For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Order with the option symbol -D to specify DIN rail mounting style.

Series 10-MGF ø40, ø63, ø100 Guide Table

D-Z73 D-Y59B D-Y59A Load voltage 24 VDC,100 VAC 24 VDC (10 to 28 VDC) 28 VDC or less Load current range Indicator light Application Relay, PLC 24 VDC Relay, PLC IC circuit, Relay, PLC 5 to 40 mA, 5 to 20 mA 5 to 40 mA 40 mA or less PLC: Programmable Logic Controller Refer to page 889 for the applicable auto switch list.

AR Series Modular Type Regulator

nut (for panel mount) Note 3) V V V V V + Option Note 1) Nr Nil Without pressure gauge V V V V V G Round type pressure gauge (without limit indicator) V Round type pressure gauge (with limit indicator) V V V V M Round type pressure gauge (with color zone) V V V V + b Pressure gauge Note 4) c Set pressure Note 5) Nil 0.05 to 0.7 MPa setting V V V V V 1 0.02 to 0.2 MPa setting V V V V V + d

Digital Flow Switches, Series PF2A, Series PF2W

CM01-8DP4S DDK Ltd. 10 Series PF2A Dimensions PF2A703H, 706H, 712H D E Internal circuits and wiring examples to are terminal numbers.

Digital Flow Switches Series PF2A

0.8 8 OUT1 80 mA 65 180 45 104 79 65 Rc11/2, NPT11/2, G11/2 Rc2, NPT2, G2 46 M6 x 1 9 Load Black 0 V or 75 220 55 114 89 75 56 M6 x 1 9 50 msec 50 msec PF2A7H-(-M) 68 69 Analog output 1 to 5 VDC 4 to 20 mADC 20 5 Analog output [V] Analog output [V] 1 4 Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Max. measured flow rate value Real-time flow rate

PF2A/PF2W

2 46 M6 x 1 9 0 V 75 220 55 114 89 75 56 M6 x 1 9 50 msec Analog output 1 to 5 VDC PF2A7H--68 69(-M) 4 to 20 mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow rate value Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Max. measured flow rate value Real-time flow rate [l/min] Minimum measured flow rate value [l/min] Maximum measured

PA3000/5000/PAX1000

Printed in Japan. 1st printing September, 1999 D-SMC.L.A. P-80 (D)

VXA21/22

Refer to p.4.1-74, 4.1-75 for specifications and models.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

U S C E Padlock mounting position D C Padlock mounting position D SUP. SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH.

AR20-B to AR60-B

J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel fitting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J M D U 73 Regulator Series

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

(L) Dimensions n: Stations L n 19 226 218 20 237 229 13 160 152 15 182 174 17 204 196 5 72 64 6 83 75 7 94 86 9 116 108 11 138 130 L2 L1 2 39 31 3 50 42 4 61 53 16 193 185 18 215 207 10 127 119 12 149 141 14 171 163 8 105 97 601

HEC-OM-S008

[CR][LF] :01 06 0052 0032 75 [CR][LF] Set at 0.50 deg.C.

XL-OMV0002

C E E (KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

How to Order B 40 30 D CQ2X Without auto switch With auto switch CDQ2X A73 B 40 30 D Number of auto switches With auto switch (with built-in magnet) Auto switch type 2 pcs. 1 pc. "n" pcs. Nil S n Nil Without auto switch (with built-in magnet) Microspeed cylinder Select auto switch model number from the table below.

Electric Actuators

Two mounting styles Table traveling accuracy C D Bottom mount Top mount Model Traveling accuracy C side against A side D side against B side LG1H 0.1 or less 0.1 or less A B Variations Mounting orientation Lead screw type Motor type Guide type Motor/Screw connection Series Standard motor [Tamagawa Seiki Co., Ltd.]

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Dimensions n L 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 10 127 119 11 138 130 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215 207 19 226 218 20 237 229 L1 L2 1.13-11

5 Port Air Operated Valve

The valve arrangement is numbered as the 1st station from D side. Under the manifold base part number, state the valves to be mounted in order from the 1st station as shown in the figure above. Refer to page 1520 for manifold options. 1519 VFA3000/5000 Series Manifold Options For base mounted Blanking plate assembly Mounting screw, gasket part no.

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

D Not available at 80 and 100. Note) Mounting brackets are not mounted and are supplied loose at the time of shipment.