ZR

Interface D Adapter C Manual override Blanking plate Light ZQ Spacer B (Mounting holes) M5 PE port (Pilot valve exhaust port) ZF M5 PD port (Vacuum release pressure port) M5 PS port (Pilot valve supply pressure port) Release flow adjustment needle Rc 1/8 V port Vacuum pad connection port) Valve unit ZP 1 2 1 Rc 1/8 PV port (Air supply pressure port) ZCU AMJ 1 Bracket B Bracket B Misc.

CG1

C-16 type for pivot C-18 type for pivot Rod End Nut Clevis pins and knuckle pins are common for bore size 80 and 100.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

H C J E J E IN IN A A 2 x Port size 1(IN), 2(OUT) port B B 2 x Port size 1(IN), 2(OUT) port H G 2 x M5 thread depth N G 2 x M5 thread depth N WN: M12 connector F K D C J E IN A 2 x Port size 1(IN), 2(OUT) port B H G 2 x M5 thread depth N Glossary of Terms [mm] Size Port size A B C D E F G H N 20 1/8 14 30 69.2 36 9 18 15 17.5 6.4 1/4 19 40 67.7 22.2 22.2 7.6 3/8 22 48 70.7 11 19 20.6 6 30

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C3: One-touch fitting ass'y for 3 2n-C3, C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5

4 Port Solenoid Valve Series VQD1000

(Initial value) 3 1 (R) (P) Flow characteristics 14/2(PA/B) 4/25/3(A/BEA/EB) Flow characteristics Port size C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Valve model Body ported 10-VQD1121-L M-M5 10-VQD1121 -L M-M5 10-VQD1151-L M-M5 10-VQD1151W-L M-M5 0.22 0.27 0.22 0.27 0.16 0.24 0.10 0.25 0.05 0.07 0.05 0.07 0.19 0.28 0.22 0.27 0.31 0.28 0.31 0.28 0.05 0.07 0.06 0.07 Base mounted (With sub-plate

MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

Compact 5-Port Solenoid Valve

D-sub connector conforming to MIL-C-24308 (Refer to page 39.) Dedicated connector (Refer to page 39.) D-sub connector conforming to MIL-C-24308 (Refer to page 39.)

AW

B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S 1/8 1/4 10 one-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 14 Width across flats 17 AC Model Standard specifications Optional specifications Square type pressure gauge Digital pressure switch Round type pressure gauge P1 P2 A B Note) C D E G J M5 x 0.8 1/8, 1/4 1/4, 3/8 Round type pressure gauge

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

(mm) A B C D E F G H I J K L M N OO NN P Model 2-5.5 through 2-M4 x 0.7 thread depth 6 2-M5 x 0.8 thread depth 7.5 2-M5 x 0.8 thread depth 8 CXS20 64 25 62 23 50 28 6 12 12 30 10 M6 x 1.0 x 18.5l 53 11.5 2-M5 x 0.8 2-9.5 counterbore depth 5.3 2-6.9 through CXS25 80 30 78 28 60 35 6 12 12 30 12 M6 x 1.0 x 18.5l 64 14 2-M6 x 1.0 2-11 counterbore depth 6.3 2-6.9 through CXS32 98 38 96 36 75

CL

Part no. l Applicable snap ring t m 16.2 20.2 36.2 1.5 1.55 1.55 0.9 1.15 1.15 Type C 8 for axis Type C 10 for axis Type C 10 for axis IY-G02 IY-G03 IY-G04 CD-G02 CD-G25 CD-G03 CD-G04 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 38.6 42.6 54 65 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 9-2-34 33 Lock-up Cylinder Double Acting, Single Rod Series CL1 40, 50, 63, 80

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

x 0.8 Finger opening port M5 x 0.8 Finger closing port 13 MHS A 45 C MHC MHT M5 x 0.8 Finger closing port M5 x 0.8 Finger opening port MHY 25 25 MHW 6-M4 x 0.7 thread depth 8 MRHQ (A, B, C common view) Auto switch mounting groove 42 14h9 0 0.043 3-4 depth 8 +0.02 0 Misc.

