VQ5000 Nil E Yes Without light, with surge voltage suppressor Seal Metal seal Rubber seal 0 1 Coil voltage Function 1 2 3 Stations 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC D side U side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) (2) Applicable to DC sepecifications.
C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.
CHKGB Bore size Rod end thread type Auto switch Quantity XC64 Stroke With air release valve Dimensions CH KGB--XC64 A C C B A B C Bore size (mm) 20 16.5 9.5 7 25 17 10 8 32 19.5 17 10 40 21.5 18.5 10 50 24 21.5 10 63 27.5 24 10 80 31 27.5 15 100 36 33 15 Note) Dimensions other than those highlighted above are standard. 24
Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Valve model Pilot valve model Note) VQZ115-L VQ110-M Note) For the special voltages, please consult with SMC. VQZ115-M VQ110-L 4-14-41
Head flange FD (4 locations) FY (4 locations) (Special cap bolt) FX FZ Model (mm) Head Flange C FD FT 34 40 50 60 FV 48 54 67 80 FX 56 62 76 92 FY M6 x 1.0 M6 x 1.0 M8 x 1.25 M10 x 1.5 FZ 65 72 89 108 MKG32-Z MKG40-Z MKG50-Z MKG63-Z 5.5 5.5 6.6 9 8 8 9 9 FT C FV Rod flange The dimensions other than MM dimensions are the same as those of head flange.
NBR FKM C S A Note 2) T N V Symbol Number of arranged elements Note 1) Not used with fiber elements.
NBR FKM C S A Note 2) T N V Symbol Number of arranged elements Note 1) Not used with fiber elements.
VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other 1 2 3 4 5 6 7 9 Coil rated voltage 1 2 3 4 5 6 7 9 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Electrical entry G C TNote) D DL Option Electrical entry/With indicator light/ surge voltage suppressor Grommet Conduit Conduit terminal DIN terminal DIN terminal with
B AL A K F VA BN N N 4-J M H S + Stroke (For NPT port) ZZ + Stroke With rod boot 75 15 40 l h + l ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) A AL B BN BP BQ C CL D E EA F FA G GA GB GL GR J 125 140 160 16 Up to 1000 50 47 145 205 1/2 3/8 115 120 36 90 63 35 14 155 23 25 30 M14 x 1.5 16 Up to 1000 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 180 28 30 30 M14 x 1.5 18.5 Up to 1200 56
50 Pressure 0.2MPa Pressure 0.2MPa 40 H Overhang H mm Overhang H mm 40 30 0.6MPa, 0.7MPa 30 0.3MPa Gripping point 0.3MPa 0.4MPa L 20 0.4MPa 0.5MPa 0.5MPa 20 0.6MPa, 0.7MPa 10 10 MHZJ2/With dust cover 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L mm Gripping point L mm H MHZ 2-16 MHZ 2-16 60 60 Pressure 0.2MPa 50 50 Gripping point Pressure 0.2MPa L Overhang H mm Overhang H mm 40 40 0.3MPa
Max. load current or current range (mA) None 5 to 50 5 to 50 5 to 25 5 to 12.5 20 50 25 12.5 30 D-A53 PLC 24VDC 24VDC 100VAC 200VAC 4 to 8VDC 24VAC/DC or less 100VAC 200VAC Max. 24VDC D-A54 Relay, PLC None IC circuit D-A56 None D-A64 Relay, PLC D-A67 None None (2 color indication) IC circuit, PLC D-A59W 5 to 40 24VDC Relay, PLC 5 to 50 5 to 50 5 to 25 5 to 12.5 50 40 20 5 to 40 5
NT-02 NT-03 NT-G04 (15) (19.6) (21.9) M8 x 1.25 M10 x 1.25 M14 x 1.5 12.5 16.5 18 13 17 19 20 25, 32 40 5 6 8 20 C type 8 for shaft C type 8 for shaft IY-G02 0.040 0.076 8 16.2 21 7.6 0.9 1.5 20 CD-G02 0.040 0.076 8 38.6 1.5 43.4 7.6 0.9 C type 10 for shaft C type 10 for shaft IY-G03 20.2 25.6 9.6 1.15 0.040 0.076 10 1.55 25, 32 0.040 0.076 10 CD-G25 42.6 1.55 48 9.6 1.15 25 C type 10 for
Lead wire length indication Note 1) Applicable auto switch with 5 m lead wire (Z) Reed switch: D-B53/B54, DC73(C)/C80C, D-A73(C)(H)/ A80C, D-A53/A54, D-Z73, D90/97/90A/93A Solid state switch: Manufactured upon receipt of order as standard.
Double acting, Single rod Double acting, Double rod CE1 50 63 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 CE2 80 100 ML2B C J G5-S CHQB CHQWB CV MVGQ CC For details, refer to the catalog CAT. E111.
24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13 H13 0.5 0.5 32 22 10 14 15 30 5 32.5 10.5 6.6 45 10.5
12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13 H13 0.5 0.5 32 22 10 14 15 30 5 32.5 10.5 6.6 45 10.5 5.5 40 38 12 25 12 16 18 35 5 6.6 55 11
50 0.34 40 0.28 30 0.21 20 0.14 0 10 0.00 0.07 0 50 100 150 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.
The low profile design saves space and reduces bending moments C o . lmproved accuracy with smooth operation a Vi,.tilthlwml WWI 50 Height is approximately 1/3 the size of an equivalent Series MHZ2.
, 75, 100, 125, 150 Relief type Vacuum suction type 1/8 25, 50, 75,100, 125, 150, 200 1/4 Not available 25, 50, 75, 100, 125, 150, 200, 250, 300 Non-lube Double acting, single rod Available Available 25, 50, 75, 100, 125, 150 1/8 25,50,75,100,125,150,200 1/4 25,50,75,100,125,150,200,250,300 Specifications Suction flow rate of vacuum suction type (Reference values) Bore size (mm) Item 20/25
Snap ring Type C 8 for axis Type C 10 for axis Type C 10 for axis Type C 14 for axis m 1.5 1.25 1.25 1.75 t 0.9 1.15 1.15 1.15 Part no.