Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

U D 5 3 U D 5 3 Individual EXH block assembly Individual SUP block assembly X U side D side U side D side X X 1(P) 1(P) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 1(P) 3/5(R) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) [When a different supply pressure is required for only a middle valve.]

V

U I T T Y P E 42 M A N I F O L D S) External Pilot Types VG342R (See Valve Section) VP34lR, VP54lR, VP74lR (See Valve Section) VNB Series (See Valve Section) S 40R H O W T O O R D E R VQ B A S E M O U N T E D S E R I E S (P L U GI N) S E R I E S Y SY X SX VQ 0 R O R D E R A S S TA N D A R D T Y P E S I Z E F O R E X T E R N A L P I L O T S I Z E 3 5 7 A S S TA N D A R D 1 2 O R D E R A S

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R S D WX Bottom ported (Applicable O-ring) Hole Sizes for Centralized Piping on the Bottom WX Y S d D R Model MY1C16 MY1C20 WX Y S d D R Applicable O-ring Model 30 6.5 9 4 8.4 1.1 32 8 6.5 4 8.4 1.1 C6 (Machine the mounting side to the dimensions below.) 8-11-61 59 Series MY1C Standard Type/Centralized Piping Type 25, 32, 40 Refer to page 8-11-9 regarding centralized piping port variations

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

ZP

R D A6 M Applicable tubing O.D.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Description Manifold block assembly q For D side P/R port with One-touch fitting for 6 For U side P/R port with One-touch fitting for 6 VZ1000-2A-2D SUP/EXH block assembly D side w VZ1000-2A-2U SUP/EXH block assembly e DIN rail End block assembly End block assembly VZ1000-3A-1D For D side For U side Without D-sub connector For indicated location, P/R port with One-touch fitting for 6 r VZ1000

Table of Contents

1/8 12 13.5 18.5 16 17 18.5 21.0 19 32 18.2 18.5 R 1/4 17 29.4 35.4 34.4 40.4 34 36 Reference dimensions for M5 and R threads after installation. 20.0 Inch Size A L4 Model Weight (g) M1 d D2 L2 L3 D1 L1 H T Max.

Electric Actuators

D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.

Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

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D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

P R R P R B B B B B 63.8 (DIN: 65.1) 63 (DIN: 64.3) 122[126.4] 19 19 19 60 31.5 22 A A A A A 13.8 (DIN: 15.1) 1/4 (P, R port) 4-4.5 (For mounting) (Pitch) P = 20 29 Manual override (Station n) (Station 1) (Light/surge voltage suppressor) + + + 73[80] 57.6 A A 10.5 41 30.5 B B 6.5 (Pitch) P = 20 25 1/8 (A, B port) L plug connector (L) M plug connector (M) DIN Terminal (D) M8 connector (WO)

High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Stations 3 2 1 D D D D How to Order Valve 10-SV 1 1 0 0 F 5 Note) q w r e t y u i Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors q Series r Back pressure check valve Note) Available with manifold block for station additions.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R. Fittings & Tubing Air Cylinders Rotary Actuators D side U side Stations Electrical Wiring Specifications D-sub connector assembly D-sub connector 015 030 050 AXT100-DS25Wire color Polarity Terminal no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R. Fittings & Tubing Air Cylinders Rotary Actuators D side U side Stations Electrical Wiring Specifications D-sub connector assembly D-sub connector 015 030 050 AXT100-DS25Wire color Polarity Terminal no.

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

SX

P, R port SX3000 (Metric size) With One-touch fitting for 8 (Inch size) With One-touch fittings for 5/16" P, R port SX5000 (Metric size) With One-touch fitting for 10 (Inch size) With One-touch fittings for 3/8" For D side r End block assembly L SX3000-53-1A SX5000-53-1A For U side (Metric size) SX5000-51-1A (Inch size) SX3000-51-15A SX5000-52-1A (Metric size) SX3000-51-1A (Inch size) SX3000

Series SV

(S, R, RS) P PG PH 1 2 U D B (-D) When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

Made to Order

Proper Auto Switch Mounting Position/Applicable Cylinder Series: CDBG1-XC13 (mm) Auto Switch Mounting Height (mm) Lock position D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F7/F79F D-J79/F7NT D-F7W/J79W/F7BA H (Head side) R (Rod side) W (Both sides) A B Note 2) A B A B Note 2) Auto switch model D-F7V D-F7WV D-F7BAV D-J79C D-A7 D-A80 D-A73C D-A80C D-A79W Bore size 20 +0 +12 +11 +0 +11 +12 25 +0.5 +11.5