OMR0031

The table e is moved based on the user defined settings. -Necessary settings: Target position, speed, acceleration, deceleration and load mass.

LECP6_C

D RESET SVON (1) 1-192 E ON(SVON ON) 1-193 E ONSVON ON 1-194 E 1-195 E 1-196 E EEPROM 1-197 E EEPROM 10 CPU CPU CPU 1-198 CPU E 1 SV1.00 RESETSVONSETUP 52 - 13. / A 50mm () () 5m 5m 10% 15m 20% 53 - 14 / 14.1 LE () EMG 1000 1 54 - /Best Pneumatics No UL UL1310 Class2 14.2 55 - 14.3 90~100 DC24VSVON a) b) c) d) e) 56 - D (100 ) 14.4 1. 2. 3. 4. 5. 6. 7.

VNC

D C B VNC5-32F VNC6-40F VNC7-50F 1 8 1 4 1 4 32 40 50 278 293.5 317.5 310.5 326 350 12 12 14 36 42 54 100 105 120 20 24 24 134 146 162.5 135 140 155 210.5 226 250 130 150 180 Flange Type Port size: 65F, 80F Electrical entry hole: G1/2 Manual override (Non-locking) 4 x 2-18 mouting hole (80F: 8 x 2-18) Model Applicable flange 65 80 H F E D C B A 1 4 1 4 405.5 441.5 VNC81 -65F VNC91 -80F 65

VXA21/22

0.16 2.8 0.19 3.4 2.2 230 0.24 0.6 0.33 6 VXA3235-00 150 4.3 3 0.3 4 0.5 9 VXA3245-00 230 Note 1) OAdd the V type (VXA31) 80g, (VXA32)130g.

ZPT/ZPX

Silicon rubber Urethane rubber Fluoro rubber EPR ZP ZPX40H-B01-B8 ZPX100H-B01-B10 ZPX100H-B01-B12 ZPX125H-B01-B10 ZPX125H-B01-B12 418 414 482 478 148 150 160 158 229 219 258 254 40 50 63 80 100 125 ZPX40H-B01-B10 ZPX50H-B01-B8 ZPX50H-B01-B10 ZPX63H-B01-B10 ZPX63H-B01-B12 ZPX80H-B01-B10 ZPX80H-B01-B12 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

NCRAI seies

cRAtOBo 6.77 13.49 7.51 14.22 NCRATOTOO 15.81 31.61 17.57 33.38 nsed,e. energy is tt|e max. abscbed energy with optimum adlustnert of the cushim o Series:NCRAI NCRAAJ/3o, t'lCRAlOsO NCRATO$,80, {n r{cRAloso lo.2-2 irc8A106s 10.2-3 NCnA1080 lO.2-4 {, 6@essive Rotatim time rnay caus stbking.

Ionizer Nozzle type IZN10 Series IZS

150 mm, capacitance: 20 pF) as defined in the U.S.

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

B C Nil None With SUP blocking plate With EXH blocking plate With SUP and EXH blocking plates Port plug A Port plug B 1 2 3 Note) P R PR A B Cylinder port size 4 Note) 5 Note) E Note) The 3 position type uses two stations.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard stroke -X Bore size (mm) Standard stroke (mm) Piping port location 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h 20Nil Note 1) Please consult

rep-modular-e

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CXS

8 Piston rod B Rod seal e Aluminum bearing alloy NBR !

CXS

8 Piston rod B Rod seal e Aluminum bearing alloy NBR !

JXCx-OMT0028CN

) RESET SVON D (1-192) E ON(SVON ON) (1-193) E ON(SVON ON) (1-194) E (1-195) E E EEPROM (1-197) E (EEPROM 10 ) CPU (CPU ) CPU (1-198) CPU E 64 - Revision history No.JXC-OMT0028CN 2018 3 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and

CYP

Nil L R S a b h g d c f e Operating direction Left Right Note) Plugs are installed in ports other than those indicated for the model.

CYPSeries

Nil L R S a b h g d c f e Operating direction Left Right Note) Plugs are installed in ports other than those indicated for the model.

CYPSeries

Nil L R S a b h g d c f e Operating direction Left Right Note) Plugs are installed in ports other than those indicated for the model.

VZ100/300/500

port R port P , E port R port Electrical entry Note) VZ52R is for manifold only.