IDG

5 to 55(3) (3) 5 to 50 Ambient temperature (C) 5 to 50 5 to 55 5 to 50 5 to 50 Outlet air atmospheric pressure dew point (C) Inlet air flow rate (l/min (ANR)) (4) Standard performance 20 62 125 250 375 625 900 1190 725 31 Outlet air flow rate (l/min (ANR)) 50 100 200 300 500 600 750 1000 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office:

SY

type) With indicator light/surge voltage suppressor (non-polar type) 5 24VDC 6 12VDC 1 100VAC 50/60Hz 2 200VAC 50/60Hz Note 1) "DOZ" is not available. 110VAC 50/60Hz [115VAC 50/60Hz] Note 2) "S" specification is not available for AC since it is integrated with the rectifier. 3 4 220VAC 50/60Hz [230VAC 50/60Hz] Electrical entry D With connector DIN terminal DO Without connector Note) When

Air Cylinder

(mm) Auto switch model Bore size (mm) 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V) Auto switch model Bore size 20 25 32 40 D-A9l(V) 6 6 6 6 BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9l(V) D-M9lW(V) D-M9lA(V) 3 3 4 3.5 D-M9lA(V) Note 2) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of

Thermo-chiller

Refrigerant R410A (HFC) Refrigerant charge kg 1.32 Control method PID control Ambient temperature C 2 to 45 Circulating fluid*1 Tap water, Deionized (pure) water Set temperature range C CH1: 15 to 25, CH2: CH1 + 0 to 15 Cooling capacity (CH1, 2 total) 50/60 Hz*2 kW 4.8/5.8 Heating capacity (CH1, 2 total) 50/60 Hz*3 kW 1.3/1.6 Temperature stability*4 C CH1: 0.1, CH2: 0.5 Circulating fluid

Thermo-chiller/Rack Mount Type

Altitude: less than 3000 m Circulating fluid2 Tap water, 15% ethylene glycol aqueous solution Set temperature range1 [C] 5 to 35 Cooling capacity (50/60 Hz)3 [W] 1000/1200 1600/1800 2000/2400 2500/3000 Heating capacity (50/60 Hz)4 [W] 450/500 550/700 Temperature stability5 [C] 0.1 Pump capacity (50/60 Hz)6 [MPa] 0.13 (at 7 L/min)/0.18 (at 7 L/min) For Option T: 0.42 (at 10 L/min)/0.4 (at

AC

Model Port size A B C D M N P R B B E F G H J K L AL 58 90 117 117 154 164 195 200 205 M5 X 0.8 11 17 25 35 37.5 40.5 48 48 48 70 103.5 140 150 184.5 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25 40 53 53 70 70 90 95 95 29 45 58.5 58.5 77 82 97.5 102.5 102.5 25 30 41 41 50 50 70 70 70 4.5 5.5 7 7 9 9 12 12 12 20 24 35 35 40 40 50 50 50 17.5 22 34.2 34.2 42.2 46.2 55.2 55.2

ZP

SMC vacuum pad Search http://www.smcworld.com Catalogs ZP2 ES100-76 ZP3 ES100-100 Best Pneumatics Pad diameter Symbol 16 18 20 25 30 32 40 46 50 63 80 100 125 150 250 300 340 U C C C C C C MU EU AU C C C C C C C UM UT C ( ( CT C C B C C C C C Note) Note) J ( ( ( MB ( ZJ ( ( D C C C AN Note) Note) Note) MT ( ( ( W U H C C C C C C ( ( ( HT ( ( HB C C C C ( C C ( 30 x 50 ( HW U ( ( ( (

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Cable length (L) [m] 3 3 5 5 A 10 C 20 LE-CYM-llA-l: Motor cable L 50 7 U V W G M4 Crimped terminal LE-CYB-llA-l: Motor cable for lock option L 50 7 3-M4 Crimped terminal LE-CYE-llA: Encoder cable L (60) (100) 12 (7) (32) D 19 5 3 1 6 4 2 25 Battery case Depth dimension: 25 mm Product no.

