CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

Cylinder with Lock Series CLS

Refer to pages 23 through 25 for auto switch precautions.

CG5-S

GA GB 2-P Bore size A AL B1 H H1 MM ZZ W 10 M BM H1 20 14 12.7 11.0 25.4 4.0 1/4-28 108.4 25 14 12.7 12.6 28.4 4.8 5/16-24 111.4 Max.

4/5 Port Air Operated Valve Series SYJA3000 1

SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

NCA1

T I O N S ( I F A P P L I C A B L E ) XB5 _ For information on Bore Size, Rod and Rod Thread , please see How To Order Series NCA1 Replacement Parts.

3 Port Air Operated Valve

Base mounted Body ported 2(A) 1/4 3/8 P. 1558 8.9 (P)1 3(R) VPA700 For vacuum N.C.

CXT

With 1 shock absorber (Set on the driving cylinder side when packed.) 25 B 32 BS 40 Standard stroke Long stroke * Refer to p.3.8-10 for minimum strokes for auto switch equipped style. Applicable auto switches/Refer to p.5.3-2 for further information on auto switch.

SFOD-OMT0005CN

PWR:(P.25) MS: PLC STOP PLC RUN MS: 4.2 (P.19) MS: NS: IP IP 2 MSNS / PLC PLC NS: PLC PLC NS: NS: IP IP 15.(P.62) 3 ALM -79- USB PC USB USB USB LEC-W2 PC COM COM COM PC COM COM COM LEC-W2 4 (LEC W2) (JXC)= = =USB = (JXC) OFF (JXC) (PLC )( ) ONOFF PLC 5 9.1 (P.32) 3.(P.12) -80- 5(P.23) 9.1 (P.32) 3.4 (P.16) 10.(P.41) (CN1: EMG OFF 3.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

SYJA3000

) 2-M5 X 0.8 35 (Mounting holes for manifold) 17 (Pilot port) B A 1 34 B 27 A A B 13 1 1 1 3 R1 P R2 32.5 45.5 2-M5 X 0.8 31.5 38 (pilot port) 64 3.2 269.5 14 (Non-locking) Manual override (Mounting holes) 35 89 (Non-locking) Manual override 3-Rc(PT)1/8, 1/4 (P, A, Bport) 29 28 25 21 1.6 14 89 18 21.8 (Bleed hole) With filter (80 Mesh) 55 2-1.8 (Bleed hole) With filter (80 Mesh) 40 25.5 20

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

A2 A1 E1 L1 MM RR1 U1 NX CJ2 Material: Carbon steel d (Drill through) Applicable cotter pin l Applicable bore size (mm) Dd9 I-12 I-14 I-16 I-18 I-20 I-25 I-30 125 140 160 180 200 250 300 +0.084 0 0.1 0.3 L m 25 32 Part no. 8 54 46 100 M30 x 1.5 27 33 CM2 125 140 160 IY-12 IY-14 IY-16 IY-18 IY-25 IY-30 +0.084 0 0.1 0.3 0.065 0.117 28 36 25 8 54 48 105 M30 x 1.5 30 39 79.5 69.5 4 5 4 x 40 +

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Male Branch "Y": KPU Effective area mm Note 1) D Model L TPH TPS A H (width across flats) P Connection threads R Weight g Applicable tubing O.D. mm 2-Applicable tubing M P D 45.4 49.4 49.6 52.4 56.7 61.3 64.5 67.5 69.7 72.7 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 41.5 43.5 45.5 46.5 52.5 55.5 59 61.5 63.5 65.5 7 8 9 10 15 17 23 25 29 30 KPU04-01 KPU04-02 KPU06-01 KPU06-02 KPU08-01 KPU08

HRX-OM-X071

Refer to P.5-29,P.5-30 [Setting example of temperature range monitoring function]. Temperature range Monitor start time (setting range 0 to 9 sec) RUN SEC TEMP OUT START(Alternately displayed) Temperature range time outside monitoring range 25. Press the [] key. Displays time outside temperature range setting screen.

Rotary Table/

P-80 (D) 2nd printing April, 2002 D-DAD P-80 (YG) This catalog is printed on recycled paper with concern for the global environment.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Series MXQ 13226, 8, 12, 16, 20, 25 Air Slide Table RoHS How to Order Port thread type Bore size Symbol Type 6 to 16 M thread Nil Clean series 20, 25 Rc 13 Vacuum suction type (Special treatment on guide) TN 20, 25 NPT TF 20, 25 G MXQ 12 13 50 M9N MXQ 12 22 50 M9N Number of auto switches Copper, fluorine and silicone-free + Low particle generation Nil 2 pcs.

Vacuum System Peripherals:

Section code Note) Mounting SUP/EXH block assembly When the location is non-standard, indicate both SUP/EXH block assembly part no., quantity and manifold part number. 13-14-25 25 Date issued: Photo copying this page is recommended.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

Guide Cylinder Series MGG

37 55 182 M14 x 2 depth 25 For long strokes Bracket mounting strokes Bore size (mm) Stroke range (mm) Bore size (mm) Bracket mounting stroke Bore size (mm) O P Y Z Y X W V U T S R Q R 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 100mm or more Rc 1/8 M6 x 1 depth 9 88 157 80 30 40 48 82 12 26 12 250 to 400 14 21 Rc 1/8 M6 x 1 depth 13 88 125mm or more 175 80 37 46 57 100 13 31 12 350 to 500

MGC

Bore size 20 25 32 40 50 20mm 25mm 32mm 40mm 50mm Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.