Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

ML1C

LP-01 ML1C LC-01 25 32 40 Series Mounting position A B ML1C 177.5 128.5 152.5 123.5 147.5 172.5 D-M5 D-M5W D-M5T Lead wire cap Lead wire clamp Auto switch 14 11 Lead Wire Clamp/Lead Wire Cap (Option) 22 22 B A Lead wire clamp Lead wire cap Series LC-01 LP-01 ML1C (mm) 25 32 40 Mounting position Series A B 124.8 148.8 173.8 ML1C 113.2 137.2 162.2 Minimum Stroke for Auto Switch Mounting Operating

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Rail mounting hole pitch 12.5 C 9 8 7 6 5 4 3 2 1 0 No.

High Speed Pilot Operated

Flow Rate Characteristics Operating Frequency Port size Valve flow rate characteristics 70 Ambient and fluid temperatures (Upper limit) [C] 1, 5, 3 (P , EA, EB) 4, 2 (A, B) 1 R 4/2 (P R A/B) 4/2 R 5/3 (A/B R E) Model 60 C [dm3/(sbar)] b C [dm3/(sbar)] b DXT1215 1/8 1/8 1.3 0.37 1.3 0.23 50 Calculation of effective area S and sonic conductance C: S = 5.0 x C 40 30 20 10 0 0 200 Operating

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Thread Rc(PT) Table: Accessory/Option combinations Depends on model l Not available Available F G(PF) N NPT Accessories Options C C D -J -R D J T AMH150 R AMH250 AMH350 AMH450 Applicable models Port size Accessories Options AMH550 AMH650 AMH850 B 01 B 06 10 14 1 8 3 4 1B N.C. auto drain N.O. auto drain Drain guide 1/4B IN/OUT reversal -T Element service indicator Accessories 02 03 1 4 3

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa

IR30-OM00013

.=0.8MPa) ) F.S. (2) (3) (4) 0.010.8MPa IR3000 IR3010 IR3020 [MPa] MAX. 1.0 [MPa] () 0.1 [MPa] 0.010.2 0.010.4 0.010.8 0.2% 0.5% 11.5l /min(ANR) [1.0MPa ] -560 Rc1/4,3/8,1/2 Rc1/8 [2 ] 0.64 (1) (0.1MPa) (2) IR3000:0.2MPa (3)2 ON-OFF () (4) 4- (C) (C) (A) (A) (C) (A) (C) BLEED SUP OUT SU P N/ M Pa/ ( S) N N m 1 1 M Pa/m ( ) m 2 M Pa M Pa (A) /N (B) / ( ) m

VKF300

Mounted Type Common SUP, Common EXH Type 40/for base mounted type (Port A bottom ported) How to Order Applicable solenoid valves VKF334VV3KF3-40 05 01 Applicable blanking plate assembly VK300-42-1A Option Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Valve stations None With bracket (not mounted) Nil 1 station 01 Bracket VK300-43-1A F 20 stations 20 Port A: Rc(PT) 1/8 Port size 01 Rc(PT) 1/8 Type

44

KQ2 KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8

BP1000

Code Connections NPT 1/4 inch 1/4 inch compression 4 4T Seat material Material Code Material Viton (Standard) PTFE Kalrez No code TF KZ Code Body Brass Nozzle Diaphragm B S SH Gauge port (Inlete, r) 316 SS 316 SS Pressure gauge 1) 316 SS Hastelloy C-22 Hastelloy C-22 Code psig/bar unit MPa unit Pressure gauge unit 2) No code No gauge port Ports Unit psig/bar MPa Code No pressure gauge (Connections

Pneumatic Positioner IP300/IP3100

TYPICAL INSTALLATION S ngle Actnq Aciuoio' Splined Shaft Fitting Assembly (long) (c) 210050-31 Connecting feedback shaft to main spindle of actuator.

ZB-OM00301

DC+COM A(-) C(+) COM B(-) 1N.C.ON 2 ZNR/ 3AB 23 - No.ZB-OM00301 (10ms ) 1 210ms 2 330m/s 4() A-C ON B-C ON N.C. A-C ON OFF 10msec ON 10 A B OFF 50 A B 10 1 50 3 3 24 - No.ZB-OM00301 ZB / / Assy /HNBR Assy //HNBR 25 - No.ZB-OM00301 2 ()() 5kPa () ZFAZFBZFC ON ZB1-VQ110U N.C (0.3 0.4 0.5 0.6) ZB1-VQ110L (0.30.4) ZB1-VQ120U N.C ZB1-VQ110N.C.

IR10-OM00007

.=0.8MPa) ) F.S. (2) (3) (4) 0.010.8MPa(IR1000 0.005MPa) 1 IR1000 IR1010 IR1020 [MPa] MAX. 1.0 [MPa] () 0.05 [MPa] 0.0050.2 0.010.4 0.010.8 0.2% 0.5% 4.4L/min(ANR) [1.0MPa ] -560 Rc1/8 Rc1/8 [2 ] 0.14kg (1) (0.05MPa) (2) IR1000:0.2MPa (3)2 ON-OFF () (4) -4- (C)2 (C) (A) (A) (C) (A) (C) BLEED SUP(1) OUT(2) SUP N/ M Pa/ m M Pa/ ( S) () m 2 1 1 m N MPa M Pa

lPSMt

HOW TO ORDER x . x x Supply & Output Pressure Gauge f 00 no gauge 01 2k$/cnf 02 3 kgrf/cm'?

lPSMt

HOW TO ORDER x . x x Supply & Output Pressure Gauge f 00 no gauge 01 2k$/cnf 02 3 kgrf/cm'?

ZSE2/ISE2

ZSE2-01-15CN1 pc. ZS-10-5 A-501 pc.

/4" 5/8" to 3/4" Weight, lbs (kg) 46.3 (21) 49.6 (22.5) 81.6 (37) Dimensions, LxWxH, in (mm) 18.2x6.1x9.1 (463x157x230) 18.2x6.1x9.1 (463x157x230) 22.4x8.1x11.4 (569x206x289) Pump with Explosion Proof Motor, 115V/208-230V, 60 Hz, 1 Phase, cUL Listed. 3046E-01 3086E-01 3166E-01

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

370 440 100 120 130 160 180 210 246 290 ITVX 1 4, 3 8, 1 2 1 4, 3 8, 1 2 1 2, 3 4 1 2, 3 4 PVQ 3 4, 1 3 4, 1 VY1 Adapter Assembly Installation Procedure Accessory/Compact Pressure Switch: IS10-01 For details, refer to Best Pneumatics No. 8.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

S K 3 1 0 F 01 06 ASV Speed exhaust controller Option Nil None The effective area is two times larger. (In comparison with control by speed controller) Applicable model: ASV310F, ASV410F, ASV510F C With spatter cover Body size K Hexagonal lock nut 1 2 3 4 5 M3 M5 1/8 1/4 3/8 Note) Option should be indicated in order of C and K. Available only for ASV310F, 410F and 510F.