AC Servo Motor Driver (Pulse input type/Positioning type)

Press the "UP"and "DOWN"buttons to change the set value. d. Press the "SET"button. d. Press the "SET"button. The set value will light up. The set value will light up. * When the set value is flashing, it is not registered. * When the set value is flashing, it is not registered.

Floating Joint/Stainless Steel Type Series JS

JS20, 32, 40, 63 M M U U D J F H B E G P A Rod end nut (mm) 30 Description H B C D d: Nominal thread size d Nut for JS10 M4 x 0.7 3.2 7 8.1 6.8 Nut for JS16 M5 x 0.8 4 8 9.2 7.8 Nut for JS20 M8 x 1.25 5 13 15 12.5 D C Nut for JS32 M10 x 1.25 6 17 19.6 16.5 Nut for JS40 M14 x 1.5 8 22 25.4 21 H B Nut for JS63 M18 x 1.5 11 27 31.2 26 (mm) Max. tension and compression N Allowable eccentricity

MU

switch model D-A7H D-A80H D-F7 D-F7V D-J79 D-F7W D-F7WV D-J79W D-F7BAL D-F7BAVL D-F79F D-A7H D-80H D-F7 D-J79 F-F7W D-79W D-F7NTL D-F79F D-F7BAL D-A73C D-A80C D-J79C D-A79W D-P5DWL Equivalent bore size (mm) D-F7NTL D-A7 D-A80 D-A73C D-A80C D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-A7 D-A80 D-P5DWL CUJ A 4.5 (7) 4.5 (7) 5 (10) 6.5 (11.5) 7 (12) A 10 (12.5) 10 (12.5) 10.5 (15.5) 12 (17) 12.5 (

MU

Its Mounting Height Proper Auto Switch Mounting Position Auto Switch Mounting Height Auto switch model D-A7H D-A80H D-F7 D-F7V D-J79 D-F7W D-F7WV D-J79W D-F7BAL D-F7BAVL D-F79F D-A7H D-80H D-F7 D-J79 F-F7W D-79W D-F7NTL D-F79F D-F7BAL D-A73C D-A80C D-J79C D-A79W D-P5DWL Equivalent bore size (mm) D-F7NTL D-A7 D-A80 D-A73C D-A80C D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-A7 D-A80 D-P5DWL CUJ A

Rotary Actuator/Vane Type

Round shaft Round shaft Round shaft Single flat CRB1 C D D D D D D MSU CRJ CRA1 Round shaft Single flat Single flat CRQ2 MSQ Double shaft/CDRB2mJ Double shaft/CRB2mJU Double shaft/CDRB2mJU MSZ With auto switch and angle adjuster unit With angle adjuster unit With auto switch CRQ2X MSQX Round shaft Round shaft Round shaft D D D MRQ [mm] Size 10 15 20 30 40 C 8 9 10 13 15 D 14 18 20 22 30 Note

Sine Cylinder Series REC

Auto Switch Mounting Height (mm) Auto Switch model D-B5 D-B64 D-B59W D-G5NTL D-H7C D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-G39 D-K39 D-A33 D-A34 D-A9 D-M9 D-M9W D-C73C D-C80C D-A44 Bore size (mm) Hs Hs Hs Hs Hs Hs 20 24.5 27 62 72 24 27.5 25 27 29.5 64.5 74.5 26.5 30 32 30.5 33 68 78 30 33.5 40 35 37.5 72.5 82.5 34.5 38 REA REB REC CY CX MQ RHC RZQ D-X Individual -X 1039 Series REC Operating

Sine Cylinder Series REC

Auto Switch Mounting Height (mm) Auto Switch model D-B5 D-B64 D-B59W D-G5NTL D-H7C D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-G39 D-K39 D-A33 D-A34 D-A9 D-M9 D-M9W D-C73C D-C80C D-A44 Bore size (mm) Hs Hs Hs Hs Hs Hs 20 24.5 27 62 72 24 27.5 25 27 29.5 64.5 74.5 26.5 30 32 30.5 33 68 78 30 33.5 40 35 37.5 72.5 82.5 34.5 38 REA REB REC CY CX MQ RHC RZQ D-X Individual -X 1039 Series REC Operating

SMC Pneumatic Clean Series

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B

3

D-A7/A80 D-A7H/A80H D-A73C/A80C D-A79W D-P3DW 13 11 11.5 10.5 11 12 D17 7 14.5 6 15.5 5.5 14 6 14 15.5 -X 397 MK Series Auto Switch Proper Mounting Position (Detection at Stroke End) and its Mounting Height D-F79F/F7NT D-A7/A80 D-A73C/A80C D-A7H/A80H D-A79W D-M9A D-M9AV D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-F7/J79 D-F7V D-J79C D-F7W/J79W D-F7WV D-F7BA/F7BAV B A U 20, 25 20, 25 U B A 32

