(For mounting) 32.5 19 85.9 [88.1] 85.1 [87.3] 107.4 [111.8] 62.9 (DIN 64.2) R P R 63.7 (DIN 65) B B B B B R P R 18.5 18 59.9 (4.9) 19 21.9 31.4 A A A A A (DIN: 15.2) 1/4 (P, R port) 13.9 (Pitch) P = 19 29 (Station n) (Station 1) (Light/surge voltage suppressor) + + + 74 [81] 58.6 A A 42 29.5 8.5 B B 8 (Pitch) P = 19 25 One-touch fitting (A, B port) Applicable tubing O.D.: 6, 1/4" 8, 5/16
Besides, the overall length is longer than the cylinder with air cushion as follows, because the bumpers are attached to the both sides of the piston: 32, 40: +6 mm, 50, 63: +8 mm, 80, 100: +10 mm. 6-7-19 20 Series MB1K Standard Type Basic style: (B) G W V Port Cushion valve G 2-RcP B MM Ee11 Width across flats Rod sectional view Effective thread MB B 2 x 4-J 16 ZZ + Stroke S + Stroke H A
Besides, the overall length is longer than the cylinder with air cushion as follows, because the bumpers are attached to the both sides of the piston: 32, 40: +6 mm, 50, 63: +8 mm, 80, 100: +10 mm. 6-7-19 20 Series MB1K Standard Type Basic style: (B) G W V Port Cushion valve G 2-RcP B MM Ee11 Width across flats Rod sectional view Effective thread MB B 2 x 4-J 16 ZZ + Stroke S + Stroke H A
D-G39A D-K39A D-A44A D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-B5 D-B6 D-H7l D-H7C D-B59W D-G5NTL Bore 20 25 32 40 A B 5(3) 5(3) 6(4) 11 A 6(4) 6(4) 7(5) 12 B 0(0) 0(0) 0.5(0) 5.5 A 0.5(0) 0.5(0) 1.5(0) 6.5 B 3(1) 3(1) 4(2) 9 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 B 0(0) 0(0) 1(0) 6 Hs 22.5 25 28.5 32.5 A 1(0) 1(0) 2
6@4 @6!0i q !4 !2 r CY3R6 @3 @7 o u y t @8 !9 @2 18a CY3R10 2a 3a @0 !5 !6 @4 @9 @6 !0 i q !1 !4 !2 r @3 @7 @8 @5 o u y t !9 @2 18a CY3R15 to 63 !3 !0 !1 !4 !2 y r i q 2a 3a @0 @4 @9 @6 !5 !6 !9 @2 @3 @5 @8 @7 o u !7 t 18a CY3R15, 20 CY3R15 Component Parts No. Description Body End cover A End cover C End cover B End cover D Cylinder tube No.
button Body O-ring Seal Stud Port B Port B Port B Port B Seal Guide Chuck Guide Chuck Collet Collet Port A Release button Port A 15-3-6 2 FR One-touch Fittings Manifold Series KRM Dimensions: KRM11 2-FB Applicable tubing O.D.
6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!
A B A A A A A A 2.PUSH 2.PUSH B B B B 1.TURN 1.TURN VQZ 28 5.5 35 74.5 VQD 13 2-M4 clamp screw Triangle mark indicator position EXH outlet 9 Release for switching connector direction D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port C8: 1(P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 58 43.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch
L r b a = K + mL2 K: The moment of inertia around the center of gravity of the load K = m r2 12 a2 + b2 = m In case of 4. Round plate 2 4. Round plate (Including column) Position of rotational axis: Passing through the center axis 9. Gear transmission (A) (B) No. of teeth = a 1. Find the moment of inertia B for the rotation of shaft (B). 2.
Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm buzzer stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector . 6-8 6.3.3 How to release the pump thermal trip . 6-10 6.4 Other Errors . 6-11 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control
65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D
Hs A 26 B A 29 B D-B54 D-K59 / G59 Auto switch Auto switch 12 approx. Hs 12 approx.
Refer to page 378 for minimum stroke with auto switch. 32 is for B-series rod size only. CH2 H B B 50 100 CH D2 H B B 50 100 M9BW With Auto Switch With auto switch (built-in magnet) Port and cushion valve positions Refer to page 359.
Applicable bore (mm) 6 Applicable bore (mm) 6 NX NDH10 B L1 R1 R2 U A Part no. A B L L2 MM R1 R2 U L2 MM L1 NDd9 3 NDH10 3 NX Part no.
Applicable bore (mm) 6 Applicable bore (mm) 6 NX NDH10 B L1 R1 R2 U A Part no. A B L L2 MM R1 R2 U L2 MM L1 NDd9 3 NDH10 3 NX Part no.
phase J B C D A t A COM COM COM B 12 VDC GND F.G.
300 400 500 600 V(mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
6 50 to 100 80, 100: Over 200 stroke Extension locking (Type F) Retraction locking (Type B) !9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !
6 50 to 100 80, 100: Over 200 stroke Extension locking (Type F) Retraction locking (Type B) !9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !