Rotary Table/Rack & Pinion Style Series MSQ Standard type For 90 For 180 Positioning pin hole Positioning pin hole Counter-clockwise 3 3 A port A port A port 3 22.5 3 22.5 84 e 96 ng e 3 ra ng on ra ti B port n ta 3 90 tio 4 ro 7 ta m 1 Clockwise ro e e u s i g m w 3 m k n C c l o 6 ni a u 8 r Mi im n 1 3 o ti e ax ta ng ro M m u ra m ni Mi 180 n tio e C ta s l i o w c ro k m mu xi Ma Positioning pin hole Positioning pin hole Position
(inch) Connection thread M R Model H (Width across flats) L A M Min. port size KQ2H01-M5 KQ2H07-M5 KQ2H01-M5
Note) ( ): Long stroke 1-7-8 Standard: Double Acting Single Rod Series CG1 With Mounting Bracket Axial foot (mm) ZZ Z Bore (mm) LX Y X B LC LD LH LS LZ M W LT Without rod boot With rod boot Without rod boot With rod boot 67+l 74+l 75+l 83.5+l 95.5+l 95.5+l 104+l 104+l 20 25 32 40 50 63 80 100 4 4 4 4 5 5 6 6 6 6 45 (53) 3 3 3 3 32 36 44 54 66 82 7 7 8 15 15 16 34 20 44 49 58 71 86 3 10 10
Low speed cylinder Specifications Magnetically coupled rodless cylinder Guide cylinder Air cylinder/Standard Free mount cylinder Dual rod cylinder Compact guide cylinder Applicable cylinder Compact slide Platform cylinder Compact cylinder Compact cylinder Slide unit Slide bearing M L M L M L CXTM L CJ2 CM2 CG1 MB CU CQ2 CQS CY1 MGP MGGM MGCM CX2 CXW CXS MXU Series Action Double acting, Single
Cable length 1.5 m 3 m VVFS2000-30A-3 5 m VVFS2000-30A-4 7 m Component parts Assembly part no. Cable length 1.5 m 3 m VVZS3000-21A-3 5 m VVZS3000-21A-4 8 m Component parts VVFS2000-30A-1 VVFS2000-30A-2 VVZS3000-21A-1 VVZS3000-21A-2 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.
kit with 0.6 m lead wire L kit with 1.5 m lead wire Lead wire housing assembly 16 L kit with 3.0 m lead wire M kit, 26 pins Circular connector housing assembly 17 32 Series VS 8-2/VS 8-4 S R S R Manifold Component Part No. !
L plug connector (L) VQ 2.0 3.0 M plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.
(Opposite side: Same) Data N (I) (L) (Z) W C (mm) A B C D E F G H I J K L M N OO NN P Model 2-5.5 through 2-M4 x 0.7 thread depth 6 2-M5 x 0.8 thread depth 7.5 2-M5 x 0.8 thread depth 8 CXS20 64 25 62 23 50 28 6 12 12 30 10 M6 x 1.0 x 18.5l 53 11.5 2-M5 x 0.8 2-9.5 counterbore depth 5.3 2-6.9 through CXS25 80 30 78 28 60 35 6 12 12 30 12 M6 x 1.0 x 18.5l 64 14 2-M6 x 1.0 2-11 counterbore
0 Transfer load m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 252 2 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH2BD Scale: 25% F G x I 5H9 +0.030 0 depth 5 +0.030 0 depth 5 D-5.1 through 5H9 10 7.5 E-M5 thread depth 10 Refer to Cross section
L D-A73 (Example) CS1 Lead wire length C76 5 m None Nil L 0.5 m 3 m Z N C85 Applicable for the connector type (D-C) only.
L M Effective orifice(mm 2) Nylon Urethane Connection thread R(PT) M5 Applicable tube O.D.
0 to 100kPa R(PT) 1/8, M5 X 0.8 L NPTF 1/8, M5 X 0.8 Note) M5 X 0.8 (female) thread.
