MLGP

63 63 63 50 50 50 50 10 10 Load weight m (kg) 40 40 40 40 32 32 32 32 25 25 25 25 20 20 20 20 1 1 0.5 10 50 51 100 300 200 0.5 10 50 51 100 300 200 Stroke (mm) Stroke (mm) Features 11 Low Profile Guide Cylinder with Lock Series MLGP Horizontal Mounting Ball Bushing 29 l2 = 50mm, V = 200m/s 30 l2 = 100mm, V = 200m/s MLGPL20, 25 MLGPL20, 25 10 10 25 25 25 20 25 20 20 Load weight m (kg) Load

MLGP

63 63 63 50 50 50 50 10 10 Load weight m (kg) 40 40 40 40 32 32 32 32 25 25 25 25 20 20 20 20 1 1 0.5 10 50 51 100 300 200 0.5 10 50 51 100 300 200 Stroke (mm) Stroke (mm) Features 11 Low Profile Guide Cylinder with Lock Series MLGP Horizontal Mounting Ball Bushing 29 l2 = 50mm, V = 200m/s 30 l2 = 100mm, V = 200m/s MLGPL20, 25 MLGPL20, 25 10 10 25 25 25 20 25 20 20 Load weight m (kg) Load

reduces flow setting time

NPT thread r !

Refrigerated Air Dryer

, IDF6E-20 IDF8E-20, IDF11E-20 Type 200 V 5 A IDU3E-20, IDU4E-20 IDU6E-20 S Option symbol IDF1E-10 to 11E-10, IDU3E-10 to IDU6E-10 With power cord connection The option allows the connection of a power cord to a terminal block.

HRX-OM-R028

Broken wire o r coming off 60 sec. 60 sec. AL19 Communication error is generated.

3 Port Solenoid Valve Series VQ100 1

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.

Series VCS

1 5 1 0 25 20 1 5 30 25 25 2.

,,: ,.

Bmm Pim Htlins Hex Head: PLUG \T Souare Head: PLUG Hex Countersunk: PLUG 1,," 21 Bmm S.l.E.45'tlme Tube To Male Pioe: CONNECTOR 1la 1B 5t16-24 7t16 .91 .078 3/16 'v8 sl8-24 7t't6 .98 .125 3/16 114 3ta-24 9/16 1 . 1 7 .125 1t4 1te 7t16-20 7116 1.O4 .189 1t4 114 7t16-20 9/16 1.25 .189 1t4 3/8 7t16-2016 .189 1t4 1t2 7 t16-20 718 1.54 . 1 8 9 5/16 1t8 1/2-20 1/2 . 1 4 .220 5/r 6 'l 14 1t2-20

LG1H

10 20 20 20 20 LG1H20 LG1H21 LG1H21 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy

Ejector Valve Unit Series ZYY/ZYX 1

20 40 40 40 40 Suction flow rate Suction flow rate 10 10 20 20 20 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply

Rotary Table/

ti n r o n an e n d tio ge 95 ta 10.2 10 20 30 50 70 100 200 ro m mu 7.2 xi Ma 6.5 8.2 7.0 Note) The drawing shows the rotation range of the positioning pin hole.

Dedicated Controller

absorption unit LC7R-K1A Note) Select 6mA or less for resistor R after confirming the input capacity of the control equipment.

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

Position ot pivot:Diameter .r=W.ts s 4

NCRBIBwserbs

Switch with left hand mounting A t r t fit gI Switch with right hand mounting t[ n-r ffi I+l+| + t 2 switches With right hand moun0ng D-8G&2 D6A&1 Rotation Speed Range Model 20--{.03-0.3sec/90' Model 30-O.04-0.3sec/90" lf a rotation speed is used slower than 0. 3sec/90" sticking may occur. _n_ | d l l"l l l n , t d .

Solid State Auto Switches

Applicable Cylinders Weight (g) Cylinder series Bore size (mm) D-G5NB Auto switch model CDM2-Z, CDM2, CDBM2, CDVM3, CDVM5, CDLM2, CDLG1, MLGC CDG1-Z, CDG1 CDA2-Z, CDA2, CDBA2, CDV3, CDVS1, CDL1 MGC, MGG 20, 25, 32, 40 3 m (L) 79 Lead wire length 20, 25, 32, 40, 50, 63, 80, 100 5 m (Z) 125 40, 50, 63, 80, 100 20, 25, 32, 40, 50 Operating Range Bore size (mm) 20 Cylinder series 35 25 40 32

VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

IDX-OM-O004C

(17)(30) 2 2 11.4 IDF15E1-10-M IDF15E1-20-M PC L N PE TB ILS ILS OLR PTC OLR PTC CM CM C02 C01 C11 FM C11 PRS FM PRS P MOV P MOV CM PTC PTC C01 FM PRS C02 OLR PC C11 ILS TB MOV 11 2 12.R R 12 12.1 12.2 1 AC100V AC200V INOUT IDF15E1-10-R IDF15E1-20-R (A) 10 (mA) 30 12.3 M5 9.5mm 1.25mm 2 L ,N N L () () 12 1 12.R AC100V M4 () AC200V (M3) 12.4 () () ONOFF 12 2

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

43 L plug connector (L) n: Station Dimensions n L 11 12 13 14 15 16 17 18 19 28 20 39 31 50 42 61 53 72 64 83 75 94 86 105 97 116 108 127 119 138 130 149 141 160 152 171 163 182 174 193 185 204 196 215 207 20 237 229 2 3 4 5 6 7 8 9 10 L1 L2 1 226 218 1.13-10 Series VQD1000 Dimensions Plug lead manifold unit(VV4QD15-ll) Lead wire length: 300mm Light 4-Rc(PT)1/8 SY (P, R port) ACB ACB ACB

SL5200

0.14 30 0.21 15 0.10 20 0.14 10 0.07 10 0.07 5 0.03 0 0.00 0 0.00 0 20 40 60 80 100 120 Flow rate (slpm, N2) 0 4 8 12 16 20 24 28 32 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

IDX-OM-U022

[IDFA150F-38/40] (100.7m) () (10 2m) DIN 80 268 217 20 8x 18 4x 18 A A 4x 20 A 160 1300 160 720 1290 9351 20 K K 64 75 DIN 80 (17 ) 40 1332 (14~18) 1432 R () P.1-5 P.1-5 P.1-5 () 9902 20 475 1030 950 IDFA100F150F 6 5 6.3 IDX-OM-U022 6. 6.4 [IDFA100F/125F] R R GFCI PE L1 L2 L3 TB1 THR MC1 CM OLR MC2 FM1 PRR FM2 T SWL PLC TB2 Y0 1 MC1 COM0 2 MC1 Y3 3 Y1 MC2 COM3 PRS1