VCA Valve type Thread type (for single unit only) Rc G NPT NPTF Nil F N T OUT(2) 1 IN(1) Port size Fluid Symbol 02 03 04 06 Class 3 Class 2 Port size 1/4 (8A) 3/8(10A) 1/2(15A) 3/4(20A) Class 4 General air Dry air Nil A Voltage 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Orifice size Orifice size (mm) 3 4 5 7 10 Class 3 Class 2 Class 4 Symbol 3 4 5 7 10 Please consult
(1 ) 2. 3. 0 IDFA Series 9-3 (ADH4000-04) 9 2 IDX-OM-W032 10 R 10 R 10-1 10-2 IDFA22E/37E/55E-23-R 10A 30mA IDFA75E-23-R 20A 30mA 10-3 (IDFA55E,75E) (IDFA55E,75E) M5 9.5mm 2 1.25mm L ,N N L () () IDFA Series 10-3 10-1 IDX-OM-W032 10 R 10-4 () () ONOFF 10-5 R 6-4 6-3 T 11-6 11-3 IDFA Series 10-4 10-2 IDX-OM-W032 11 T 11 T T 11-211-3 11-1 1. 2. 3.
EXH port EXH port VF 000 75 A 1 3 Series Thread type Nil F N T Rc Symbol 3 5 Series Port size VFA3000 1/8 G VFA5000 1/4 NPT NPTF 1514 5 Port Air Operated Valve Body Ported/Manifold VFA1000/3000/5000 Series Dimensions: VFA1000 Series Type 30: VV5FA1-30-1-: Common exhaust 1/8 [4 (A), 2 (B) port] 12 L2 L1 SYA M5 5 10 17.5 17.8 27.8 M5 x 0.8 [4 (A), 2 (B) port] 10 SYJA 20.3 20.3 4A 2B VZA P R
Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
11-6 11-4 9-4 IDFB Series 9-3 IDX-OM-W035 10 S 10 S 10-1 10-2 PE IDFB Series 10-1 10-1 IDX-OM-W035 11 T 11 T 11-1 IEC 11-2 AC200V / 2A DC24V / 2A ( 20V / 3mA) 11-3 ON ONOFF 3 () 5 /1 () 11-1 IDFB Series 11-1 IDX-OM-W035 11 T 11-4 IDFB22E/37E PE 1 2 3 0.25inch (6.5mm) (1.25mm 2) AWG14 (2mm 2) AWG16 (1.25mm 2) AWG14 (2mm 2) AWG16 IDFB Series 11-4 11-2 IDX-OM-W035 11 T IDFB55E
Type Borc D Type S T y p e ' DC Type ' -T rtpe A B , " , ,.
Type Borc D Type S T y p e ' DC Type ' -T rtpe A B , " , ,.
X axis Y axis Z axis Z 5 W 5 mm 10 mm 20 mm 0.8 kg 20 Y 10 3.
20 CY 15 10 MG 0.1 10 CX 0.1 6 6 D-X 0.03 5 5 10 20 30 40 50 100 10 20 30 40 50 100 20Overhang L (mm) Overhang L (mm) Graph (4) V = Up to 800 mm/s (Up to 700 mm/s for 15, 20) Data CXSJM CXSJL Graph (3) V = Up to 600 mm/s CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15
10 to 32 Graph (3) V = 200 mm/s Graph (4) V = 400 mm/s 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) Graph (5) V = 600 mm/s Graph (6) V = 700 mm/s (800 mm/s for 10) 2 0.6 20 32 25 0.4 1 15 20 Weight m (kg) Weight m (kg) 0.5 15 0.2 10 10 CXSM CXSL CXSM
Also, take measures to prevent ingress of water and foreign matter from the breathing port of the diaphragm. 5-5-10 1 3 Port Air Operated Valve Series VGA342 How to Order SA 04 VGA342 A VA Port size Passage A Normally closed (N.C.) B Normally open (N.O.) Thread type Nil Rc F G N NPT T NPTF 04 1/2 06 3/4 10 1 SA VA JIS Symbol VM N.C. N.O.
Fixed end KG KFG2 MS KKA Maximum Operating Pressure How to Order KP Metric size TD0425 10 2.0 LQ 1.8 Max. operating pressure MPa TD0425 Length per roll 1.6 MQR Length 10 m roll 20 m roll Symbol 10 20 TD0604 1.4 T T 1.2 TD0806/TD1075/TD1209 1.0 IDK Tubing model 0.8 0.6 0.4 0.2 0.0 20 0 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300 Operating temperature C 509 Soft Fluoropolymer Tubing
Output terminal q w e r t Preset No. 6 7 8 9 10 For example, when bank 2 is selected, presets 6 through 10 are valid and when the count value coincides with the setting value of 6 through 10, the respective output terminals q through t are turned ON. Prescale Function This function allows free setting of how many millimeters will indicate one pulse.
O.D. d D1 L3 A L4 L2 L1 M T H (Width across flats) Metric Size [mm] Model d T Uni thread H D1 D3 L1 L2 L3 L4 Note1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS22l1F-U01-23A 3.2 7.2 12 19.1 26.2 19.1 30.6 29.2 25.8 24.4 13.3 9 AS22l1F-U01-04A 4 8.2 AS22l1F-U01-06A 6 10.4 10 AS22l1F-U01-08A 8 13.2 22.4 29.5 14.2 11 AS22l1F-U01-10A 10 15.9 25.3 32.4 15.6 12 AS22l1F-U02-23A 3.2
Specifications Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50 (No freezing.
B1 Bore size (mm) 32 40 50 63 80 100 125 l2 E B2 B3 L1 TG1 T FL d1 d2 d3 CN R 45 14 34 3.3 11.5 32.5 3 5 5.5 22 10 30 10.5 6.6 10 11 17 55 16 40 4.3 12 38 4 5 5.5 25 10 35 11 6.6 12 13 20 65 21 45 4.3 14 46.5 4 5 6.5 27 12 40 15 9 16 18 22 75 21 51 4.3 14 56.5 4 5 6.5 32 12 45 15 9 16 18 25 95 25 65 4.3 16 72 4 5 10 36 16 45 18 11 20 22 30 115 25 75 6.3 16 89 4 5 10 41 16 55 18 11 20 22 32
--T 89 54 PF3W740--T 109 71 PF3W711--T 135 92 PF3W721--T 115 74 PF3W721-F12-T 119 76 PF3W721-F14-T 123 78 -83No.PF-OMM0004-D PF3W704/720/740() A AA B D F K L N P Q Q PF3W704S 104 50 63.6(Max.68.6) 70.2 34 58.5 18 13.6 2.7 10 19 6 PF3W720S 112 54 63.6(Max.68.6) 74.2 34 62.5 18 13.6 2.7 10 19 6 PF3W740S 142 71 75.25(Max.81) 94.5 44 79 28 16.8 2.7 10 28 7 S T PF3W704S 56.5 22 PF3W720S
of the rated voltage 12 V 10% of the rated voltage 100 V 10% of the rated voltage 110 V*1 [115 V] 10% of the rated voltage [15% to +5% of the rated voltage] 200 V 10% of the rated voltage 220 V*1 Allowable voltage fluctuation AC [230 V] 10% of the rated voltage [15% to +5% of the rated voltage] Power consumption [W] DC 0.35 (With light: 0.4) 0.35 (With light: 0.45) 100 V 0.78 (With light