TABLE OF CONTENTS

SOL A SOL B SOL A SOL B CYL CYL EXH IN EXH IN SOLENOID B ENERGIZED SOLENOID A ENERGIZED SOLENOID A DE-ENERGIZED SOLENOID B DE-ENERGIZED NOTE: ALL PORTS OPEN WHEN BOTH SOLENOIDS ENERGIZED ALL PORTS CLOSED WHEN BOTH SOLENOIDS DE-ENERGIZED OPTIONS AVAILABLE: 3 WAY HI-PRESSURE VALVE HOUSING OPTIONS see page 78 COIL OPTIONS see page 79 MISCELLANEOUS OPTIONS see page 76 *STRAIN RELIEF CONNECTOR

Digital Pressure Sensor

GS 5 9 8 5 PS 36 3 22 22 ISA 3.2 ZSE1 ISE1 ZSE2 ISE2 1 M5 PT 40 ZSP ISl SET ALM. 20 kgf K P M b ZSM + _ PFl UNIT P.SET IFl 3.6-4

CA2

boot 2-P (Rc, NPT, G) 4-LD G G 4-J 2-cushion valve MM B1 Width across flats KA FV FY E D B e H1 AL B C f h + l l H A F N K N 9 FT S + Stroke FZ FX ZZ + l + Stroke ZZ + Stroke Stroke range (mm) A Bore size (mm) B B FV FD FX FY C AL B1 D E F FT FZ G H1 J Without rod boot With rod boot Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

CLQ

switch With auto switch Bore size (mm) A B A B 80 23 33 70 80 10 to 50 75, 100 33 32 Rod end nut 28.5 Double clevis type: CLQD32 10 hole H10 Shaft d9 5 4-M5 x 0.8 Cap bolt 52.7 A + Stroke CL + Stroke 20 14 10 7 32 B + Stroke +0.4 +0.2 18 36 0.1 0.3 Double clevis type (mm) Stroke range Without auto switch With auto switch Bore size (mm) A B CL A B 82 92 CL 102 23 33 92 102 10 to 50 75, 100

Compact Cylinder with Lock Series CLQ

switch With auto switch Bore size (mm) A B A B 80 23 33 70 80 10 to 50 75, 100 33 32 Rod end nut 28.5 Double clevis type: CLQD32 10 hole H10 Shaft d9 5 4-M5 x 0.8 Cap bolt 52.7 A + Stroke CL + Stroke 20 14 10 7 32 B + Stroke +0.4 +0.2 18 36 0.1 0.3 Double clevis type (mm) Stroke range Without auto switch With auto switch Bore size (mm) A B CL A B 82 92 CL 102 23 33 92 102 10 to 50 75, 100

MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

Air Cylinder NCA1 Series

1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 Only necessary for Item No 13, 15 and 26A S T Y L E Single Rod W Double Rod O P T I O N S ( I F A P P L I C A B L E ) XB5 _ For information on Bore Size, Rod and Rod Thread , please see How To Order Series NCA1 Replacement Parts.

CM2

port size P Spring return One-touch fitting port size P Spring extend NCA D-X 20Data MM LZ LX H1 LT H LH NN G LD Z AL F B1 LC Y A B2 D H2 I B K N NA P X Bore size (mm) 20 55 40 3.2 41 25 8 6.8 21 13 4 8 18 8 40 5 20 15.5 13 26 5 8 28 M8 x 1.25 15 24 M20 x 1.5 1/8 25 55 40 3.2 45 28 8 6.8 25 13 4 8 22 10 47 5.5 20 19.5 17 32 6 8 33.5 M10 x 1.25 15 30 M26 x 1.5 1/8 32 55 40 3.2 45 28 8 6.8

MLGC

A B B A B A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 4.5 8 6 10 9 3 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 4.5 8 6 10 9 3 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 5.5 9 7 11 10 4 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30) 23 (32) 19.5 (28.5) 40 10 13.5 35 37.5 38

MLGC

A B B A B A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 4.5 8 6 10 9 3 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 4.5 8 6 10 9 3 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 5.5 9 7 11 10 4 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30) 23 (32) 19.5 (28.5) 40 10 13.5 35 37.5 38

e-Rodless Actuator

Auto Switches/Proper Mounting Position at Stroke End Detection B A (mm) D-A9, D-A9V (mm) D-M9, D-M9V (mm) D-F9W, D-F9WV A A A B B B Operating range Operating range Operating range Nominal size 16 25 Nominal size 16 25 Nominal size 16 25 3 44 116 48 112 48 112 8 8.5 3.5 54 156 58 152 58 152 Auto Switch Mounting When mounting the auto switches, they should be inserted into the actuators switch

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

NCA1

1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 Only necessary for Item No 13, 15 and 26A S T Y L E Single Rod W Double Rod O P T I O N S ( I F A P P L I C A B L E ) XB5 _ For information on Bore Size, Rod and Rod Thread , please see How To Order Series NCA1 Replacement Parts.

