MXW

Dimensions B A D C M (mm) Stopper bolt Stroke adjustable range (mm) 5 Applicable size B A C D M Model Lock nut MXW-A812 21 MXW8 8 M5 x 0.5 2.5 6 MXW-A812-X11 15 31 MXW-A1212 5 23.5 MXW12 8 M5 x 0.8 2.5 6 Avoid operating within 1 mm. The effectiveness of the shock absorber and urethane damper will not be brought into full play, and could be adversely affected.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

B A B A A A A A A 2.PUSH 2.PUSH B B B B 1.TURN 1.TURN VQZ 28 5.5 35 74.5 SMC VQD 13 2-M4 clamp screw EXH outlet M5: External pilot port 9 D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port Lead wire length: L0, 600 mm L1, 1500 mm L2, 3000 mm C8: 1 (P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 44 29.5 2n-C3, C4, C6, M5 (4(A),

Aluminum High Vacuum Angle Valve

(NW) Right flange surface Left flange surface D K (DN) E H V I G L H A V V M A C U U Flange side r Temperature specifications/Heater t Auto switch type Symbol Nil Auto switch model Without auto switch (without built-in magnet) Remarks Symbol Nil Temperature 5 to 60C Heater With 100C heater With 120C heater D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(

Speed Controller with One-touch Fitting

ASD Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS AS-FE 2 F A 1 AS 1 M5 06 0 E Body size 1 KE AS-FG F A 1 AS 2 01 06 2 0 S Body size 2/3/4 AS-FP AS-FM Body size Made to Order Refer to page 562 for details.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Dimensions A B VQD A VQZ1000 VQZ2000 VQZ3000 67 81 93 35 43 52 VZS VFS Individual EXH spacer VVQZ1000-R-5-M5 VVQZ2000-R-5-01 VVQZ3000-R-5-02 VS M5: VQZ1000 Rc(PT)1/8: VQZ2000 Rc(PT)1/4: VQZ3000 VS7 B Used to form a separate exhaust port for an interior manifold station or stations.

VEX1

Port 3 (R) 1/4 (P1) Refer to page 1983. 2 x port size Port 2 (A),1 (P) 2 x d Mounting hole A (Air operated) Bracket mounting screw Max. O Min.

Air Slide Table Series MXW

Dimensions B A D C M (mm) Stopper bolt Applicable size Model Stroke adjustable range M B A C D Lock nut MXW-A812 5 21 MXW8 8 2.5 6 M5 x 0.5 MXW-A812-X11 15 31 MXW-A1212 5 23.5 MXW12 8 2.5 6 M5 x 0.8 MXW-A1212-X11 15 33.5 Avoid operating within 1 mm. The effectiveness of the shock absorber and urethane damper will not be brought into full play, and could be adversely affected.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Stainless Steel Type AS-FSG Series Dimensions: Universal Type Seal method: Gasket seal For M5, 10-32UNF Applicable tubing O.D. d Y W1 AS-F D3 D1 TMH ASD M L3 L4 AS L5 A AS-FE D2 KE AS-FG AS-FG AS-FP L2 L1 T H (Width across flats) AS-FM AS-D Metric Size [mm] AS-T Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FSG1-M5-23 3.2 ASP 11.6 19.4 17.5

Guide Cylinder/Compact Type Series MGC

D-H7NF D-H7BAL Auto switch model D-G5W D-K59W D-G5NTL D-B5/B6 D-B59W D-G5BAL D-G59F D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7 D-C80 D-C73C D-C80C D-A9 D-M9 D-M9W D-M9 D-M9W D-C73C D-C80C D-B5 D-B64 D-B59W D-A9 Applicable bore size Applicable Hs Hs Hs Hs B A B A 23 (31) B A B A B A B A B A B A 19 (27) bore size 24.5 (32.5) 23.5 (31.5) 22.5 (30.5) 17.5 (25.5) 20.5 (28.5) 27 (35) 7 6 1 4 2.5 8 6.5

