Bracket, 2-position, Single Only)

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 30 (3000mm), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT), Bracket: F1 (w/Foot Bracket, 2-position, Single Only)

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port: N7 (ø1/4" One-touch Fitting, Inch), Thread Type: Rc, Bracket: F2 (w/Side Bracket)

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 100 (10000mm, Semi-standard), Manual Override: D (Push-turn Locking Slotted Type), A,B Port: 01 (1/8), Thread Type: F (G), Bracket: F2 (w/Side Bracket)

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 100 (10000mm, Semi-standard), Manual Override: Non-locking Push Type, A,B Port: N7 (ø1/4" One-touch Fitting, Inch), Thread Type: Rc, Bracket: F2 (w/Side Bracket)

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port: N7 (ø1/4" One-touch Fitting, Inch), Thread Type: Rc, Bracket: F1 (w/Foot Bracket, 2-position, Single Only)

Actuation: 1 (2-Position Single), Electrical Entry: LL (L-type Plug Connector w/Cover), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: N9 (ø5/16" One-touch Fitting, Inch), Thread Type: Rc, Bracket: F1 (w/Foot Bracket, 2-position, Single Only)

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 20 (2000mm), Manual Override: Non-locking Push Type, A,B Port: C6 (ø6 One-touch Fitting, Metric), Thread Type: Rc, Bracket: F2 (w/Side Bracket)