5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VS7 38 22 Dimensions 13 Silencer P/N Model VQZ1000 VQZ2000 VQZ3000 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP(For VQZ1000/VQZ2000) VVQZ2000-CP(For VQZ3000) Used to block an unused cylinder port when using a 4 way valve as a 3 way valve. 1.12-23 VQZ1000/2000/3000 Body Ported Manifold Option Double check block (Externally placed downstream): For VQZ1000 only VQ1000FPGll

Table of Contents

98.1 N 147.1 N 245.2 N 392.3 N -X Place the center of gravity of the load and center of the slide unit close during operation.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

(Station 1) Light/surge voltage suppressor 50.5 86.5 71.5 68.2 56.5 Individual SUP spacer 7.5 19.7 Individual EXH spacer Block separation lever L Dimension n: Stations L n 2 148 137.5 122.5 13 3 173 162.5 138.5 17.5 4 185.5 175 154.5 15.5 5 198 187.5 170.5 14 6 210.5 200 186.5 12 7 235.5 225 202.5 16.5 8 248 237.5 218.5 15 9 260.5 250 234.5 13 10 285.5 275 250.5 17.5 11 298 287.5 266.5 16

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 10 R E C L 25 150 M9BW C Number of auto switches Mounting Nil S n B L F G 2 pcs. 1 pc. n pcs.

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N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

N Symbol Electroless nickel plated Control type If more than one option is required, write option part numbers in the order of S, N.

With Factory Installed

Example) 1NR 20 1/8 25 1/4 Port size 30 3/8 01 1/8 1/2 40 Accessory (optional) 1/4 02 03 3/8 Symbol Description Applicable model 04 1/2 B With bracket AR2001-AR4001 Optional Specifications Combination Table Optional specifications Applicable regulator model Optional specifications Symbol AR3001 1 N R AR 2001 AR2501 AR4001 O.02 ~ O.2MPa [O.2 ~ 2.0kgflcm 21 -1 Non relieving -N IN-OUT reversal

5 Port Solenoid Valve, Series VQC

Conforms to IP40 Name plate [-N] VVQ1000-N-Stations (1 to max. no. of stations) VVQ2000-N-Stations (1 to max. no. of stations) Direct EXH outlet with built-in silencer [-S] Back pressure check valve Assembly [-B] VVQ1000-18A, VVQ2000-18A Blanking plug KQ2PExhaust port 1 2 3 4 5 9 8 7 6 1 2 3 4 5 9 8 7 6 Conforms to IP40 2 Based-Mounted Type Plug-in Unit Series VQC4000 How to Order Manifolds

VQC

Conforms to IP40 Name plate [-N] VVQ1000-N-Stations (1 to max. no. of stations) VVQ2000-N-Stations (1 to max. no. of stations) Direct EXH outlet with built-in silencer [-S] Back pressure check valve Assembly [-B] VVQ1000-18A, VVQ2000-18A Blanking plug KQ2PExhaust port 1 2 3 4 5 9 8 7 6 Conforms to IP40 2 Series VQC4000 Base-Mounted Type Plug-in Unit How to Order Manifolds VV5QC 4 1 08 02

A

M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER TECHNICAL DETAILS

Fieldbus System

End Plate type N Nil Positive common Negative common Note) Without SI Unit, the symbol is nil.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

M3 Port size With One-touch fitting AS M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 Thread type U10/32 01 02 03 04 ASP R Unified thread (10-32 UNF) Metric thread (M3, M5) Nil ASN N NPT AQ ASV Needle Valve/Flow Characteristics AK AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 ASS Inlet pressure: 0.5

Vacuum Unit

How to Order w q e r ZK2 A A N0 N N 12 08 t y q Body/Exhaust type r Connector w Nominal nozzle size For pressure switch for vacuum: 2 m (Lead wire with connector) Pressure sensor assembly: 3 m (With lead wire) Symbol Nominal nozzle size 07 0.7 10 1.0 12 1.2 15 1.5 Symbol Body Exhaust type Symbol Note Silencer exhaust Silencer exhaust1 A Y V Cannot be selected when e is N Refer to page 18

ZSE40/ISE40

SET [N] H (Fixed hysteresis) = 3 digits H H ON ISA2 Window comparator mode OFF OUT1: Selection of the output mode NO n-1 n-2 IS High pressure (for positive pressure/compound pressure) High vacuum (for vacuum pressure) ZSM Auto Preset (For adsorption confirmation) PF2 1. Auto preset mode 2. Preparation for auto preset 3. Auto preset of OUT1 IF Data SET Press the SET button.

PSxx-OMU0005CN

N01 C4L C6L M50.8 R1/8 NPT1/8 4 mm 5/32 inch 6 mm () PBTCB156PPSO HNBR C3604 SUS304NBR POMSUS304NBRC3604 24 g 34 g 36 g 30 g 30 g +39 g 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0005CN-C M5 7 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4LC6L 4 A B C4L 17.5 8.2 C6L 18.3 10.4 -79No.PS-OMU0005CN-C A B -80No.PS-OMU0005CN-C 0.5~7 + 0.5~7 -81No.PS-OMU0005CN-C 2 (n ) <> <> 31n +3.5

NARM Series

stations) Regulator (Except manifold) (80 X n) + 23 Common IN 1 8 1 8 .13 (57) NARM1000 (79 X n) + 25 Individual IN 1 8 1 8 Common IN (188 X n) + 43 1 4 1 8 .3 (136) NARM2000 Individual IN (187 X n) + 45 1 8 1 8 Space Saving How to Order Option NARM 1000 A1 5 01 G 1 1 Set at 0.2MPa Note1) Pressure gauge for 1MPa is used.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 510.5 EXH port silencer Silencer is installd in the EXH port. 63 38 22 Dimensions 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 2.10-17 Series VQZ Body Ported Option Inch Size One-touch Fittings and Optional Thread

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Model VQZ100 VQZ200 VQZ300 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 Refer to page 4-14-3 for silencer for single valve unit. 4-14-17 18 Series VQZ Option Body Ported External Pilot Specifications Inch-size One-touch Fittings and Option Threads External pilot specifications are used when the operating pressure is below the minimum operating pressure 0.1 to 0.15 MPa or when valve is used

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11

Series 10-, 21- AW-B Filter Regulator

Model Option 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS AW62P-270AS Set nut Note 2) AR23P-260S AR33P-260S AR43P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Round type Note 3) Pressure gauge Note 4) Standard 10: G49-4-01, 21: G49-4-01-MS-X3 0.02 to 0.2 MPa setting Note 1) Assembly of a bracket