Compact

W A B W A B W A B W 12 6.2 6.2 3.8 6.2 6.2 1.8 6.2 6.2 5.8 6.2 6.2 3.8 16 6.7 6.7 3.3 6.7 6.7 1.3 6.7 6.7 5.3 6.7 6.7 3.3 20 7.5 10 7.5 10 7.5 10 2 7.5 10 25 8 12 8 12 8 12 8 12 Auto Switch Mounting Height U [mm] Auto switch model Bore size D-M9V, D-M9WV, D-M9AV U 12 19.5 16 21 20 23 25 24.5 W A B A Operating Range [mm] Auto switch model Applicable bore size 12 16 20 25 D-M9m(V)/

Thermo-chiller

9 Water-cooled refrigeration . p. 11 Cooling Capacity. p. 13 Pump Capacity. p. 13 Dimensions. . p. 14 Parts Description. p. 14 Recommended External Piping Flow. . p. 16 Cable Specifications. p. 16 Operation Display Panel. . p. 17 Alarm. p. 17 Communication Functions. p. 18 Options. p. 19 Optional Accessories. . p. 20 VCooling Capacity Calculation Required Cooling Capacity Calculation. p.

RSH/RS1H

Note 2) The figure shows an extended piston rod. 10-9-10 10 Heavy Duty Stopper Cylinder Series RSH/RS1H Proper Auto Switch Mounting Position Auto switch B A RE A B REC CX CY Proper Auto Switch Mounting Position D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W Auto switch models MQQ M D-Y69 D-Y7PV D-Y7WV D-Y7BAL RHC Bore size (mm) A B A B A B MK(2) 20 8(6.5) 18 18 9.5 18 2 32 10.5(9) 13.5 13.5 12 13.5 4.5 RS

RSH/RS1H

G D A Q Rear pressure port Front pressure port B WB W (width across corners I) E (mm) Bore size (mm) N CD CT CZ D E FT FX FZ G H I L O P Q R B A Stroke 50 30 225.5 103.5 20 8 35.5 32 64 20 73 93 16 122 85 44 9 1/8 10 36 14 depth 5 63 246 106 20 10 44.5 40 77 25 90 114 24 140 103 53 11 1/4 12.5 43 30 18 depth 6 80 299.5 135 25 10 44.5 50 98 25 110 138 28 164.5 132 54 13 1/4 12.5 49 40 20 depth

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

3, 5 port 1/4, 3/8 1 port 9 1/4, 3/8-2 port 2, 4 port 1/8 12 port 1/8 14 port VQ7 VV71-(M Connector type) EVS VFN 100 80 100 80 37 23 U-side 9 2n-1/4, 3/8 14 9 U-side 15 PE port Indicator light Manual override R 4.5 R 4.5 53.5 53.5 9 9 38 9 B B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B (2n 1/8) 4n-1/4, 3/8 2, 4 port PA L-side R-side

VZS

Passage Porting specifications Symbol 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common 1 K plug connector 3-7-15 16 Series VZS2000 How to Order Manifold Assembly Manifold Specifications Porting specifications 4(A), 2(B) Port 1(P), 5(R1) 3 (R2) Port size Rc 4(A) 2(B) Stations Please indicate manifold base type, corresponding valve, and option parts.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 200 to 1000 150 to 1000 150 to 700 150 to 700 866 Sine Cylinder 1011-REC 1011Rod flange (F): RECF 2 x P (Rc, NPT, G) H2 Width across flats B2 2 x NN G Relief port M5 x 0.8 G I Width across flats B1 H1 Standard port Relief port Eh8 D FY B MM AL K NA FT 4 x 7 A FX Mounting hole N Z N F FZ S + Stroke H ZZ + Stroke 40 Standard port Relief port (mm) H G FZ