Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Hexagon width across flats 21 J 4 x M4 x 0.7 Width across flats 37 Width across flats 24 28 45 I I 3 x M3 x 0.5 H H 10 10 G G F F E E Y Y 3 4 18 34 C C A A B B D D Dimensions Dimensions (mm) (mm) A B C D E F G H I J Y A B C D E F G H I J Y Model Model ZPX40HBJ25-01-A18 ZPX63HBJ25-01-A18 109 160 120 171 50-01-A18 50-01-A18 144 195 155 206 40 41 28 43 20.5 32 47 69 13 63 65 46 68 31.5 43 58

E-P HYREG

Refer to Specific Product Precautions on page 1006. 990 E-P HYREG VY1 Series R Standard Specifications 0 1 0 1 0 1 VY110 01 02 0 1 0 1 VY140 0 1 VY150 0 1 VY170 0 1 20 VY190 0 1 VY1D00 M5 VY1A0 VY1B0 M5 VY120 01 02 VY130 02 03 Model 10 12 10 04 02 03 04 04 06 14 M5 01 Port 1(P) 11 2 Port size 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 1 M5 M5 2 2 M5 2(A) 1 4 3(R) Weight

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

F

N)AS4200-04 M3 M3x0.5 M5 M5x0.8 01 18 02 14 03 38 04 12 Courtesy of Steven Engineering, Inc. !

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

NDh8 WB WA Section Y detail Y GB GC GA Relief port M5 x 0.8 Mounting nut MM NN WW Rod end nut Piping port 2 x M5 x 0.8 Piping port M5 x 0.8 C D B 0 0.3 B 0 0.3 Head cover port location Axial (R) Z + Stroke S + Stroke NB H NA F A The overall cylinder length does not change.

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

MHL2

M5 X 0.8 (Finger opening port) Auto switch mounting groove (4 locations) 4-M5 X 0.8 44 (Piston rod and rack screw) 5.5 H M5 X 0.8 18.2 (Finger closing port) 12.4 0.5 9 8 8.4 16.8 15 31 Width across 12.5 A flats 8 (4 locations) (46) 20 15 15 7 Closed 7 7 34 20 10 10 Open G 4-M4 X 0.7 through (Thread for mounting attachment) Model MHL2-10D MHL2-10D1 MHL2-10D2 J 80 108 146 A B C D E F G H 38

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

18.5 12.6 9.2 35 4.5 29h9 29.5h9 14H9 3.8 5 H9 5.3 2.5 4.2 10 3.3 6 3.5 M4 x 0.7 2.2 5.3 M4 x 0.7 4 5.5 38 23 15.5 10.5 40 4.5 33h9 34 h9 17H9 5 6 H9 5.3 2.5 4.2 10 4.2 7.5 4.5 M5 x 0.8 2.5 6 M4 x 0.7 4 5.5 45 30 18.4 12.2 50 5 39h9 40 h9 20H9 6 7 H9 6.5 2.5 4.5 11.5 4.2 7.5 4.5 M5 x 0.8 2.5 6 M5 x 0.8 5 (mm) JJ JK JU P Q S SD SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 1 2 3 7 M3

MXH

6 60 30 108 60 30 6 8-2-17 16 Series MXH Dimensions: MXH20 LT 31 20 J-M5 x 0.8 Depth 9.5 LA LB 14 3-M6 x 1.0 through Bottom hole dia 5.1 6-9.3 counterbore depth 8 Plug for port (Hexagon socket head set screw) 4-M5 x 0.8 x 4l 4-M5 x 0.8 Depth 11 4-M5 x 0.8 depth 8 Guide rail width 12 2-M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

240

NS 14 14 24 24 30 30 45 55 60 LT 49 49 59 59 69 69 79 89 99 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 D-X 25 MXH Series Dimensions: 16 LT 16 24 14 LA LB J x M4 x 0.7 Depth 6 2 x 2 x M5 x 0.8 Cylinder port (With plug for port) 3 x M5 x 0.8 through Pilot hole dia 4.3 2 x 3 x 7.5 counterbore depth 4.4 4 x M4 x 0.7 Depth 10 2 x M5 x 0.8

