Nozzle Type Ionizer Make sure to ground. +24 V +24 V Brown + 24 VDC Brown + 24 VDC +24 V Power supply 24 VDC +24 V Power supply 24 VDC Blue 0 V Blue 0 V 0 V 0 V F.G. F.G. Make sure to ground. Make sure to ground.
A DB BN BP BO DC eO eE F GA GB GC GO 10011500 50 136 Bore Size Stroke r.naecmm) (mm) WHhoot boot WHh boot GL GR J K MM 27 30 60 96 V V 44 16 32 10 as 15 26 54 40 500 20500 50 600 20-600 10 10 M8X1 .25 6 M14X1.5 32 35 70 108 V 'I, 52 20 40 10 95 17 27 59 32 35 86 11 5 V V 64 20 40 10 102 17 , 26 67 13 12 M8X1.25 7 M18X1.5 63 600 20-600 18 15 M10X1 .25 7 M18X 1.5 37 40 102 129 V V 78 25 52
EX245-DY1 4M12(5 ,) (n+1) (n) FE/ 24 V(/) 0 V(/) 24 V(/) 0 V(/) FE . 8-3 EX245-DY1 55 No.EX-OMW0014CN-A 9.
12 V Body size Port size Rc Option Symbol P/A port R port B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Symbol Mounting Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note
H2 L3 L2 L1 All Ports: Screw-in Model H1 H2 H3 L1 L2 L3 L4 Connection thread 1 Connection thread 2 Connection thread 3 ZH05DA-01-01-01 12 12 12 67 42.5 27 26 Rc1/8 Rc1/8 Rc1/8 ZH07DA-01-01-01 70.2 ZH10DA-01-01-01 76.4 ZH13DA-01-02-02 17 17 90.8 51 29.5 36.3 Rc1/4 Rc1/4 ZH15DA-02-03-03 17 19 19 108.2 63.3 34.3 37.1 Rc1/4 Rc3/8 Rc3/8 ZH18DA-03-03-03 19 131.1 73.6 41.1 39.1 Rc3/8 ZH20DA-03-04
*Order part numbers for auto switches alone are D-M9BW(V)L-900, D-M9BW(V)SDPC-900, D-Y7BW(V)L-900, D-Y7BW(V)SDPC-900 and D-Z80L-900. *The auto switch is shipped together but not assembled.
There is a danger of malfunction or damage to the reduced wiring system or input/output equipment. +24 V +24 V Power supply for output Power supply for output 0 V 0 V Power supply for control/input +24 V Power supply for control/input 24 V 4. Do not install a unit in a place where it can be used as a foothold.
range 1 2 5 10 25 50 100 200 01 Rc1/8 V V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight V V V V V V V V S Yes Straight V V V V V V L None Rear ported V V V V V V V V W Yes Rear ported
(Manifold base) SYJ7120-5G-01 . 2 pcs. (Valve) SYJ7000-21-1A .1 pc. (Blank plate ass'y) PSS5YJ7-41-03-01 . 1 pc. (Manifold base) SYJ7140-5LZ .1 pc. (Valve) SYJ7240-5LZ .1 pc. (Valve) SYJ7000-21-1A .1 pc.
0 V V CANL FG BS + BS 24 V 0 V BDH BDL BS + BS 24 V 0 V BDH BDL CANH V + 24 V 0 V V CANL CANH FG V + Slave unit 75 Slave unit 03 Slave unit 01 Master unit S2 S1 S2 S1 S2 S1 S2 S1 V BDH Master Connector with terminal resistor SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Type 3 ground Type 3 ground Type 3 ground Type 3 ground CANH V + Connect the shielding wire to the SD
(Manifold base) SYJ712-5LZ-01 .2 pcs. (Valve) SYJ700-10-2A .1 pc. (Blank plate ass'y) VQZ SS3YJ7-42R-03-01 .1 pc. (Manifold base) SYJ714R-5G .2 pcs. (Valve) SYJ700-10-2A . .1 pc.
VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .
Instruction to perform the Return to Origin operation 4 01 05 001A FF00 01 05 001A FF00 sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.
Rated voltage Voltage symbol Part number 24 VDC 24 V SY100-61-3-05 12 VDC 12 V SY100-61-3-06 100 VAC 100 V SY100-61-2-01 200 VAC 200 V SY100-61-2-02 110 VAC 110 V SY100-61-2-03 220 VAC 220 V SY100-61-2-04 Circuit Diagram with Light AC circuit DC circuit Caution When making connections, take note that using other than the supported size (3.5 to 7) heavy-duty cord will not satisfy IP65 (enclosure
type A port: Rc 1/8 V100 S070 Common SUP/Individual EXH VQD How to Order Type 21: Body ported (A port top ported) Applicable solenoid valve VK332--M5(-Q) VK332--01(-Q) VV3K3 05 21 VQD-V A port: Rc 1/8, M5 x 0.8 VK VK Applicable blanking plate assembly VK300-42-1A Valve stations P, R port thread type 01 1 station VT Nil Rc G NPT NPTF CE-compliant 20 20 stations 00F 00N 00T Q CE-compliant
SYJ71 R 2 4 SYJ72 R 2 4 Standard With power saving circuit 0.35 (With light: 0.4 (DIN terminal with light: 0.45)) Power consumption (W) DC (A) 2 (A) 2 0.1 (With light only) X X 1.4 (With light: 1.5) 100 V 110 V [115 V] 200 V 1.6 (With light: 1.7) [1.7 (With light: 1.8)] 1 (P) 3 (R) 1 (P) 3 (R) Apparent power (VA) AC 2.3 (With light: 2.4) 2.5 (With light: 2.6) [2.7 (With light: 2.8)] 220
AW20P-270AS AR20P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N Note) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N Note) Set nut Round 1.0MPa Note 2) Note 3) Pressure gauge Square embedded type Round 0.2MPa Note 3) Square embedded type N.O. N.C.
8 P port: Rc 1/8 F N T G S070 1 8 NPT 01 Rc C6 6 cassette B port: Rc 1/8 A port: Rc 1/8 NPTF Note) Applicable only for DIN terminal type VQD VQD-V Common SUP/Common EXH Type 21: Body ported (A, B port top ported) How to Order Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) VK VK A port: Rc 1/8, M5 x 0.8 A, B port: Rc 1/8, M5 x 0.8 VV5K3 21 05 VT VK3120
Setting range: MT.01 to MT.05 (Initial value: MT.01) Contact output signal 3 Select function 21. Press the [] key. Displays screen for setting the function of the Contact output signal 3.