5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

, M5 60.3 C3: One-touch fittings for 3.2 Manual override C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (C3,C4,C6) 47.5 9.5 (M5) 26.5 25.5 5.4 18.5 5 23.2 Mounting holes 10 (47.5) 3-M5 X 0.8 P, R port 9.9 9.9 5 1 3 2-PE port 22.2 Die cast hole For manifold gasket positioning L plug connector (L): VQZ122 wLwC3, C4, C6, M5 0 1 M plug connector (M): VQZ122 wMwC3, C4

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D L P Z E F G H I K1 K2 Th9 J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 3.5 25 1.5 32 5.2 5 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 1.5 6 3.5 29 38 6 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 2 8 4.5 36 47 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

Modular F.R.L. Unit

Unit AC10 to 60 Dimensions Pressure gauge port size AC10, 20 P G A Q E F L C B H OUT IN T H L J OUT Pressure gauge (Option) K M Square embedded type pressure gauge (Option) N Port size Lubricator Regulator Air filter Drain Min. clearance for maintenance D AC25, 30, 40, 50, 55, 60 Pressure gauge port size A P G E F Q L H B C OUT IN T H L OUT Pressure gauge (Option) K M Square embedded type

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

M5 Note 4) (68.4) 57.3 PE Vacuum (V) port (M5) Note 4) 20.3 29.4 P V 9.7 Exhaust part 17.7 22.8 0.8 87.2 Note 1) 10 Circuit diagram 5 6 E F Note 1) The above dimensions are for ZQ1 1U-K2 L-F .

Valve Single Unit

A: Orange B: Green SX M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) 3 4 5 3 4 5 L plug connector (L): SX5 40(R)-L 02 M plug connector (M): SX5 40(R)-M-02 Manual override (Press and turn for the locking type.)

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3140-L-M5 M8 connector (W0): SYJ3140-W0-M5 M plug connector (M): SYJ3140-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to the page

4/5 Port Air Operated Valve Series SYJA3000

60.2 [62.4] 59.6 [61.8] 37.5 (DIN 38.7) 38.1 (DIN 39.3) 87.2 [91.6] 103.2 [107.6] R P P R B B B B B 21 7 35 17.5 A A A A A 20.9 (DIN 22.1) (DIN 6.7) 1/8 (P, R port) 3.5 5.5 (Pitch) P = 16 18 Built-in speed controller (Station 1) (Station n) Max. 13.5 47.5 (Light/Surge voltage suppressor) 52.6 [59.6] + + + 37.2 A A 18.5 5.5 24 B B (Pitch) P = 16 23 M5 x 0.8 (A, B port) L plug connector (L

Table of Contents

P kit Series VQ1000 P. 2-4-76 P. 2-4-78 P. 2-4-80 P kit 2-4-4 5 Manifold Variations C S L Port size kit kit SUP EXH port Cylinder port Lead wire Serial transmission unit VQC P, R A, B SQ Direct electrical entry type Enables single-wire solenoid valve-PLC operation VQ0 L VQ4 C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

7.5

Connector manufacturers: P Hirose Electric Co., Ltd. P Sumitomo 3M Limited P Fujitsu Limited P Japan Aviation Electronics Industry, Ltd. P J.S.T. Mfg. Co., Ltd. D-sub Connector Cable Assembly Electric Characteristics Cable length (L) Item Characteristics Assembly part no.

Table of Contents

Dedicated Controller/LC1 P.73 Controller setup software P.80 Dedicated teaching box P.82 Options P.85 Dedicated Regenerative Absorption Unit/LC7R P.86 Non-standard Motor Compatible Drivers P.89 73 2 Series LC1 Controller Single Axis Type Built-in AC Servo Driver Series LTF: Standard Motor Compatible How to Order 2V LC1 F 1 H 1 L 3 Number of axes Mounting bracket 1 3 5 1 axis M3

Stability of suction position,

Formula examples with beams (Reference) L a b L a b L L L/2 L/2 L/2 L/2 Load/Shape conditions P P P P A C RA RB B A C RA RB B C A E D B RA RB RC RA=Pb/L RB=Pa/L W=P Formula (Reactive force: R, Total load: W) RA=RC=5Pb/16 RB=11P/8 RA=RB=P/2 W=P Mounting Position The basic mounting method is a horizontal lift.

CJ2

M4 X 0.7 NTJ-010A M5 X 0.8 NTJ-015A Refer to p.1.3-12 for details of the mounting nut.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

] + 35.6 28.5 26.1 R1 P R2 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3140-L-M5 M8 connector (WO): SYJ3140-WO-M5 M plug connector (M): SYJ3140-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14

Free Mount Cylinder

through Bleed port M5 x 0.8 (32: Rc 1/8) Rod End Nut/Accessory Width across flats L Material: Carbon steel 2-P through Part no.

ZP

ZL D G: M4 x 0.7 G: M5 x 0.8 G: M5 x 0.8 G: M6 x 1 G: M8 x 1.25 ZY A B Y Model C D E K A B K L Y Model C L F F F D ZPY20B ZPY25B ZPY06B ZPY08B 25 28 18.9 37 14 10.5 10.5 20 25 22 27 23.5 24 33.5 34 51.5 52 12.4 15.6 6 8 7 9 3.3 4.7 9.1 10.1 2.5 4 5 4 ZQ 5 6 8 32 34 29 39 57 ZPY32B Applicable Tubing Applicable Tubing ZF Q R Applicable tube P Q R Applicable tube P N4 (Nylon tube, 4/2.5) N6

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

4 2 22 10 SMC SMC B A 3 1 5 Cover diameter 1.6 Cross section 0.34mm2 Manual override 42 36 3 M5 X 0.8 External pilot port (Only external pilot style(R)) (47.5) 46.5 40.5 A, B port R1 R2 20 14.6 12 10 10 P 7.2 M5 X 0.8 (Not applicable to standard model.) 5-Rc(PT)1/8 (P, A, B, R1, R2 port) 2-PE port 1.1 13.4 13.4 0 1 0 1 L plug connector (L): VQZ125 (R)lLl01 M plug connector (M): VQZ125 (R

24

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Wiring (Output) Type Special function Electrical entry M9NV M9N P P P p p IC circuit 3-wire (NPN) 5 V,12 V 3-wire (PNP) M9PV M9P P P P p p 2-wire 12 V M9BV M9B P P P p p Solid state auto switch 3-wire (NPN) 5 V,12 V M9NWV M9NW P

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

M5: M5 thread 4 2-C6 3(R) EXH port 80 (L plug connector) 86 (M plug connector) 92 (L plug connector) FG R2 R1 SG S2 S1 0V 24V SMC ERR RUN TRD R R 49.3 23.2 5.5 35 ADDRESS 8 4632 D F 6 20.2 SA MODEL 4 2 12.2 P P 3 2-C6 1(P) SUP port DIN rail clamp screw L3 L4 57 (M plug connector) Indicator light 51 (L plug connector) Applicable connector: Flat ribbon cable connector (26P) (Conforming to

Rubber seal 5 Port Solenoid Valve Series SYJ5000

3.5 11 5 B A B A 10.6 19 10 M5 x 0.8 (A, B port) Manual override 2-2.6 (For monifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" : 6, 1/4" (3.2) 32.3 (Light/surge voltage suppressor) + 23 20 2-2.6 (For mounting) 11 3 28.1 [35.1] 12.7 P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 1.4 (PE port) 21 L plug connector (L): SYJ5 20-L-M5 3 4 5 M plug connector (M): SYJ5 20-M-M5

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.