LX Series Compact Electric Actuators

I ':"1 6 65 274 1 7 7 1 7 7 6 52 55 -r5 loo . 6 . 202 202 6 8 65 320 227 227 6 47 75 litzs . 70 345 252 252 6 47 150 6 8 370 277 2 7 7 r 1 65 T-slot A dimensions T-slot B dimensions $unies tX$ tilo To 0[dEl' tlect|'ic Acl||at0 AC Servo Motor 100vAc TS45O1N -rslsotl I Nole 1) l Applicable Applicable TarnaFwa Sek I 2OOVAC TS45O1N AppLicable L Applicable 3 -.'

5 Port Solenoid Valve, Series VQC

Conductor resistance /km, 20C 65 or less Note) When using the negative COM specification, use valves for negative COM. Withstand pressure V, 1 minute, AC 1000 Special wiring specifications (options) Insulation resistance M/km, 20C 5 or more Note) The minimum bending radius for D-sub connector cables is 20mm. (For 25P) Mixed single and double wiring are available as options.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Light weight & compact Series XMA with KF(NW) flange Model Weight kg A mm B mm Conductance l/s XMA-16 5 0.33 40 103 XMA-25 XMA-40 XMA-50 14 0.61 50 113 B 45 1.40 65 158 80 2.00 70 170 A 160 XMA-63 XMA-80 3.60 196 88 200 6.20 90 235 : Common to all series.

VNC

Air operated LVC (1) (2) (1) (2) LVA Port size Flow characteristics Weight (kg) External pilot solenoid Cv Orifice size (mm) Model Effective area (mm2) 880 1260 1400 1800 1 4 VNC1 VNC12 Flange Note) LVH 12 (P1) 12 (P1) 45 65 56 80 49 70 73 100 VNC814-65F VNC811-65F VNC914-80F VNC911-80F 65 15.7 External pilot solenoid LVD (1) (2) 80 21.2 (1) (2) LVQ Note) The companion flange is JIS B 2210

VQC

Conductor resistance /km, 20C 65 or less Note) When using the negative COM specification, use valves for negative COM. Withstand pressure V, 1 minute, AC 1000 Special wiring specifications (options) Insulation resistance M/km, 20C 5 or more Note) The minimum bending radius for D-sub connector cables is 20mm. (For 25P) Mixed single and double wiring are available as options.

ZX

S 0.3 to 0.7 mm B 0.5 to 1.2 mm Nil L Grommet (0.6 m) Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector 13-2-65 65 Series ZX Vacuum Pump System/Manifold Disassembly from Individual Unit Manifold disassembly from individual unit 1. Remove Philips screws. 2. Remove cross-recessed head machine screw for precision machinery. 3. Mount plugs to valve unit. 4.

Compact

I ':"1 6 65 274 1 7 7 1 7 7 6 52 55 -r5 loo . 6 . 202 202 6 8 65 320 227 227 6 47 75 litzs . 70 345 252 252 6 47 150 6 8 370 277 2 7 7 r 1 65 T-slot A dimensions T-slot B dimensions $unies tX$ tilo To 0[dEl' tlect|'ic Acl||at0 AC Servo Motor 100vAc TS45O1N -rslsotl I Nole 1) l Applicable Applicable TarnaFwa Sek I 2OOVAC TS45O1N AppLicable L Applicable 3 -.'

76

Material: Copper alloy 2.56 (65) 70 in (mm) Use a large flat washer when it is used.

39

80.0 65.0 135.0 165.0 195.0 225.0 255.0 285.0 85.0 115.0 145.0 175.0 205.0 235.0 80.0 110.0 140.0 65.0 95.0 125.0 80.0 110.0 65.0 95.0 80.0 65.0 135.0 165.0 195.0 225.0 255.0 285.0 85.0 115.0 145.0 175.0 205.0 235.0 10 Series CKZ3N Power Clamp Cylinder Complies to NAAMS standard Dimensions Model Selection CKZ3N North American Type Made to Order European Type CKZ3T 250.03 1020.05 250.03 65

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

(mm) D H Bore size B GA L LB GC GB C A LX LH MM NB Y X NA Z S LD 3.5 through, 6.5 depth of counterbore 4 9.5 28 8 M4 x 0.7 12 4 8 31.5 85 65 10 15 12 14 16 5 11 20 23 16 4.5 through, 8 depth of counterbore 5 5 9.5 16 15 18.3 20 16 5 11 20 26 20 8 28 M5 x 0.8 10 16 31.5 86 66 Specific Product Precautions Be sure to read before handling. Caution on mounting Caution 1.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

