CM2

0.4 J 0.65 J 1.2 J JIS Symbol Double acting, Single rod CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB Standard Stroke Maximum stroke (mm) Standard stroke (mm) Note) Bore size (mm) MB1 20 1000 CA2 25 1500 25, 50, 75, 100, 125, 150 200, 250, 300 32 CS1 2000

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Symbol Material -XC14 Change of trunnion bracket mounting position J 70C Nylon tarpaulin -XC15 Change of tie-rod length Bore size (mm) Cylinder stroke (mm) 110C K Heat resistant tarpaulin -XC18 NPT finish piping port 180 1,569 Maximum ambient temperature for the rod boot itself.

53

Fluid supply 9 Overflow port (Option J) Tank drain port To wastewater collection pit 5 No.

Modular F.R.L. Unit

Unit AC10A to 40A Dimensions AC10A, 20A A N F E P K C G G IN OUT Q B Pressure gauge (Option) K H OUT Pressure gauge port size Square embedded type pressure gauge (Option) J L Port size Lubricator M Drain Min. clearance for maintenance Filter regulator D A N F AC30A, 40A E P K C G G OUT IN Q B Pressure gauge (Option) K OUT Pressure gauge port size J L Square embedded type pressure gauge (

Stopper Cylinder

Q F Z Stroke 32 40 50 RSQB -DZ (Double acting) Bore size: 32, 40, 50 M E J 2 x P (Rc, NPT, G) T 0 0.1 D Q F Z Stroke M E J T 0 0.1 D Width across flats K A + 2 stroke B + Stroke V H + Stroke 2 x P (Rc, NPT, G) E M 4 x N through 8 x O counterbore Q F Z Stroke T 0 0.1 Width across flats K A + 2 stroke B + Stroke V H + Stroke D M E J E M 4 x N through 8 x O counterbore Width across flats K A

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

steel L LQ-GP 2 J 07 Tubing size symbol (Refer to Table 1) Body class (Refer to Table 1) Insert pin (Single) Insert pin material (J/K type only) Type Nil S Resin Stainless steel LQ-GH J 07 Holder (Single) Tubing size symbol (Refer to Table 1) Type Note1) Replacement part type J shows the parts for LQ-GJ and LQ-GK.

LVQ

Stainless steel L LQ-GP 2 J 07 Tubing size symbol (Refer to Table 1) Body class (Refer to Table 1) Insert pin (single) Insert pin material (J/K type only) Type Nil S Resin Stainless steel LQ-GH J 07 Holder (single) Tubing size symbol (Refer to Table 1) Type Note1) Replacement part type J shows the parts for LQ-GJ and LQ-GK.

V

n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section

39

L M N O P Q J K L M N O P Q Part no.

XM, XY

H J K P.C.D L1 8 x 8.4 L2 XMC-50 XMC-63 XMC-80 70 88 90 29 36 44 P.C.D 92.1 10.5 9 9 486 Stainless steel High Vacuum Angle/In-line Valve XMC, XYC Series Dimensions XYC-25, 40/In-line type C D G C B J H 45 E A Fn (KF flange) (mm) Model A 85 115 B 48 66 C 1 2 D 23.5 38 E 40 55 Fn G 64 84 H J XYC-25 XYC-40 100.2 130 26 41 28 36 XYC-50 to 80/In-line type C D G Fd XLA C XL (K flange) XLQ

REA/REB

Speed 300 mm/s Dimensions Basic Type REA REA 25, 32, 40 Effective thread depth J L 0 -0.1 NN G 4-MM H G B 2Port size Direct Mount Type REAR Direct Mount Type REBR X D I Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL NB NB N N K W T F NA S + Stroke ZZ + Stroke F R (mm) MM x J B D F G H I K L N NA NB NN Model Port size Rc 1/8 REA25 REA32 REA40 46 27.8 13 8 20.5 34 10 70 M5 x 0.8

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

C 4-O D T 2-P Q E B U W S K L Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com AA I A R AP AB Y + Stroke X J V Z + Stroke AC AD 8-AF AE Stroke range (mm) Bore size (mm) AF AE AD AC AB AA G F N E M D L C K B J AP H I A 20 30 75 16.5 11 12 5.5 45 92 25 60 80 24 60 108

CNS

Bore size J Nylon tarpaulin Rod boot 125 125 mm K Heat resistant tarpaulin 140 140 mm Nil With cushion in both ends 160 160 mm N Without cushion Cylinder stroke (mm) Refer to Maximum Stroke on page 9-8-9. Cushion R With rod bumper H With head bumper Built-in Magnet Cylinder Model In the case of one side, it is in the lock side.

Electric Actuator/Slider Type

Conductor size: AWG24 cable type M LEC Y C 1 Cable length (L) Motor type Y AC servo motor L 0.2 m J 0.5 m 1 1 m 3 3 m Cable description M MECHATROLINK-2cable U MECHATROLINK-3cable Not available for the MECHATROLINK-2cable. LEC-CYMis JEPMC-W6002-E manufactured by YASKAWA CONTROLS CO., LTD.

CNG

Refer to page 13 regarding the trunnion bracket. 11 Cylinder with Lock Double Acting: Single Rod Series CNG Clevis type (D): With rubber bumper/CNGDN Rc(PT) BP unlocking port Unlocks when pressurized Rc(PT) P Rear cylinder port RR L S + Stroke H GB A F K GA BN GC AL 8-J CZ TT H1 Rc(PT) P CD H10 (hole dia.) MM Front cylinder port d9 (shaft dia.)

Cylinder with Lock Series CNG

Refer to page 13 regarding the trunnion bracket. 11 Cylinder with Lock Series CNG Double Acting: Single Rod Dimensions (mm) 1in = 25.4mm Clevis type (D): With rubber bumper/CNGDN Rc(PT) BP unlocking port Unlocks when pressurized Rc(PT) P Rear cylinder port RR L S + Stroke H GB A F K GA BN GC AL 8-J CZ TT H1 Rc(PT) P CD H10 (hole dia.) MM Front cylinder port d9 (shaft dia.)

Cylinder with Lock Series CNS

Nil D Double clevis type J Nylon tarpaulin S 1 pc. T Center trunnion type Rod boot K Heat resistant tarpaulin n "n" pcs. Bore size Rubber bumper at both ends Nil N 125 Without bumpers 125mm Internal magnet cylinder part numbers Cushion R 140 With front bumper 140mm H 160 Cylinder stroke (mm) Refer to the maximum stroke table on page 2.

CNG

Rod Boot Material Stopping Accuracy (mm) Symbol Rod boot material Max. operating temperature Piston speed (mm/s) 100 0.3 300 0.6 500 1.0 1000 2.0 J 70C Nylon tarpaulin Lock type 110C K Heat resistant tarpaulin Spring locking Maximum ambient temperature for the rod boot itself.

Lightweight and Compact

Contents Applicable model HRS-EP020 NPT thread conversion fitting set HRS090-A-20/40-J HRS-EP021 G thread conversion fitting set Part no.

Series 10-, 21- AW-B Filter Regulator

Please contact SMC regarding the connection thread NPT and pressure gauge supply for psi unit specifications. 1080 A 1021-AW-B Filter Regulator Dimensions J J D M N T AW20-B 1021Bracket (Option) S U Panel fitting dimension F Y R Applicable tubing 6/4 W C Q V BB IN OUT OUT K H IN Z P2 Plate thickness 10-/21-AW20-B: Max. 3.5 Pressure gauge (Option) (Pressure gauge port size) B 2 x P1 (Port