Mechanically Jointed Rodless Cylinders

(mm) Fitting type Fitting model Cylinder model size Connection thread Cylinder model size Connection thread Male connector Male elbow Male connector Male connector Male elbow 4 KJH23-M5 KJL23-M5 KJS23-M5 KQ2H23-M5 KQ2L23-M5 KJL04-M5 KQ2L04-M5 KQ2S04-M5 KQ2L06-M5 KJS23-M5 KQ2H23-M5 KQ2L23-M5 KQ2H04-M5 KQ2L04-M5 KQ2S04-M5 KQ2H06-M5 KQ2L06-M5 KQ2S06-M5 KQ2H23-01S KQ2L23-01S KJH04-01S KJS04-01S

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

One-touch fitting) A port M3 x 0.5 M3 x 0.5 Flow Rate Characteristics Flow rate characteristics Effective area (mm2) Port size 12 (PA) 23 (AR) Manifold C [dm3/(sbar)] 1(P), 3(R) Port 2(A) Port b Cv C [dm3/(sbar)] b Cv Body ported for internal pilot 0.9 M3 x 0.5 Type 10-SS3YJ3-20 10-SYJ32M M5 x 0.8 Type 10-SS3YJ341 S41 10-SYJ34M M5 x 0.8 1.5 M3 x 0.5 Type 10-SS3YJ3-42-M5 Type 10-SS3YJ3-42-

Air Cylinder Series CM2

A B B B A B A B A B A B A 20 25 32 40 6.5 5.5 10.5 9.5 1 0 6 4 3 0.5 0 6 5 2.5 1.5 7 6.5 5.5 10.5 9.5 1 0 6 4 3 0.5 0 6 5 2.5 1.5 7 7.5 6.5 11.5 10.5 2 1 7 5 4 1.5 0.5 7 6 3.5 2.5 8 13.5 11.5 17.5 15.5 7 6 12 10 9 6.5 5.5 12 11 8.5 7.5 13 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

VK3000

Applicable blanking plate assembly VK3000-7-1A 01 1 station Solenoid on opposite side of A and B port P port: Rc 1/8 A port: M5 x 0.8 B port: M5 x 0.8 Nil R port: Rc 1/8 Thread type Type S41 20 20 stations Solenoid on same side of A and B port Type VK334 Type VK3140 P port: Rc 1/8 R port: Rc 1/8 S Nil Rc Port size Q CE-compliant Nil CE-compliant F N T G M5 M5 x 0.8 C4 4 cassette NPT B port

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

Mounting bolt M3 x 45L M3 x 55L M3 x 60L M5 x 55L M5 x 60L M5 x 65L M5 x 60L M5 x 65L M5 x 70L Mounting bolt M5 x 75L M5 x 80L M5 x 85L M6 x 75L M6 x 80L M6 x 85L RSQB12-10 Note) RSQB16-10 -15 RSQB20-10 -15 -20 RSQB32-10 -15 -20 RSQB40-20 -25 -30 RSQB50-20 -25 -30 7 9 Mounting bolt C D 9 Note) When using the through-hole mounting for a size 12 cylinder, be sure to use the flat washer which

KJ

(mm) <M5> <M5> Note) Weight (g) Model D1 P A M D2 L 2-applicable tubing M5 x 0.8 KJU23-M5 KJU23-01S KJU04-M5 KJU04-01S KJU06-M5 KJU06-01S 5.9 8.3 6.4 8.8 7.4 9.9 Reference dimensions after R thread installation.

MHZ2/MHZJ2

When closed 8.8 When open 22.8 7 Standard Type/Series MHZ2 Finger Position/Options Side Tap Mounting Type [1N1] Through Hole in Opening/Closing Direction [2N2] 4-MM Attachment mounting thread C C B A 4-H Attachment mounting hole S S O O B A Unit: mm Unit: mm Model A 3 4 5 6 Model A 3 4 5 6 B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 B 5.7 7 9 12 H 2.9 3.4 4.5 5.5 1