Lead wire length symbols: 0.5 m Nil 1 m M 3 m L 5 m Z (Example) M9NW (Example) M9NWM (Example) M9NWL (Example) M9NWZ Since there are other applicable auto switches than listed, refer to page 167 for details. For details about auto switches with pre-wired connector, refer to pages 1784 and 1785.
OPTIONS AND AUXILIARY EQUIPMENT (3) Outline drawing (a) EMC filter HF3010A-UN [Unit: mm] 3-M4 4-5.5 7 3-M4 M4 32 2 110 4 85 2 IN Approx.41 258 4 65 4 273 2 288 4 300 5 HF3030A-UN HF-3040A-UN 6-K 3-L 3-L G 1 F 2 E 1 D 2 M J 2 C 1 C 1 H 2 B 2 A 5 Dimensions [mm] Model A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25, M5 M4 length 8 HF3040A-UN 260 210 85 155 140 125
Center/Pressure Center VZ3320 Grommet (G), (H) VZ3 20-M5 G H 3 4 5 VZ3420 VK Manual override (Non-locking) VZ3520 VZ (Lead wire length) (Mounting hole for manifold) VF G: 300 mm H: 600 mm VFR VP4 VZS VFS VS4 (Mounting hole) VQ7 2-M5 x 0.8 (PE port) EVS VFN (Piping port) L plug connector (L) VZ3 20-L-M5 M plug connector (M) VZ3 20-M-M5 3 4 5 3 4 5 300 (Lead wire length) 300 (Lead wire length
Low speed cylinder Specifications Magnetically coupled rodless cylinder Guide cylinder Air cylinder/Standard Free mount cylinder Dual rod cylinder Compact guide cylinder Applicable cylinder Compact slide Platform cylinder Compact cylinder Compact cylinder Slide unit Slide bearing M L M L M L CXTM L CJ2 CM2 CG1 MB CU CQ2 CQS CY1 MGP MGGM MGCM CX2 CXW CXS MXU Series Action Double acting, Single
Low speed cylinder Specifications Magnetically coupled rodless cylinder Guide cylinder Air cylinder/Standard Free mount cylinder Dual rod cylinder Compact guide cylinder Applicable cylinder Compact slide Platform cylinder Compact cylinder Compact cylinder Slide unit Slide bearing M L M L M L CXTM L CJ2 CM2 CG1 MB CU CQ2 CQS CY1 MGP MGGM MGCM CX2 CXW CXS MXU Series Action Double acting, Single
Unit AC10 to 60 Dimensions Pressure gauge port size AC10, 20 P G A Q E F L C B H OUT IN T H L J OUT Pressure gauge (Option) K M Square embedded type pressure gauge (Option) N Port size Lubricator Regulator Air filter Drain Min. clearance for maintenance D AC25, 30, 40, 50, 55, 60 Pressure gauge port size A P G E F Q L H B C OUT IN T H L OUT Pressure gauge (Option) K M Square embedded type
side Cable description M B E Motor cable Lock cable Encoder cable A Cable type S R Standard cable Robotic cable Counter axis side Cable length (L) [m] 2 5 A 2 5 10 B LE-CSM-;;: Motor cable (13.7) SSCNET III optical cable (30) L LE CSS 1 LE-CSB-;;: Lock cable Motor type (11.8) (13) Cable length S AC servo motor L K J 1 3 0.15 m 0.3 m 0.5 m 1 m 3 m L (29.6) Cable description S SSCNET III optical
kit with 0.6 m lead wire VVQC1000-L25-1-1 L kit with 1.5 m lead wire VVQC1000-L25-2-1 L kit with 3.0 m lead wire 16 Circular connector housing assembly VVQC1000-M26-1 M kit, 26 pins 639 VQC4000 Series D-side end plate assembly Manifold Assembly Part No.