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Fluoro rubber is used for the rubber parts of seals How to Order Manifolds -lI O Ozone resistant specifications ilTv2o port size EI 114 {xt 3/8 type How to Order Manifold Assemblies shtionu "o,.,) llTV20-02-3. lset (3 station manifold base part no.) lTV2030-312S-X26 . . .. .. . . l set (Electro-pneumatic regulator part no.)

dm3/(sbar) 2.3 Critical pressure ratio 0.35 Flow rate (L/min (ANR)) 810 Controlled flow Sonic conductance dm3/(sbar) 2.3 Critical pressure ratio 0.2 How to Order 02 AS3500 Thread type Rc NPT G Material for handle Resin Metal Nil 2 Nil N F Port size 1/4 3/8 02 03 Metal handle Resin handle Needle Valve/ Flow Rate Characteristics Note) The flow rate characteristics are representative values

1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4

F(mm) Port B min. port size Weight (g) L1 L2 L3 L4 L5 L6 P Q1 Q2 M KM12-04-02-6 6 17 89 110 99 125 108 139 40 67 75 84 96 100 117 1 4 4 10 18 29.5 19.5 29 10.6 16 6 12 KM12-04-02-10 10 KM12-06-02-6 6 KM12-06-02-10 10 KM12-08-03-6 6 KM12-08-03-10 10 61.5 47 1 4 6 17 10 19.5 31.5 21.5 31 13 17 7.5 13.5 73 55 3 8 8 19 11.5 22.5 35.5 24 34.5 15.5 18.5 9 14.7 86 63 Series KM One-touch Fittings

V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) Class B G C D, T S S L, Z Note) Be sure to read this before handling the products.

Rc NPT G Symbol N M12 3 m lead wire with connector Without lead wire Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Port size Output specification Port size Applicable model Flow rate (l/min) Symbol Symbol Output specification 100 200 500 50 10 01 02 03 04 1/8 1/4 3/8 1/2 27 NPN open collector 2 outputs PF2A710/750 PF2A711/721 PF2A751 67 PNP open collector 2 outputs

Wiring specification Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Rc NPT G Nil N F 3m lead wire with connector Without lead wire Nil N Output specification Port size Size Applicable model Flow rate (l/min) Nil Output specification Applicable model Symbol 10 50 100 200 500 PFA710, 750 PFA711, 721, 751 PFA711, 721, 751 NPN open collector 2 outputs 27 1/8 1/4 3/8 1/2 01 02

N Options Hand valve R In/Out Reverse Valve model (Cv) Port size (NPT) 2 3 4 6 (0.4) (1.1) (3.2) (10.5) 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Porting and mounting method Code 0 1 2 3 Mounting method Body Panel mount Body Panel mount Note) Only side porting is available for VH200 and VH600 and R port is located on the bottom.

5MMO 6 B 6() 9 - No.ZB-OM00301 / kPa / P1 0-101 15V2F.S.7 P3 -100100 15V2F.S.7 8 EA EAM SI 9 NPN2 EAP [psi] 8 0-101 8 EB EBM SI 9 PNP2 EBP [psi] 8 8 FA FAM SI 9 NPN2 FAP [psi] 8 -100100 8 FB FBM SI 9 PNP2 FBP [psi] 8 73m 8 9kPa G 2m V 10 11 12 C2 2 B C4 4 N1 1/8 N3 5/32 K 12 L2 2 L4 4 LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02

VFN Series VFN2120N-5B-02N-X36 NAMUR Solenoid Valve Rotary Actuator Configuration How to Order 3-way solenoid valve configuration (for Single acting actuator) VFN2120N 5B 02 N X36A Left side port operation Right side port operation C-TYPE A-TYPE NAMUR interface 3 port/5 port A 3 port Port #4 on Coil side B 5 port Port #2 on Coil side C 3 port Port #2 on Coil side D 5 port Port #4 on Coil

U R(PT)1/8 M5 X 0.8 J\SP. 4;JOF~02 R(PT)I /4 Rc(PD1 /8 IIS'P530F:03 R(PT)318 Rc(PT)lIS 'ASi"!)30l"'lJ4 " R(PT)1!2 Rc(PT)1I4 ASP;l3OF:,FO~ RIPT)114 G(PF)1I8 I\Sps:ioFf;03' R(PT)318 G(PF)118 ),I'SPsJOF;;04: R(PT)1 /2 G{PF)1/4 A~P33!1F" 'l Il1 NPT1 /8 10-32UNF ,~Sp430FNO,?

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

For Water 30 20 VX2 60-02 10 VX234.5 VX2 46 VX2 6010 VX2 50 8 3 2 04 03 3 2 3 2 VX223 10 3 2 VX2112 5 4 3 Flow rate Q l/min 2 1 0.001 (0.0018) (0.0054) 0.01 (0.017) 0.05 (0.07) 0.1 Pressure differential P = (P1 P2) MPa How to read the graph When a water flow of 2 l/min is generated, lP 0.017 MPa for a valve with 3 orifice (VX212, 222, 232).

ASS AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 ASR ASQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1

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Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 1 (Meter-in), Thread: Rc (Metric M3, M5; Unified 10-32UNF), Port Size: 01 (1/8), Option: N (Nickel Plated), Lock Nut: J (Round)

Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 1 (Meter-in), Thread: N (NPT), Port Size: 01 (1/8), Option: S (Sealant), Lock Nut: J (Round)

Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 1 (Meter-in), Thread: N (NPT), Port Size: 02 (1/4), Option: S (Sealant), Lock Nut: J (Round)

Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 1 (Meter-in), Thread: Rc (Metric M3, M5; Unified 10-32UNF), Port Size: 01 (1/8), Option: S (Sealant), Lock Nut: J (Round)