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

MHR2-30R 76 73 B MHR2-30E port position 3-M5 X 0.8 thread depth 10 P.C.D43 (Mounting thread) 80 120 15.5 120 C A 54 M5 X 0.8 Finger opening port M5 X 0.8 Finger closing port 14 M5 X 0.8 Finger opening port M5 X 0.8 Finger closing port 25 25 6-M5 X 0.8 thread depth 10 (A, B, C common view) 50 3-5 +0.02 0 depth 10 16h9 0 0.043 (A, B, C common view) 2 10 38.5 22 (76) 70 11 25 2 12 0 -0.05 5

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Q Main circuit C/Q IO-Link master Gray NC White NC Blue L L 19 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20 Series Dimensions ZSE20(F) ISE20 ZSE20C(F)/ISE20C(H) ZSE20B(F)/ISE20B ZSE20B(F)-L/ISE20B-L ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Made to Order Piping specification M5 For 20 25 5 1.5 M5 female thread Lead wire with connector If there is a possibility

Modular Type Air Filters Series AF

Symbol 10 20 30 40 50 60 Body size Description Metric thread (M5) Rc NPT G Nil Thread type N Note 1) F Note 2) + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil B Note 3) Mounting a Without mounting option With bracket + Semi-standard Option Nil C D Float type auto drain b Without auto drain Float type auto drain (N.C.)

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

fitting for 4) Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Effective area (mm2) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port Manifold Body ported for internal pilot SS5YJ3-20 SYJ32 M5 x 0.8 M3 x 0.5 0.9 31 S31 SS5YJ3SYJ33 M5 x 0.8 M3 x 0.5 0.9 SS5YJ3-32-M5 0.25 0.25 0.25 0.24 0.32 0.32 0.33 0.32 0.20 0.21 0.20 0.22 M5 x 0.8

Rubber seal 5 Port Solenoid Valve Series SYJ5000

x 0.8, Port size C4 (One-touch fitting for 4) C4 (One-touch fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71

Slide Unit Series CX2/CXWM/CXWL

x 0.8 Hexagon socket head cap plug 2 x 2 x 4.3 through (5H7 hole pitch) 2 x 5H7 depth 6 +0.012 0 4 x M5 x 0.8 thread depth 10 2 x M5 x 0.8 Cylinder port 2 x M8 x 1.0 Adjusting bolt 3 x M5 x 0.8 thread depth 10 4 x 4.2 through Shock absorber Max.

Slide Unit Series CX2/CXWM/CXWL

x 0.8 Hexagon socket head cap plug 2 x 2 x 4.3 through (5H7 hole pitch) 2 x 5H7 depth 6 +0.012 0 4 x M5 x 0.8 thread depth 10 2 x M5 x 0.8 Cylinder port 2 x M8 x 1.0 Adjusting bolt 3 x M5 x 0.8 thread depth 10 4 x 4.2 through Shock absorber Max.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

): VQZ1 2 wGwC3, C4, C6, M5 0 1 300 (Lead wire length) 103.5 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 Mounting holes 0.8 SY 4 8.6 10 SMC SMC 2 Cover diameter 1.6 Cross section 0.34mm2 R2 25.8 2-C3, C4, C6, M5 SYJ 60.3 C3: One-touch fittings for 3.2 Manual override SX C4: One-touch fittings for 4 C6: One-touch fittings for 6 VK M5: M5 thread VZ 9.5 (C3,C4,C6) VF (47.5) VFR VP7 25.5 (M5) 26.5 5.4

Flow Control Equipment

M3 Port size With One-touch fittings M3 X 0.5 M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 Thread U10/32 01 02 03 04 R(PT) Unified thread (10-32UNF) Meter thread (M3, M5) _ N NPT AS Needle Valve/Flow Characteristics ASN AS2301F-01, AS2311F-01 AS2201F-01, AS2211F-01 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AQ Supply pressure: 0.5MPa Supply pressure