(mm) D H Bore size B GA L LB GC GB C A LX LH MM NB Y X NA Z S LD 3.5 through, 6.5 depth of counterbore 4 9.5 M4 x 0.7 12 28 8 4 8 31.5 85 65 10 15 12 14 16 5 11 20 23 16 4.5 through, 8 depth of counterbore 5 5 9.5 16 15 18.3 20 16 5 11 20 26 20 M5 x 0.8 28 8 10 16 31.5 86 66 Specific Product Precautions Be sure to read this before handling. Mounting Caution 1.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

75 17.7 25 25 31.4 59 65 68 77 15 20.5 23 26.5 3.5 4.5 4.5 5.5 M5 0.8 8 10 10 12 M8 x 1 34 37 40 46 13 12 14 15 3H9 4H9 4H9 5H9 3H9 4H9 4H9 5H9 M5 x 0.8 19 24 28 33 3.5 4.5 4.5 5.5 3H9 4H9 4H9 5H9 27 36 39 45 32 43 48 55 M10 x 1.5 M5 x 0.8 M6 1 M10 x 1 M6 x 1 M10 x 1.5 Rc1/8 M6 1 M10 x 1 M6 x 1 M12 x 1.75 Rc1/8 M8 1.25 M14 x 1.5 M8 x 1.25 913

Compact Cylinder with Solenoid Valve/

D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310

CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD 0.6 TC (mm) Rotating angle A AU B BA BB D (g6) DD (h9) Size BC BD BU H 90, 180 10 15 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 12 14 5 6 6.7 10.6 2.2 16.7 23.1 18 20 90, 180 Rotating angle TC TD W Q S US UW ab M Size TA 90 4.5 17 56 69 65 82 10 35 15.5 44 6 9 8 15.4 90 180 15 5.5 20 40 16 50 7 10 9 17.6 180 AU dimension is not the dimension

Rotary Cylinder Series MRQ Size: 32, 40 1

. + 5 95 (mm) E Mounting screw Y Q Stroke 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 Size 58.5 ( 5 Stroke)/2 61 ( 10 Stroke)/2 61 ( 15 Stroke)/2 63.5 ( 20 Stroke)/2 61 ( 25 Stroke)/2 63.5 ( 30 Stroke)/2 63.5 ( 40

CNS

Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 65 125 76 140 Single knuckle joint and double knuckle joint should be used separately.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Wn Y Y-axis Yn Z-axis Zn X-axis Xn X Wa 65 mm 0 mm 5 mm 0.88 kg 210 65 150 111 Z Wb 150 mm 0 mm 42.5 mm 4.35 kg Wc 150 mm 111 mm 42.5 mm 0.795 kg Wd 150 mm 210 mm 42.5 mm 0.5 kg Y 42.5 5 n = a, b, c, d 3.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

08 20.0 M6 x 1 120 14.0 38 2 18.0 54 12.0 M6 x 1 12.0 160 08.6 40.0 090 12 27.0 M8 x 1.25 160 17.0 60 3 20.5 84 16.5 M8 x 1.25 22.0 220 11.0 50.0 134 16 31.0 NE NG NH NW PA PB PC PD PG Q QW T TT UU YW Z P Model MY3A16 MY3A25 MY3A40 MY3A63 4.0 110 42 30 6.5 7 19 102 4.0 32.5 26 44 43 17.2 8 22.5 M5 x 0.8 Rc, NPT, G1/8 Rc, NPT, G1/4 Rc, NPT, G3/8 6.0 150 62 47 9.0 10 30 138 6.0 47.5 40 64 65

0.01

0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 18 12 Pressure gauge SUP port Rc, NPT, G 1/8 DIN rail mounting bracket 5.3 DIN rail center L3 11.2 L4 24 L5 OUT 3 OUT 2 OUT 4 n Left Right OUT 1 OUT 5 Stations 1 Stations L1 L2 L3 L4 L5 1 106 120 135.5 2 144 38 162.5 173 3 182 38 76 200 210.5 4 220 76 114 237.5 248 5 258 114 152 275 285.5 6 296 152 190 312.5 323 63 (Max. 65

Pulse Valve

32 110 79 8 JSXFA Series Dimensions: JSXFAH/Immersion Type Port size: Size 10 94 22 (132) 94 Pilot port 1/8, 1/4 (Rc, NPT, G) 46 ANSI 6" 168.3 (130) B A IN port IN port Tank Provided by the customer ANSI 1" 33.4 Sch40 Width across flats 55 With/without thread (G1) Outlet pipe thread 65 OUT port 65 Outlet pipe dimensions and thread type Part no.