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Function selection mode H Hysteresis Difference between the points at which the Pressure switch is turned on and off. Hysteresis mode Refer to "List of output modes" on page 25 -11NO.TQ1050188-OM002 No. Terms Meaning I Indication accuracy Shows the deviation between displayed pressure value and the true pressure. Insulation resistance Insulation resistance of the product.

Function selection mode H Hysteresis Difference between the points at which the Pressure switch is turned on and off. Hysteresis mode Refer to "List of output modes" on page 24 -11NO.ZL3-OM00701-A No. Terms Meaning I Indication accuracy Shows the deviation between displayed pressure value and the true pressure. Insulation resistance Insulation resistance of the product.

Function selection mode H Hysteresis Difference between the points at which the Pressure switch is turned on and off. Hysteresis mode Refer to "List of output modes" on page 23. -11No.TQ0010298-OM003-B No. Terms Meaning I Indication accuracy Shows the deviation between displayed pressure value and the true pressure. Insulation resistance Insulation resistance of the product.

(Example: If a product for 0 to 1 MPa can indicate pressure by 0.001 MPa, the indication resolution is 1/1000.) Indication resolution Indication LED The LED that turns on when the switch output is ON. Indication unit The unit of pressure used in the display. 11 - NO. ZQ-OM01501 No.

Standard products Nil L R S a b h g d c f e Operating direction Left Right Load weight Light Low Heavy Bore size (mm) Series Guide type Note) Plugs are installed in ports other than those indicated for the model. 6 10 15 20 25 32 40 50 63 L R S Nil Model Clean room rodless CYP High precision guide type Piping port position a b c d e f g h Right Left Right Left Right Left Right Left Operating

NKE Corporation: Simple wiring standard system compatible EX140-SUW1 F NKE Corporation: Simple wiring H system compatible EX140-SUH1 H Sanks Corporation: S-LINK system (16 point output) compatible EX140-SSL1 J1 Sanks Corporation: S-LINK system (8 point output) compatible EX140-SSL2 J2 Type SF NKE Corporation Type SH NKE Corporation Simple wiring H system compatible Type SJ1/SJ2 Sanks Corporation

PRESSURE PRESSURE PRESSURE PRESSURE OUT OUT Hysteresis mode Window comparator mode OUT OUT Hysteresis (H) Hysteresis (H) Hysteresis (H) Hysteresis (H) Hysteresis (H) Hysteresis (H) Manual Auto ON ON ON ON Press the SET button to set the auto preset and return to the measuring mode.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 100 25 l = 50 mm l = 50 mm Weight of transferred object: m (kg) m m 20 5 10 10 20 30 40 50 Transfer speed: (m/min) Bore size 32 to 100/MLGPM32 to 100 (Slide bearing) Operating Range as Stopper for MLGPM32 to 100 1000 Weight of transferred object: m

Conduit terminal (With indicator light) D0: DIN connector (Without connector) Voltage of 2 port solenoid valve 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC 866 A Air Catch Sensor Series ISA2 RoHS How to Order For single and double notation type and additional stations Air catch sensor ISA2 G E2 1 ZSE30 ISE30 Detection distance Electrical entry Piping specifications G H

Bracket K L N O J M D C I E P Bracket (Accessory) F B OUT IN Option H: Auto drain (1.6 MPa) Flange drop prevention stopper (Do not apply force when removing the bowl.)

Bore size 20, 25/MLGPM20/25 (Slide bearing) Operating Range as Stopper for MLGPM20/25 100 25 l = 50 mm l = 50 mm Weight of transferred object: m (kg) m m 20 5 10 10 20 30 40 50 Transfer speed: (m/min) Bore size 32 to 100/MLGPM32 to 100 (Slide bearing) Operating Range as Stopper for MLGPM32 to 100 1000 Weight of transferred object: m (kg) l = 50 mm l = 50 mm 100 m m 80 63 50 40 32 100

0 w q t e u Cover 2 Aluminum alloy Fitting body 3 Stainless steel alloy Bracket 4 Stainless steel alloy O-ring A 5 H-NBR O-ring B 6 H-NBR Rod cover 7 Stainless steel alloy Tie-rod 8 Stainless steel alloy Cap nut 9 Stainless steel alloy Plain washer 10 Stainless steel alloy Replacement Parts r y o No.

Auto switch operating range (mm) _ Load operating time (ms) V(mm/s) = x 1000 4. Keep wiring as short as possible. 1) Although wire length should not affect switch function, use wiring that is 100m or shorter. 5. Monitor the internal voltage drop of the switch.

AXT661-12A Nil 300 mm 600 mm 1000 mm 2000 mm 3000 mm 6 10 20 30 Plug connector lead wire length Passage Indicator light Single Latching type A-C ON (Set) Indicator light Passage The lead wire length of the valve with lead wire is 300 mm.

Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 52 AL10 to 60 Dimensions AL10 AL20 L D Bracket (option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50, 60 AL30, 40 L D D L Port size Bracket (option) Bracket (option) G F G F Port size M K M K E J C B R C B R H

Page 16 Note 1) Note 1) Select and order by specifying the types and models. 2 Series ZSE50F/ISE50 Output Method ON YES Hysteresis mode OFF P_1 P_2 Large pressure and vacuum pressure [P] H H H (Fix hysteresis) = 3 digits ON Window comparator mode NO OFF P_1 P_2 Large pressure and vacuum pressure OUT1 Output mode ON Same with OUT2.

Page 16 Note 1) Note 1) Select and order by specifying the types and models. 2 Series ZSE50F/ISE50 Output Method ON YES Hysteresis mode OFF P_1 P_2 Large pressure and vacuum pressure [P] H H H (Fix hysteresis) = 3 digits ON Window comparator mode NO OFF P_1 P_2 Large pressure and vacuum pressure OUT1 Output mode ON Same with OUT2.

A System error P-1 Internal data error H-1 Internal data error Min. B Nonabsorption H Unit display switching function Work 1 Work 2 Work n Atmosphere Display units can be switched with this function. Units that can be displayed vary depending on the range of the pressure sensors connected to the controller.

SET [N] H (Fixed hysteresis) = 3 digits H H ON ISA2 Window comparator mode OFF OUT1: Selection of the output mode NO n-1 n-2 IS High pressure (for positive pressure/compound pressure) High vacuum (for vacuum pressure) ZSM Auto Preset (For adsorption confirmation) PF2 1. Auto preset mode 2. Preparation for auto preset 3. Auto preset of OUT1 IF Data SET Press the SET button.

YES Hysteresis mode OFF n_1 n_2 Large pressure and vacuum pressure [n] H (Fix hysteresis) = 3 digits H H ON Window comparator mode NO OFF n_1 n_2 Large pressure and vacuum pressure 16-2-30 7 Series ZSE50F/ISE50 High Precision, Digital Pressure Switch for General Fluids Example of Internal Circuit and Wiring ZSE F/ISE --22(L)-(M) 50 60 50 60 ZSE F/ISE --30(L)-(M) 50 60 50 60 With analog