MGP

D (mm) B 0.2 MGC B 0.2 MGF CY1 A 0.2 A 0.2 Hex socket head mounting screw 140 214 50 66 116 170 M12 X 1.75 M16 X 2 Hex socket head mounting screw 50 56 72 82 98 106 130 142 180 210 D(mm) Bore (mm) A (mm) B (mm) C (mm) Bore (mm) A (mm) B (mm) C (mm) MY1 MGPM MGPL 32 47 M4 X 0.7 M5 X 0.8 M5 X 0.8 M6 X 1.0 M8 X 1.25 18 22 24 30 34 40 46 58 54 62 41 46 54 64 78 86 110 124 156 188 10 12 14 18

Rotary Table/

D. (mm) I. D.

VZ1000

VK Applicable solenoid valve Type 25 (Non plug-in type) How to Order D 25 05 00C VV4Z1 VZ 4(A), 2(B) port G L M D G L M D VZ1120-M5 Stations VF VZ110-M5 (3 port valve) 02 2 stations 1(P), 3(R) port One-touch fitting for 6 VFR Applicable blanking plate assembly VZ1000-10-2A 20 20 stations SUP/EXH block mounting position VP4 DIN rail length specified B D U Both sides: 2 to 20 stations D side

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

type Applicable tubing O.D. d Applicable tubing O.D. d D1 H H D1 (Hexagon width across flats) (Hexagon width across flats) M1 L3 M1 L3 A L4 L4 L5 A L5 D3 D3 T T D2 L1 D2 L1 L2 L2 Metric Size L5 (1) A (2) M1 Weight (g) d T Model H D1 D2 D3 L1 L2 L3 L4 Max.

Compact Cylinder with Air Cushion and Lock Series RLQ

Hs A B A B D-A7H D-A80H D-F7 D-J79 D-F7W D-A79W D-F7WV D-F7V D-F7BAVL D-J79W D-F7F D-F7NTL D-F7BAL Approx. Hs Approx.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread Grommet (G) U side n Manual override 5 SY B 4 4 SMC SMC 2 A SYJ (L4) (L3) L2 L1 5 18 P=16 B B B 4 4 4 3 SMC SMC 2 2 2 A A A SX 2 SMC SMC SMC VK 1 SMC VZ Stations D side VF 6 6 8.3 8.3 23.5 54.5 84.5 (Single) 109 (Double) VFR (C4, C6) VP7 10 122 (3 Position) 300 (Lead wire length) VP4 Cover diameter 1.6 Cross section

Electric Slide Tables

7 @6 r w @9 @7 @8 e u @0 i y D A A D C-C D-D B-B !5 !1 !9 @3 #0 q @4 E C C E !4 !2 !0 !8 @1 !6 t o @2 @5 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Smooth Cylinders Low Speed Cylinders (mm) Rail mounting Auto switch model D-A7lH/A80H D-A73C/A80C D-F7l/J79 D-F7lW/J79W D-F7lV/F7lWV D-F79F D-J79C D-F7BA D-F7BAV D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-A9m D-A9mV D-A7m D-A80 D-F7NT D-A79W A B A B A B A B A B A B Bore size 10 4.5 4.5 0.5 0.5 3 3 3.5 3.5 8.5 8.5 0.5 0.5 16 5 5 1 1 3.5 3.5 4 4 9 9 1 1 Adjust the auto switch after confirming

CLQ

-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B CNA A B CNS 32 to 100 D-A79W D-F7WV D-F7V D-F7BAVL D-A73C D-A80C D-J79C CLS CLQ MLGP RLQ MLU ML1C Hs DA B A B -X 20Data Proper Auto Switch Mounting Position Auto Switch Mounting Height D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL D-A7H/A80H D-A73C/A80C D-F7BAVL D-F7BAL/F79F D-F7W D-F7/J79 D-F7V/J79C D-J79W

SZ3000

SZ3000-155-1A d Label for EXH block disk Label for SUP/EXH block disk D A L Label for SUP block disk Label for pilot port block disk Dimensions Applicable fittings size d Model A L D When a block disk is concurrently ordered by specifying on the manifold specification sheet, etc., a label will be stuck on the position where block disk is mounted.