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S. f or t arget val ue i s 12bi t , com m uni cat i on i s avai l abl e up t o 150% F. S. ( accuracy i s guarant eed up t o 100% F. S. ) . O ver range error i s out put w hen 150% F. S. i s exceeded.

Bore size (mm) Stroke range (mm) OB P1 P2 Q RA RB S V W Y Z 32 40 50 63 9 M5 x 0.8 M5 x 0.8 2.5 10 7 12 43 43.5 59 38 5 to 100 9 M5 x 0.8 M5 x 0.8 2.5 10 7 12 43 43.5 67 46 5 to 100 11 Rc, G, NPT1/8 Rc, G, NPT1/8 3.5 14 8 17 54 63 83 58 10 to 100 14 Rc, G, NPT1/8 Rc, G, NPT1/8 3.5 18 10.5 17 54 63 97 69 10 to 100 6 Compact Cylinder with Solenoid Valve/Guide Rod Type Series CVQM Auto Switch

G Dimensions Per Vacuum Inlet: One-touch Fitting Width across flats F Model E F G Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

H 8 4-M4 x 0.7 Operating port 2-M3 x 0.5 Section AA M 8 N 2 ( 1): The number of pitches 0.3 15 (Table length) 16 4.5 J 8 Z 2.4 Max. 9 ZZ H G 3H9 depth 3 +0.025 0 21 4 3H9 depth 3 +0.025 0 (mm) ZZ Z M J H G F N Model MXF8-10 58 49.5 49 21 22 13.5 20 4 MXF8-20 63 54.5 54 26 26 14.5 26 4 MXF8-30 78 69.5 69 41 40 14.5 26 6 8-6-10 11 Low Profile Slide Table Series MXF Dimensions: MXF12 Stroke

Pressure gauge reverse mounted R Connection NPT1/8 N01 Series IR2000 Connection NPT1/4 N02 Connection NPT3/8 N03 Connection NPT1/2 N04 Connection G(PF) 1/8 F01 Connection G(PF) 1/4 F02 Connection G(PF) 3/8 F03 Connection G(PF) 1/2 F04 Series IR1000 Modular Products and Accessory Combinations Applicable model Description IR100 IR200 / IR2120 IR300 / IR3120 1 Air filter 2 Mist separator

ARP3000-02 VY1 G ARP3000-02BG PPA How to Order JIS Symbol AL ARP 3000 BG R 02 Option Direct operated precision regulator Nil None Reverse flow R Thread type Accessory Nil N F Rc NPT G Nil None With bracket With pressure gauge B G Pressure gauges are shipped together with regulator, (but not assembled).

Table 10-1 specifications EX245-FPS1 EX245-FPS2 EX245-FPS3 (W x L x H) mm 85 x 148.5 x 136 1,100 g 1,200 g 8 128 () 64 (US1) 350 mA 300 mA (US1/US2) XD1/XD2 16 A (US1/US2) 10 A (US1/US2) 24 VDC +20%/-15% <20.4 VDC US1 >21.6 VDC < 17 VDC 6 A 24 VDC +20%/-15% <21.6 VDC : >22.8 VDC US2 / <17 VDC 4 A () 1.2 V US1 US2 4 8 US1 UT1/UT2 24 VDC +20%/-15% 2 A( UT1) 1 A (

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | SolenG 12'Lead (Sd.) D .

Nil S n B L F G Basic type Axial foot type Front flange type Rear flange type Bore size Auto switch type 20 25 32 40 50 63 80 100 20mm 25mm 32mm 40mm 50mm 63mm 80mm 100mm Without auto switch Nil Select applicable auto switches from the table below. Cylinder stroke Refer to the stroke table on page 2.