Rotary Gripper Series MRHQ

x 0.8 Port A M5 x 0.8 Port B 4-M6 x 1 Depth 10 I N J E A D P A A M N 16.5 27 6.5 8 17.5 26 SMC R R 16 8 E O P T P A I R R Y G A R I 36 Side A Side B Scale: 40% 11 Series MRHQ Rotary Gripper 1in = 25.4mm Dimensions (mm) Scale: 50% MRHQ25 A B 58 70 93 4-M5 x 0.8 Depth 8.5 47 66h9 0 0.074 33.3 opened +2.5 0.2 10 0 0.1 12 0 0.06 M5 x 0.8 Finger closing port 19.3 closed 0 0.8 4-M5 x 0.8 (mounting

Rotary Table/

34 18.5 12.6 9.2 35 4.5 29h9 29.5h9 14H9 3.8 5.3 2.5 4.2 10 3.3 6 3.5 M4 x 0.7 2.2 5.3 M4 x 0.7 4 34h9 6H9 5.5 38 23 15.5 10.5 40 4.5 33h9 17H9 5 5.3 2.5 4.2 10 4.2 7.5 4.5 M5 x 0.8 2.5 6 M4 x 0.7 4 40h9 7H9 5.5 45 30 18.4 12.2 50 5 39h9 20H9 6 6.5 2.5 4.5 11.5 4.2 7.5 4.5 M5 x 0.8 2.5 6 M5 x 0.8 5 (mm) JJ JK JU P Q S SD SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 1 2 3 7 M3 x 0.5

VQ5000

How to Order Sub-plates 04 P VQ5000 Electrical entry Port size Replacement of pilot valve assembly (Voltage) Refer to pages 2-6-40 to 2-6-41 for pilot valve assembly part numbers. Refer to page 2-6-3 for replacement method. 04 Rc 1/2 Porting specifications P S Plug-in conduit terminal Plug lead Note1) For bottom ported, port size is Rc 1/2.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LER MH LEH ML + Stroke MA MC MD Section XX LEY -X5 Section XX details 11LEFS XB 11LEJS XA H9 XA 25A[mm] Size Stroke range [mm] C D EH EV H J K L M O1 R S T U B V LEC 25 15 to 100 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 46.5 1.5 136.5 40 105 to 400 161.5 LEC S 32 20 to 100 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 61 1 156 60 105 to 500 186 LEC SS-T 63 50 to 200 21 40

Cylinder

J. IS'" IN 1 5" lOst ~ 15s1 ' A ... B C E F 15 12 ' 27 31 7 16.5 22.5 29 19 14 4.2 M5 x O.8 i M22 x 1.5 I 20 23.5 29.5 36 5 , 37.5 43.5 50 ' 6 'a~e size ' .rom) .

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size Flat head screwdriver 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80,

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

M5 x 0.8 Prepared hole diameter 4.2 20 W 0.50.05 D B Vacuum port M5 x 0.8 Piping port 2 x M5 x 0.8 33 32 10 J depth 1.5 3 5.5 5 12 9.5 +0.030 0 4 Section AA B D Mounting base side +0.030 0 depth 1.5 3 Q QL 11-/22-MXP12-25 Without magnet and switch rail 2 x M2 x 0.4 depth 3 8 5.7 3.5 L 20 20 6 x M4 x 0.7 depth 4.5 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 11-/22-MXP12-15

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

20 Width across flats 8 Width across flats 3 A 4-M5 x 0.8 depth 7 (Plug: M-5P) 2-M5 x 0.8 Piping port H 17 M6 x 1 10.5 26.7 11 5 5.5 34 35 8.5 4-M6 x 1 +0.030 0 depth 4 4H9 depth 4 4H9 Prepared hole diameter 5.1 A 6.5 19 320.05 +0.030 0 30 0.50.05 W B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 47 46 13 10.5 depth 2 4H9 J 8 +0.030 0 +0.030 0 depth 2 4H9 16.5 14.5 Section AA 5 Mounting



(Full span) 0.05 to 0.7 MPa Rc AF Mounting Linearity (3) AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Signal pressure (3) IR 1 8 Signal port PA (3) 02 03 02 04 04 06 10 10 12 14 20 01 Port P A R M5 01 M5 01 01 02 VEX Port size Rc (4) (4) 1 2 1 1 1 4 1 1 8 1

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet