Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 01 (Rc1/8), Output Specification: L3 (Out 1: IO-Link or NPN/PNP, Out 2: Analog 1-5V), Lead Wire: N (w/o Lead Wire w/Connector)
Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 01 (Rc1/8), Output Specification: L3 (Out 1: IO-Link or NPN/PNP, Out 2: Analog 1-5V), Lead Wire: N (w/o Lead Wire w/Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve)
Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 01 (Rc1/8), Output Specification: L3 (Out 1: IO-Link or NPN/PNP, Out 2: Analog 1-5V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve)
Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: None (Straight), Port Size: 01 (Rc1/8), Output Specification: L3 (Out 1: IO-Link or NPN/PNP, Out 2: Analog 1-5V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration
Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: L3 (Out 1: IO-Link or NPN/PNP, Out 2: Analog 1-5V), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)
(Nm) L(mm) MHM-16D M3x0.5 0.63 6 MHM-25D M4x0.7 1.5 8 MHM-32D M5x0.8 3 10 MHM-50D M6x1 5.2 12 (N) MHM-16D 100 MHM-25D 200 MHM-32D 300 MHM-50D 500 -7- 2-3. 40 2-4. () 5 5 P-01-11 -8- 2-5. 1.52 2-6. 1 ()ISO VG320 (SDS) -9- 2-7. 1) 1) 2) 3) 12mm -10- 2 C3 C1 C2: C3 D-M9V D-M9WV D-M9AV D-M9 D-M9W D-M9A D-P3DWA A B E G A B E G L A B E G L D F H MHM-16D 9.1 9.1 5.6 4.6 8.1 12.8 11
Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L3 [Out: IO-Link, Switch Output (N/P); Func: Analog Voltage Output <-> External Input; Monitor Unit Model: PFG300 Series]
Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L3 [Out: IO-Link, Switch Output (N/P); Func: Analog Voltage Output <-> External Input; Monitor Unit Model: PFG300 Series], Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: Units Selection Function, Calibration Certificate: A (Yes)
Applicable tubing size ASF 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 Can be mounted on the panel.
(Except double wiring) With name plate External pilot 1 station 01 Copper/Fluorine/Silicone free + Low particle generation 21 Kit type The number of max. stations differs from kit to kit. (Refer to the table below.) Note 1) When two or more symbols are specified, indicate them alphabetically.
Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L3 [Out: IO-Link, Switch Output (N/P); Func: Analog Voltage Output <-> External Input; Monitor Unit Model: PFG300 Series], Lead Wire: Q (Lead Wire and M12-M12 Connector, 3m)
Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L3 [Out: IO-Link, Switch Output (N/P); Func: Analog Voltage Output <-> External Input; Monitor Unit Model: PFG300 Series], Lead Wire: N (w/o Lead Wire and M12 Connector)
Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L3 [Out: IO-Link, Switch Output (N/P); Func: Analog Voltage Output <-> External Input; Monitor Unit Model: PFG300 Series], Lead Wire: N (w/o Lead Wire and M12 Connector), Unit Specification: Units Selection Function, Calibration Certificate: A (Yes)
Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: None (Straight), Port Size: 01 (Rc1/8), Output Specification: L3 (Out 1: IO-Link or NPN/PNP, Out 2: Analog 1-5V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: X731 (Compatible with Argon and Carbon Dioxide Mixed
Type of Actuation: 3 Position Closed Center, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 110VAC 50/60HZ, Electrical Entry: DIN Terminal w/Connector, Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported 1/8, Thread: Rc (or None), Option: Side Bracket
Type of Actuation: 3 Position Closed Center, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 110VAC 50/60HZ, Electrical Entry: L Plug Connector w/Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported 1/8, Thread: Rc (or None), Option:
Type of Actuation: 3 Position Closed Center, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 100VAC 50/60HZ, Electrical Entry: DIN Terminal w/Connector, Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported 1/8, Thread: Rc (or None), Option: Side Bracket
Type of Actuation: 3 Position Closed Center, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 12VDC, Electrical Entry: L Plug Connector w/Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported 1/8, Thread: Rc (or None), Option: Side Bracket
Type of Actuation: 3 Position Closed Center, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: L Plug Connector w/Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: Surge Suppressor, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported 1/8, Thread: Rc (or None), Option: Side Bracket
Type of Actuation: 3 Position Closed Center, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: M8 Connector w/o Connector, Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported 1/8, Thread: Rc (or None), Option: Side Bracket