CG1

Position Mounting Height (mm) Auto switch model D-C7, C8 D-C73C, C80C D-C7, C8 D-H7 D-H7W D-H7F D-H7BAL D-B5, B6 D-B59W D-G5, K5 D-G5W D-K59W D-G5NTL D-G59F D-G5BAL D-B5, B6 D-G5W, K59W D-G59F D-G5BAL D-H7W D-H7F D-H7BAL D-G5 D-K5 D-G5NTL D-C73C D-C80C D-H7 D-H7C D-B59W Bore size A B A B A B A B A B A B HS HS HS 20 9 3 6 8 6.5 4.5 24.5 27 27.5 20.5 14.5 17.5 19.5 18 16 25 9 3 6 8 6.5 4.5

smcmaintenancepartslist

Contents Bore size (mm) Seal Kit List Description Material Note No. 20 25 32 40 50 63 80 100 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS MGP63-B-PS MGP80-B-PS MGP100-B-PS @4 @5 @6 @7 #5 #6 $4 $5 Piston seal NBR Set of left nos. @4, @5, @6, @7, #5, $4, $5 Rod seal NBR Gasket A NBR Gasket B NBR Set of left nos. @4, @5, @6, @7, #5, #6, $4, $5 Set of left nos. @4, @5, @6, @7, #5, $4

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2 LVA3 LVA4 LVA5 LVA6 66.5 11.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 Dimensions (mm) A B Q R P C E F G H K L N Model LVA1 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3 36 47 13 M6 x 1.0 42.5

High Purity Chemical Valve

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2m LVA3m LVA4m LVA5m LVA6m 66.5 12.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 (mm) Dimensions A B Q R P C E F G H K L N Model LVA1m 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2m 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3m 36 47 78.5 13

Electric Actuator/Slider Type

5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

Compact Cylinder with Lock Series CLQ

depth C 5.5 M5 x 0.8 unlocking port (Unlocks when pressurized) U I 6.5 VV D M E M5 x 0.8 K M E S 3.2 2 x 2 x M5 x 0.8 3.2 Head side cylinder port 16 16 W Dust cover (Manual unlocking unit) L G B + Stroke A + Stroke Retraction locking LOCK VH1 W1 Dust cover (Manual unlocking unit) M5 x 0.8 unlocking port (Unlocks when pressurized) Rod end male thread H1 Rod end nut H2 X C1 L1 (mm) Stroke

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Flow Characteristics SJ2000 Flow characteristics Port size 4/23/5 (A/BE) 12/4 (PA/B) 1(P) 3/5(E) 4, 2 (A, B) C [dm3/(sbar)] C [dm3/(sbar)] Cv b b Cv 0.04 0.55 0.13 0.13 0.50 0.04 C2 C8 0.08 0.16 0.33 0.36 0.13 0.08 C4 0.52 0.06 0.18 0.20 0.29 M3 0.06 SJ3000 Flow characteristics Port size 4/23/5 (A/BE) 12/4 (PA/B) 1(P) 3/5(E) 4, 2 (A, B) C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b 0.04 0.56 C2

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B B Dimensions Dimensions (mm) (mm) D Y F A B C E A B C D E N F Model Model ZPR10F-0-B5 ZPR20F-0-B5 M5 x 0.8 1.5 39.5 12.5 10 12 10 23.4 20 22 ZPR13F-0-B5 ZPR20F-0-B8 M8 x 1.25 13 15 2 40 23.9 13 10.5 12.5 15.5 29.3 46.5 ZPR16F-0-B5 ZPR25F

Speed Controller with Indicator

0.3 Note 1) 10-32UNF has the same specification as M5.

CY1

NN M10 x 1.0 M10 x 1.0 M10 x 1.0 S 63 63 83 W 25 30 35 X 10 16 19 Model CY1B6 CY1B10 CY1B15 ZZ 81 81 103 Port size M5 x 0.8 M5 x 0.8 M5 x 0.8 CY1B20 to 40 CY1B50, 63 (mm) B 36 46 60 70 86 100 MM x J M4 x 0.7 x 6 M5 x 0.8 x 8 M6 x 1.0 x 8 M6 x 1.0 x 10 M8 x 1.25 x 12 M8 x 1.25 x 12 C 32 38 D 22.8 27.8 35 43 53 66 E 30 32 G 8 8 9 11 14 14 H 20 20.5 22 29 33 33 I 28 34 40 50 58.2 72.2 K 8 10

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

ball Snap ring B Housing Piston rod A Piston rod B Rod cover Head cover Plate Piston A Piston B Bumper A Magnet Bumper bolt Hexagon nut Bumper B Hexagon socket head cap screw Hexagon socket head set screw Snap ring Bumper holder (2) Nickel plated (1) Hard anodized Chromated Chromated Nickel plated Hard chrome plated Nickel plated Nickel plated Nickel plated Note 2) Aluminum alloy for CXSL6

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

2.PUSH B B B B 1.TURN 1.TURN VQZ 28 5.5 35 74.5 SMC VQD 13 2-M4 clamp screw EXH outlet M5: External pilot port 9 D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port Lead wire length: L0, 600 mm L1, 1500 mm L2, 3000 mm C8: 1 (P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 44 29.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch