air-filter-e

m 100 L/4000 cm2 Pure water cleaning Others Note 1) Filtration accuracy: tested with ultrapure water, flow rate at P = 0.01 MPa.

Air Preparation Equipment

m 100 L/4000 cm2 Pure water cleaning Others Note 1) Filtration accuracy: tested with ultrapure water, flow rate at P = 0.01 MPa.

Wedge Cam Operation Gripper Series MHK2

0.4MPa 0.5MPa 0.6MPa 40 20 20 40 0.6MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Holding point L mm Holding point L mm Holding point L mm Holding point L mm Note) Distance to the holding point L of single acting type is shorten by spring return.

Digital Flow Switches

Minimum measured Maximum measured Minimum measured Maximum measured Minimum measured Maximum measured Part nos. flow rate value [l/min] Part nos. flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] PF2A510--1 PF2A550--1 PF2A511--1 PF2A521--1 PF2A551--1 PF2A510--2 PF2A550--2

Wedge Cam Operation Provides

point L(mm) MHY2 W MHKL2-25S MHKL2-25C MHW2 M 100 100 MRHQ 80 80 Holding force (N) Holding force (N) L Pressure 0.6MPa Auto switch 60 60 Pressure 0.6MPa 0.5MPa 0.5MPa 40 40 0.4MPa 0.4MPa 0.3MPa 0.3MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Holding point L(mm) Holding point L(mm) 2.4-11 Series MHK2 Dimensions MHK2-12l/Standard model 9 2-M3 X 0.5 thread depth 4 (Mounting thread) 15 3H9

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

P When mounted on the manifold, the common exhaust discharges the pilot and main valve exhaust through a common exhaust port to enable simple exhausting. 700 B 600 Max.operating speed (mm/s) Piping length1m JIS Symbol B A 500 Piping length5m A D SY (Single) 400 R P SYJ C 300 SX How to order valve with built-in speed controller SYJ5l 5l--lll l--l 200 VK Port size VZ 100 Config.

MHK2

L (mm) MHK2-25S MHK2-25C M: Allowable moment (M = WL) 100 100 W 80 80 Gripping force (N) Gripping force (N) Pressure 0.6 MPa Pressure 0.6 MPa M Pressure 0.6 MPa Pressure 0.6 MPa 60 60 0.5 MPa 0.5 MPa 0.4 MPa L 40 40 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) 12-6-10 10 Series MHK2 Wedge Cam Operation Slide Guide Air Gripper

MHK2

L (mm) MHK2-25S MHK2-25C M: Allowable moment (M = WL) 100 100 W 80 80 Gripping force (N) Gripping force (N) Pressure 0.6 MPa Pressure 0.6 MPa M Pressure 0.6 MPa Pressure 0.6 MPa 60 60 0.5 MPa 0.5 MPa 0.4 MPa L 40 40 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) 12-6-10 10 Series MHK2 Wedge Cam Operation Slide Guide Air Gripper

New

Stainless 1/8 3/32 2.4 steel 1/8 3.2 B Grommet 100 VAC With surge voltage suppressor C 110 VAC B C D E F 3/32 2.4 1/8 1/8 3.2 D 200 VAC 3/32 2.4 E 230 VAC 1/8 3.2 1/4 F 24 VDC C37 5/32 4 G DIN terminal 24 VDC G 7/32 5.6 With surge voltage suppressor J 1/8 3.2 H 100 VAC K L P Q R S T U 5/32 4 3/8 J 110 VAC Single 7/32 5.6 2 Size 2 Unit K 200 VAC 3/32 2.4 N.C. 1/8 L 230 VAC 1/8 3.2 3/32 2.4

Rotary Table/

tubing and steel piping P l = Operating pressure [MPa] O.

Table of Contents

L type plug connector is used for 3 position AS.

CNG

N 32 100 D Standard Type With Auto Switch CDNG L N 32 100 D B53 Number of auto switches With auto switch (with magnet) 2 pcs.

Cylinder with Lock Series CNG

N 32 100 D Standard Type With Auto Switch CDNG L N 32 100 D B53 Number of auto switches With auto switch (with magnet) 2 pcs.

Digital Flow Switches, Series PF2A, Series PF2W

Minimum measured Maximum measured Minimum measured Maximum measured Minimum measured Maximum measured Part nos. flow rate value [l/min] Part nos. flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] PF2A510--1 PF2A550--1 PF2A511--1 PF2A521--1 PF2A551--1 PF2A510--2 PF2A550--2

Gun Type Ionizer

100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 5) Supply pressure: 0.4 MPa Flow rate consumption: 316 L/min (ANR) 6) Supply pressure: 0.5 MPa Flow rate consumption: 390 L/min (ANR) 200 200 2 s 150 150 1.5 s 100 100 50 50 0.5 s 1 s 1.5 s 0.5 s 1 s 50 50 100 100 150 150 200 200 1500 0 150 300 450

Brake mechanism added

4 x 25 L Polished round 18 CDP-6A 80 100 20 0.065 0.117 83 73 5 4 4 x 30 L Polished round 20 L1 L2 m CDP-7A 100 25 0.065 0.117 88 78 5 4 4 x 36 L Polished round 24 Split pins and flat washers are included.

Fluoropolymer Piping Equipment

B E E F G H L L M Min. port size 2 x B L, L LQ3T11 4 3.5 10 9 4.8 9.5 11 28.5 27.5 14 2.5 LQ3T12 3 2 LQ3T21 6 4 17 16 6 12 16 34.5 33.5 20 4 LQ3T31 10 5 22.5 19.5 9 18 21 47.5 44.5 25 7.5 LQ3T32 8 6.4 LQ3T41 12 6 24 22 10 20 24 52.5 50.5 29 9.5 LQ3T51 19 7 26.5 24 14 28 32 64 61.5 37 16 LQ3T61 25 8 30 26 18 36 41 78 74 49 22 M (E, E) (E, E) G H L, L L, L (E,E): Reference dimension for the

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Refer to page 829-10 8-29-23 24 Dual Rod Cylinder: Double Rod Type Series CXSW 6, 10, 15, 20, 25, 32 How to Order Y7BW CXS W L 100 S 20 Nimber of auto switches Double rod type Nil S n 2 pcs. 1 pc. n pcs.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

min (ANR)] 59 Flow Rate Characteristics JSXD Series For Water How to read the graph The pressure differential to generate a flow rate of 100 L/min water is as follows.

Series KV2 Fittings

/400 100/400 100/200 100/200 100/200 100/100 ** Non-Standard Product, consult factory for lead time. 10 Series KV2 Union Tee KV2T_ _-_ _ D4 Applicable Tube C Applicable Tube B D3 MC L D1 D2 Q MB Applicable Tube A MA L2 L2 App.