4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Never remove valve at an angle.

-fl Seies

Never remove valve at an angle.

Rotary Table

An injury or failure can result. 1. Pay attention to the length of time that a switch is ON at an intermediate stroke position.

1

6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mA 25 25 40 25 + 35 (n 2) 2 (n = 2, 4, 6)*1 60 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mV 25 25 35 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 35 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mWV D-M9mAV 25 25 35 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 35 + 35 (n 2) (n = 2, 3, 4, 5) *1 When n is an odd number, an even number that is one larger than the odd number is to be used for the

Mechanically Jointed Rodless Cylinder Series MY1

Wall mounting z y P. 26 Wb: MGGLB25-200 (4.35kg) x y x z MY1H40-500 3. Ceiling mounting 4.

3 Port Solenoid Valve/

release valve X538 VP 4 1 5 4 R 5 D Z 03 M A Dual residual pressure release valve with soft start-up function X555 VP 4 1 5 4 5 D Z 03 M Throttle Thread Series Nil Variable throttle 10 1 xed orice 15 1.5 xed orice 20 2 xed orice Nil Rc F G N NPT 5 VP500 7 VP700 Body 2 Body ported 4 Base mounted VP700 only Note) X536 only body ported (option2).

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

With auto switch CRQ2B S 20 90 CDRQ2B S 20 90 A90 S Shaft type Built-in magnet Single shaft Double shaft S W Rotation 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Air cushion Single shaft Double shaft S W Rotation Air cushion Without Without With Sizes 10, 15 Nil Nil C 90 80 to 100 170 to 190 180 Size 20, 30, 40 10 15 20 30 40 Air cushion Auto switch model Air cushion Without

Modular F.R.L. Unit

20 191 11 20 50 98 70 44.5 16 84 11 6.4 117.5 316 3.3 280 46 20 196 20 11 50 70 98 44.5 84 13 11 6.4 117.5 319 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

COQ2BP

E30 s : V g 20 Danger ~ Zone V 10 V 5000 10 15000 20 Welding Current (A) t2 SO 40 Safe 130 . ~ 20 S Zone . , .. ., , is 10 , , " 0 5000 10 15000 20 Welding Current (A) Series CD02BP High Magnetic Reid Resislance Through Hole Mount:COQ2BPO D DM-OO p 050 Hs z w o 4-" N Throu h hole 4X2-00 Counter bore Both Ends Tapped: COQ2APO -O OM-OO ~~ NOle: Female thread and rod dimensions

3 Way,3 Port Solenoid Valve NVZ Series

-(OG) NW$21-20-(OH) L type plug connec-tor M typ plug connector /NW4Z1-20-(OL) /NW4Z1-20-(OM) 11.91(3m) f]: with indicator light ancj surge voltage suppressor Symbol (intmal pilot tpe) N.C.

NVZseies

-(OG) NW$21-20-(OH) L type plug connec-tor M typ plug connector /NW4Z1-20-(OL) /NW4Z1-20-(OM) 11.91(3m) f]: with indicator light ancj surge voltage suppressor Symbol (intmal pilot tpe) N.C.

ISE70/75/75H

ZSE ISE PSE Z I SE3 PS Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP Caution ISA2 1. Do not use in an environment with spattering liquid of oil or solvent. IS ZSM Pressure Sources PF2 Warning 1.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

40 80 50 50 20 20 Load mass m (kg) Load mass m (kg) Load mass m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

CM2

P Q S Z ZZ S Z ZZ S Z ZZ S Z ZZ S Z ZZ Bore 87 158 167 112 183 192 137 208 217 20 20 6 23 87 162 171 112 187 196 137 212 221 25 25 6 26 89 164 173 114 189 198 139 214 223 164 32 239 248 32 6 28.5 113 202 213 138 227 238 163 252 263 188 40 277 288 213 302 313 40 8 32.5 Basic Spring return Double clevis Built-in One-touch fitting Basic Double clevis Built-in One-touch fitting CM2D20SCM220A

VXP21/22/23

LVC Select an option mark in page 17-3-10 by Applicable Fluids Check List for special fluids outside of the standard. LVA Connection LVH 3 8 1 2 3 4 03 04 06 10 12 14 20 LVD Refer to the table (2) given below for availability. Thread 1 1 1 2 LVQ 1 4 1 2 Refer to page 17-3-16 for ordering coil only.

Multi-Axis Step Motor Controller

20 *1 This controls the speed of the slave axis when the speed of the main axis drops due to the effects of an external force and when a speed difference with the slave axis occurs.

RLQ

800) 258-9200-www.stevenengineering.com 5.5 5.5 5.5 6.5 1 pc. 2 pcs. 20 20 20 20 20 20 CNA The operating ranges are provided as guidelines including hystereses and are not guaranteed values (assuming approximately 30% variations).

VXD21/22/23

Model Power source Frequency (Hz) 50 25 12 60 20 8 50 45 20 60 40 15 50 60 25 60 50 20 AC VXD21 DC AC VXD22 DC AC VXD23 DC Operating Fluid and Ambient Temperature Operating fluid temperature (C ) High temperature oil (3) Ambient temperature (C ) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E, N, P) High temperature water (3) (D, N) 99(4) 100(4) AC

MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.