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

7 51.5 20.5 33.5 51.5 20.5 26.5 30.5 20.5 39 29 19 29 27 35 67 70 75 19 8 71.5 23.5 39.5 74.5 77.5 33.5 31.5 43.5 33.5 48 38 28 28 42 42 56 84 75 22 9 60.5 32.5 46.5 88.5 88.5 42.5 46.5 52.5 32.5 Solid state auto switch: D-M9B, D-M9N Stroke B Stroke E Auto switch operating range Model A 40 50 150 75 100 10 20 30 125 75 100 150 20 30 125 10 40 50 13-/22-MXQ6(L) 0.5 0.5 0.5 7.5 7.5 9.5 9.5

REC

58.0 35.5 55.0 32.5 56.5 33.5 53.0 30.0 CC 40 70.0 39.5 64.0 33.5 69.0 38.5 65.5 35.5 67.0 36.5 63.5 33.0 RB Auto switch model Bore size (mm) Operating Range Auto Switch Mounting Height D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-B5 D-B64 D-B59W D-G5NTL D-H7C J 20 25 32 40 D-G39 D-K39 D-A33 D-A34 Bore size (mm) D-C7/C80 D-C73C/C80C D-C73C D-C80C D-A44 8 10 9 10 D8 10 9 10 D-B5/B64 13 13 14 14

CLA

light/Operation D-AS9W, D-8S9W, D-FS*W, D-GS*W, D HJS9W, D-FS' F, D-J59W, D-KS9W, D-'SBAL Solid Stat.

Digital Flow Monitor

In conditions other than horizontal installation and 0.35 MPa supply pressure, the output may not be 0 L/min. -79No.PF-OMU0007-D Dimensions -80No.PF-OMU0007-D Bracket A (Part No: ZS-46-A1) Bracket B (Part No: ZS-46-A2) -81No.PF-OMU0007-D Panel mount adapter (Part No: ZS-46-B) Panel mount adapter + Front protective cover (Part No: ZS-46-D) -82No.PF-OMU0007-D Lead wire with connector (Part

Shock Absorbers and Rate Controls

(l|odel) D!nping Dire(tion ADA'05 I , ( o r I o n d C .9S ,l 2,500 1,500 1.100,0!0 9.35 7.10 ADATI (l l ( o r T o n d ( .98 4 2,500 2,500 1,400,000 4.4 13.35 9.10 ADATI5 l ( o r l o n d ( .9S 6 2.500 2,500 1,800,000 5.1 17.35 .l0 ADA72O l ( o r l u n d ( .98 I ?,500 2,500 2.100,000 ?

Sine Rodless Cylinder Series REBR Direct Mount Type

C D 15 (mm) Auto switch model A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 Bore size (mm) 17.5 15 D-A9 21.5 76.5 72.5 56.5 60.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 101 103 47 47 78 78 22 32 30.5

MU

Possible to install auto switches Variations Standard stroke (mm) Rod end shape Applicable auto switch model Action Style Size 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 25 Single rod 32 Reed switch D-A7 D-A8 (2 color) D-A79W Double acting 40 50 Double rod 63 Male thread/ Female thread Solid state switch D-A7 D-J7 (2 color) D-F7lW D-J7lW 25 32 Single acting Spring return/

PFxx-OMA1007

Recommended tightening torque Unit: Nm Applicable models AMS20 AMS30 AMS40 AMS60 Part No. of spacer with bracket Y200T-2-D Y300T-2-D Y400T-1-D Y600T-2-D Part No. of spacer Y200-D Y300-D Y400-D Y600-D Tightening torque 0.360.036 1.20.05 1.20.05 2.00.1 When the air management system is fixed on a wall with hexagon socket head cap screws, a hexagonal driver is recommended as a tool.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Unit: g Model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Auto Switch Dimensions Auto Switch Internal Circuit D-M9 M2.5 x 4l mounting hole Slotted set screw Indicator light D-M9B, N, P D-M9N DC(+) Brown 2.6 Main circuit of switch Main circuit of switch Main circuit of switch OUT Black 2.7 2.8 4 22 DC(-) Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC(+) Brown 22

MX-OMP0051

50.1 50.1 MXQ16B 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 33 23 23 23 29 38 63 63 63 MXQ20B 32.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 30.9 31.9 31.9 31.9 44.9 44.9 46.9 69.9 69.9 D-M9V/M9WV A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 2 2.6 5.6 7.6 7.6 MXQ8(A,C) 13.9 13.9 13.9 13.9 13.9 13.9 7.1 7.1 7.1 13.1 30.1 7.1 MXQ12(A,C) 16.5 16.5

Digital Gap Checker

mm 0.3 mm 0.03 mm 0.30 0.03 0.15 0.20 0.02 0.10 0.01 mm 0.10 0.01 0.05 0.05 mm 0.02 mm 0 0 0 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Piping length: 5 m Piping length: 5 m Piping length: 5 m Reference pressure 0.06 Reference pressure 0.30 Reference pressure 0.60 The distance of switch