TABLE OF CONTENTS

A B C D E F 20 2.13 1.97 .20 2.81 2.67 1.98 30 2.13 1.53 .20 2.81 2.67 1.98 50 1.50 1.53 .19 1.94 1.88 1.34 70 2.75 2.44 .20 3.44 3.31 2.61 MILLIMETERS SER. A B C D E F 20 54 50 5.2 71.3 67.9 50.4 30 54 38.9 5.2 71.3 67.9 50.4 50 38.1 38.9 4.8 49.2 47.6 34.1 70 69.8 61.9 5.2 87.3 84.1 66.3 COAST PNEUMATICS 8055 E.

VFS

Nil 2 200 VAC, 50/60 Hz 3110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz Non-locking push type (Extended) Locking type (Tool required) A 5 24 VDC B 6 12 VDC 7 240 VAC, 50/60 Hz C Locking type (Lever) 9 Other Option Option Refer to page 3-8-5 for voltage conversion. 3-8-54 55 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VFS3000 Cylinder Speed Chart Use as a guide

Modular F.R.L. Units

2 VA (AC), 2 W (DC) Operating voltage: AC, DC 100 V or less Model A B C D Applicable model IS10M-20-A 10.6 74.2 64.4 28 AC20l-B IS10M-30-A 12.6 84.5 70.5 30 AC25l-B, AC30l-B IS10M-40-A 14.6 93.3 75.3 36 AC40l-B IS10M-50-A 16.6 97.3 77.3 44 AC40l-06-B IS10M-60-A 22 92.5 66.8 53 AC50l-B, AC55l-B, AC60l-B Maximum operating current 12 V to 24 VAC, DC: 50 mA 48 VAC, DC: 40 mA 100 VAC, DC: 20

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

Modular F.R.L. Unit

Spacer with Bracket: (Z) G F.R.L. body center C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X A G Seal Y200T Y400T F J H K D Applicable models F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50 EE 27 33 G 4.5

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (kN) Load (kN) Bore size 80 B rod C rod 2000 6 4 8 3 7 5 1 5 2 4 8 3 7 6 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 1 5 10 20 50 Load (kN) Load (kN) Bore size 100 B rod C rod 4 8 8 3 3 7 7 5 4 5 2000 6 6 1 2 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 100 1 5 10 20 50 100 Load (kN) Load (kN) 28 Series CH2E/CH2F/CH2G/CH2H Technical Data 3 Relationship

MGP

FA C + Stroke E B + Stroke A + Stroke Dimensions (mm) Bore size (mm) Standard stroke (mm) A E 25, 50st Over 50st B C DA DB FA FB G GA GB GC H HA J K L 25, 50st Over 50st 50 80 86 118 110 151 20 25 30 45 0 0 24 33 30 35 12 18 72 95 14 19 11 24 12 14.5 160 242 M10 M12 35 47 37 48 50 66 86 118 44 65 25, 50, 75, 100, 125, 150, 175, 200 Bore size (mm) Standard stroke (mm) 50 80 RR RB RA QB QA

V

24.5 29 18.9 37 14 ZP40B B40 40 43 7 18 29.2 34 24.4 48 16 D I M E N S I O N S ZP VA C U U M PA D S ZP50B B50 50 53 7 18 33.2 38 32.4 57 19 H O W T O O R D E R ZP V A C U U M P A D S ZP F L AT T Y P E PA D W I T H R I B P A D D I A M E T E R P A D M AT E R I A L Part No Type A C B D E F Y 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 N Nitrile Rubber (Standard) S Silicon

MG

C 0.2 C 0.2 B 0.2 B 0.2 A 0.2 A 0.2 D Bore size (mm) A (mm) B (mm) C (mm) Bore size (mm) A (mm) B (mm) C (mm) D (mm) (mm) Hexagon socket head cap screw Hexagon socket head cap screw MGPM MGPL 12 50 50 18 41 10 8 M4 x 0.7 140 50 116 32 M12 x 1.75 16 80 56 22 46 12 10 M5 x 0.8 214 66 170 47 M16 x 2 Connection thread size Proper tightening torque (Nm) a dimension 20 72 24 54 14 12 M5 x 0.8 25

CRB2/CRBU2/CRB1

Without auto switch Vane type CRB1B J Size Rotation Port position Shaft type Double shaft (Long shaft without keyway & four chamfers) Double round shaft Single shaft key Single round shaft Single shaft with four chamfers Double shaft key Double shaft with four chamfers J K S T X Y Z J Z Y K S T X Key Key D C D D Free-Mounting Type CRBU2 CRB2 D D D C C C C D D Key (mm) Nominal size C D 50

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.