High Vacuum Angle Valve

C B L (mm) Grommet (G) A B C D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 113 41 40 38 30 35 17 23 Cabtire cable VCTF2 x 0.75, O.D.: 2.3 mm, Sheath O.D.: 6.6 mm 96 60 48 129 95 62 28 128.5 121.5 138.5 43 50 48 40 40 26 25.5 63 51 120.5 121.5 154.5 97 66 40 38 30 35 17 23 96 113 87 66.5 50 48 40 40 26

Low Profile Guide Type

Aluminum alloy Stainless steel Aluminum alloy Carbon steel Stainless steel Rolled steel plate Rolled steel plate Aluminum alloy Rolled steel plate Urethane rubber Aluminum alloy Special resin Special resin Special resin Aluminum alloy Carbon steel Type C retaining ring for hole Phosphate coated (15) (10, 25) Type C retaining ring for axis 29 Chromate (Only for 25) Retaining ring 30 31

MHF2

dimensions on pages 12-3-12 to 12-3-23. 10 M5 x 0.8 23 94 MHF2-20D1R 154 MHF2-20D2R 12-3-24 25 Series MHF2 Low Profile Air Gripper Protrusion of Auto Switch from Edge of Body Auto Switch Hysteresis The amount of auto switch protrusion from the body end surface is shown in the table below.

MHF2

8 Aluminium alloy Clear anodized 16 to 20: Type C snap ring i Cap A Aluminium alloy Clear anodized Stainless steel !9 Parallel pin o Cap B Aluminium alloy Clear anodized NBR @0 Piston seal !0 Cap C Urethane rubber NBR @1 Gasket !1 Head damper Stainless steel Nit riding NBR @2 Gasket !2 Rack Replacement Parts Bolts for Body Through-hole Mounting Description Kit no.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

(different sides) 25 Auto Switches/Proper Mounting Position for Stroke End Detection D-Z7, Z80 D-Y59, Y69, Y7P D-Y7NW, Y7PW, Y7BW D-Y7BAL A 0 to 1 A B Bore size (mm) B 40 0 23 50 0 23 63 0 32 Auto Switch Mounting Flat head watchmakers screw driver When mounting an auto switch, first hold the switch spacer between your fingers and press it into the groove.

NARM Series

Description Material 0 3.5 7.1 10.6 14.1 17.7 21.2 24.7 NARM1000 NARM2000 134819 13615 13614 16.5 x 13.5 x 1.5 P7 Flow (SCFM) 7 8 9 10 11 13626 13625 13624 23 x 20 x 1.5 P8 Valve Valve spring Brass/NBR Stainless steel POM NBR NBR Pressure Characteristics Valve retainer O-ring O-ring Initial setting Supply pressure: 0.7MPa{7.1kgf/cm2} Secondary pressure: 0.2MPa{2.0kgf/c Flow: .4 SCFM NARM1000

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

D E G P 1 2 6 8 C J N R W Z With bracket (with set nut) Float type auto drain (N.C.)

Wedge Cam Operation Gripper Series MHK2

Note 2) Refer to P.22 and 23 for auto switch specifications.

Compact

MXZ12Standard (Pilot port location: Front) 4 x 6 4 x M3 x 0.5 depth 5 17 14 14 2 x 3.4 (Through holes for mounting) 17 37.4 11.5 2 x M3 x 0.5 (Pilot port) 32.5 + Stroke 34 + Stroke 31.5 7.7 11.5 23 24.5 + Stroke 16.3 + Stroke 14.4 23 (37.4) 2 x M3 x 0.5 depth 2.5 1.5 8 +0.1 6 0 depth 2.5 Auto switch 14 MXZ12R(Pilot port location: Right) MXZ12L(Pilot port location: Left) 2 x M3 x 0.5 (Pilot

ISG

Contacts/Bulb gland Pressure Source Nil W Nil B C 1a1b (Standard) 2ab Contact Warning Enclosure Type A 20a (Standard) Type A 20b Type A 20c Bulb gland 1.

IDG

Construction 0 P1 = 0.3 MPa Outlet air atmospheric pressure dew point (C) 10 Refer to pages 14-19-30 to 31.

PF-OMN0011_C

No.PF-OMN0011CN-C / / PF3W3## SMC 2 9 12 13 15 15 16 21 23 23 F0 25 F1 OUT1 26 F2 OUT2 34 F3 40 F10 41 F20 45 F22 46 F30 48 F80 49 F81 50 F82 51 F90 52 F96 53 F97 54 F98 57 F99 58 59 62 63 66 66 69 71 -1No.PF-OMN0011CN-C (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

PSxx-OMU0005CN

) 38L A B(ZS-46-A2) 38L B -15No.PS-OMU0005CN-C (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -16No.PS-OMU0005CN-C (-M5) 1/6~1/4 1~1.5Nm (ZS-46-N) -01-N01 23 3~5 Nm -C4L-C6L 1/61/4 1~1.5Nm -17No.PS-OMU0005CN-C -18No.PS-OMU0005CN-C () TU0425( 42.5) -19No.PS-OMU0005CN-C FG -20No.PS-OMU0005CN-C Z/ISE20B(F)-S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max

CQS

For details, refer to pages 7-9-23 and 7-9-21. 7-4-45

Secondary Batteries

(A) 4 (B) 2 C *Specifications and dimensions for the 90-series are the same as standard products.

Compressed Air Preparation Filter

AD27-D AM54P-m120AS-C AM64P-m120AS-C With bowl guard AD27-C-D AD37m-D AD47m-D Normally open (N.O.)

MQQ

CE1 CE2 20, 25 (Non-integrated type) ML2B +0.058 0 0.040 0.076 9 hole H10 Shaft d9 25 C J G5-S CV CI MVGQ CC +0.2 +0.1 14 10 RB S + Stroke 19 30 H Z + Stroke 9 J ZZ + Stroke D-X 20Bore size (mm) S CI Z H ZZ Data 20 24 97.5 168 40.5 177 25 30 102.5 177 44.5 186 10-5-23 23 Series MQM Accessory Bracket Dimensions Mounting nut Rod end nut d d C C B H B H Material: Carbon steel Material: Carbon

MQQ

CE1 CE2 20, 25 (Non-integrated type) ML2B +0.058 0 0.040 0.076 9 hole H10 Shaft d9 25 C J G5-S CV CI MVGQ CC +0.2 +0.1 14 10 RB S + Stroke 19 30 H Z + Stroke 9 J ZZ + Stroke D-X 20Bore size (mm) S CI Z H ZZ Data 20 24 97.5 168 40.5 177 25 30 102.5 177 44.5 186 10-5-23 23 Series MQM Accessory Bracket Dimensions Mounting nut Rod end nut d d C C B H B H Material: Carbon steel Material: Carbon

Digital Gap Checker

Description 1 DC (+) 18 6.5 2 N.C. 24 Supply port ISA3-C: Rc1/8 ISA3-F: G1/8 1 Detection port ISA3-C: One-touch fitting ISA3-F: G1/8 1 3 DC () 36 4 OUT1 Unit: mm 1: Conforming to ISO1179-1 Stations 1 2 3 4 5 6 (49) 47 L1 38 76 114 152 190 228 18 2 Piping type C (4 One-touch fitting) C (6 One-touch fitting) F (G thread) H 13 13.6 19 ISA3-mm (DIN rail mounting) 2 1 3 1.8 L1 (23) 7 (41.1) 38

7.4

Power consumption: 0.35 W Flow rate characteristics C [dm3/(sbar)]: 0.39 Added 3-position closed center.