Flow Control Equipment

D The air in the cylinder initially opens the piston valve and the check valve and discharges rapidly through the switching valve. The fully opened piston valve closes as shown in Fig. D when the pressure in the cylinder is lower than the set pressure. Then the air passes through the check valve and becomes discharged (Fig. D).

33

V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 195 Thermo-chiller Basic Type HRSE Series

HRX-OM-R016

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R016 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

Z (Example) F9BZ D-F9BA is available only as "L". Auto switches marked with a "" symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches. Note 2) Refer to pages 53 through 65 for detailed auto switch specifications. Cylinder Bore Size MHS 2 D 50 32 to 63 Y59A Number of auto switches Nil S 2 pcs. 1 pc.

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

73 psi [0.5 MPa] Peak clamping force position 112 [500] 90 [400] 0.3 MPa 44 psi [0.3 MPa] 67 [300] 45 [200] 22.5 [100] 0 0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 Shim thickness [mm] 9 CKZT -X2797 -X2798 Be sure to read this before handling the products.

V100

) (D, Y) VS N.C.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

from the 1st station on the D-side.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

from the 1st station on the D-side.

Sine Cylinder Series REC

Auto Switch Mounting Height (mm) Auto Switch model D-B5 D-B64 D-B59W D-G5NTL D-H7C D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-G39 D-K39 D-A33 D-A34 D-A9 D-M9 D-M9W D-C73C D-C80C D-A44 Bore size (mm) Hs Hs Hs Hs Hs Hs 20 24.5 27 62 72 24 27.5 25 27 29.5 64.5 74.5 26.5 30 32 30.5 33 68 78 30 33.5 40 35 37.5 72.5 82.5 34.5 38 REA REB REC CY CX MQ RHC RZQ D-X Individual -X 1039 Series REC Operating

Sine Cylinder Series REC

Auto Switch Mounting Height (mm) Auto Switch model D-B5 D-B64 D-B59W D-G5NTL D-H7C D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-G39 D-K39 D-A33 D-A34 D-A9 D-M9 D-M9W D-C73C D-C80C D-A44 Bore size (mm) Hs Hs Hs Hs Hs Hs 20 24.5 27 62 72 24 27.5 25 27 29.5 64.5 74.5 26.5 30 32 30.5 33 68 78 30 33.5 40 35 37.5 72.5 82.5 34.5 38 REA REB REC CY CX MQ RHC RZQ D-X Individual -X 1039 Series REC Operating

SMC Pneumatic Clean Series

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B

Table of Contents

Max. 16 stations C3, C4, C6, M5 C6 VQ1000 Side D-sub Connector (25 pins) D side U side Stations 1 2 3 Cable assembly 015 030 050 AXT100-DS25Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Wire Color by Terminal No. of D-sub Connector Cable Assembly The D-sub connector

CG1

,B6 D-C7,C8 D-C73C D-C80C D-G5 D-K5 D-G5NTL D-H7W D-H7F D-H7BAL D-B59W D-H7 D-H7C D-C73C D-C80C D-G5W, K59W D-G59F D-G5BAL Bore B 16 (24) 16 (24) 17 (25) 19.5 (28.5) 24 (36) 24 (36) 32.5 (46.5) 32.5 (46.5) B 20.5 (28. 5) 20.5 (28.5) 21.5 (29.5) 24 (33) 28.5 (40.5) 28.5 (40.5) B 17.5 (25.5) 17.5 (25.5) 18.5 (26.5) 21 (30) 25.5 (37.5) 25.5 (37.5) 34 (48) 34 (48) B 18 (26) 18 (26) 19 (27) 21.5

CYP

Proper auto switch mounting position A B Auto switch model D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV D-Z7 D-Z80 D-Y7W D-Y7WV D-Y7W D-Y7WV D-Z7 D-Z80 Cylinder model CYP15 93.5 24.5 CYP32 122 33 Auto Switch Mounting When mounting auto switches, they should be inserted into the cylinder's switch groove from the direction shown in the drawing on the right.

Heavy Duty Stopper Cylinder Series RSH/RS1H

, D-Z76, D-Z80 Auto Switch Specifications Grommet D-Z7 (with indicator light) D-Z73 D-Z76 Auto switch part no.

CYPSeries

Switches / Direct Mount Type D-Y7NW (V)/Y7PW (V)/D-Y7BW (V) Auto Switch Specifications D-Y7mW, D-Y7mWV (with indicator light) D-Y7NW D-Y7NWV D-Y7PW D-Y7PWV D-Y7BW D-Y7BWV Auto switch part no.

CYPSeries

Switches / Direct Mount Type D-Y7NW (V)/Y7PW (V)/D-Y7BW (V) Auto Switch Specifications D-Y7mW, D-Y7mWV (with indicator light) D-Y7NW D-Y7NWV D-Y7PW D-Y7PWV D-Y7BW D-Y7BWV Auto switch part no.

VQC

D-side w How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

5 Port Solenoid Valve, Series VQC

D-side How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A