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | SolenG 12'Lead (Sd.) D .

size (mm) Model Max system pressure (MPa) Proof pressure (MPa) Pilot port Weight (g) 0.32 0.25 0.40 0.20 0.25 0.20 0.29 0.60 0.64 0.82 1.10 1.66 0.08 0.16 0.19 0.24 0.33 0.60 1.0 1.9 3.8 4.6 8.0 9.0 12 1.5 VXA3115-00 VXA3125-00 VXA3225-00 1.0 1.5 0.3 0.6 0.3 0.08 0.15 0.17 0.20 0.27 0.38 150 0.5 1.0 2.2 230 150 VXA3135-00 VXA3235-00 VXA3245-00 3 230 4 Note) Add the V type (VXA31) 80 g,

0.2 (G) H A E F (Through) N ( I ) (L) (Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 0.8 thread depth 4 2-M5 0.8 thread depth 4 2-M5 0.8 thread depth 4 2-Rc1/8 thread depth 5 SS T Bore size (mm) 2 2-4.3 through 2 2-8 counterbore with depth 4.3 2 2-5.5 through 2 2-9.5 counterbore with depth 5.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2 2-6.5 through 2 2-11 counterbore

0.2 (G) H A E F (Through) N ( I ) (L) (Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 0.8 thread depth 4 2-M5 0.8 thread depth 4 2-M5 0.8 thread depth 4 2-Rc1/8 thread depth 5 SS T Bore size (mm) 2 2-4.3 through 2 2-8 counterbore with depth 4.3 2 2-5.5 through 2 2-9.5 counterbore with depth 5.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2 2-6.5 through 2 2-11 counterbore

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R P Rc 1/8 (NPT 1/8) Sensor (breathing) port LQ1 integral fitting 1/8 (3), (4) Rc 1/8 (NPT 1/8) Pilot port Pilot port F K A B A B SMC SMC J G L (H) Threaded type Pilot port Rc 1/8 (NPT 1/8) N M C A B D (mm) LVQ0-S Dimensions (N.C. valve) A B C D E F G

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) IN 841 1402 1962 63 OUT 935 1559 2182 IN 1361 2268 3175 80 OUT 1508 2513 3519 IN 2144 3574 5003 100 OUT 2356 3927 5498 Intermediate Strokes Installation of spacer on standard stroke body. Method Model no. Refer to page 4 for standard model no.

56) (16) (9) (18) (19) (52) (9) (11.5) (4.8) NARM2000 .18 1.36 1.69 1.10 1.06 2.76 .79 .45 .94 1.10 2.60 .45 .65 .19 (4.5) (34.5) (43) (28) (27) (70) (20) (11.5) (24) (28) (66) (11.5) (16.5) (4.8) Dimensions by number of stations Model Symbol A C E F G H J K M P NARM1000 L1 1.42 2.17 2.91 3.66 4.41 5.16 5.91 6.65 7.40 8.15 (36) (55) (74) (93) (112) (131) (150) (169) (188) (207) L2 1.06 1.81

Pilot Operated 2 Port Solenoid Valve Dimensions/Series VQ20 L style/Grommet (G) VQ21A1-mGm-Lm VX VNl VQ Dotted line: Bracket mounting style (-LF) 4.3-7 Series VQ20/30 Dimensions/Series VQ20 In-line/DIN connector (Y) VQ21A1-mYmm-m Dotted line: Bracket mounting style (-F) 4.3-8 Series VQ20/30 For Dry Air, Pilot Operated 2 Port Solenoid Valve Dimensions/Series VQ30 In-line/Grommet (G) VQ31A1

(A contact) 50mm 75mm 100mm 125mm 150mm 170mm 200mm 50 75 100 125 150 170 200 N.O. (A contact) Use a driver with CE marking.

B L F G C D Basic style Axial foot style Rod side flange style Head side flange style Single clevis style Double clevis style MU Nil Without auto switch (Built-in magnet) Auto switch DFor the applicable auto switch model, refer to the table below. Auto switches are shipped together, (but not assembled).

After washing the element, make sure the base seal is properly mounted. 500 A Vertical Suction Filter FHIA Series Dimensions Differential pressure indicator 16 B (34) F OUT Removal dimension K H F OUT D E C H Differential pressure indication switch FH FH 62 HOW (65) F IN 4 x I OUT A J G (mm) A B C D E F G H I J K Model Weight (kg) FHIA-04 FHIA-06 FHIA-08 FHIA-10 FHIA-12 FHIA-16 FHIA-20 FHIA