3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

plug connector (M) (A) 2 1 (P) 3 (R) M plug connector (M) N.O.

Compact Guide Cylinder Series MGQ

74 19 17 26 M5 x 0.8 13 M5 x 0.8 7 18 60 Rc1/8 NPT1/8 G1/8 G1/8 20, 30, 40, 50, 75, 100 125, 150, 175, 200 12 42 11.5 9 88 21 21 32 M6 x 1.0 15 M6 x 1.0 8 26 70 Rc1/8 47.5 37.5 NPT1/8 Bore size T TA TB U V W X YY YL Z S (mm) 12 16 20 25 22 56 2 5 36 40 5 50 M4 x 0.7 7 12 25 62 38 42 7 54 M5 x 0.8 8 13 2.5 5.5 30 72 46 52 10 64 M5 x 0.8 8 13 2 4 38 86 56 62 10 76 M6 x 1.0 9 14 2 2 MGQM (Slide

Mechanically Jointed Rodless Cylinder Series MY2

Coordinates and Moments z MY1B M3: Yawing MY1M MY1C MY1H MY1HT M1: Pitching y MY1W x M2: Rolling MY2C Static Moment MY2H MY3A MY3B Ceiling mounting Horizontal mounting Wall mounting MY3M M2 M1 M3 M2 M1 M2 y z X x Y X Z y X x Y m3 x g x m1 x g m2 x g Vertical mounting Mounting orientation Ceiling m2 Wall m3 Vertical m4 Horizontal m1 Note) Static load m M3 m1 x g x X m2 x g x X m4 x g x Z

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

0.7 depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 Up to 300 301 to 1500 (mm) Female rod end With air cushion (mm) ZZ Stroke range ZZ Bore size Bore size GA RA S WA WH A1 MM H Rubber Air Standard Long 22 26 26 205 242 242

Integrated Controller

FV M FZ FX FT FX FZ 4 x FD FT 4 x FD The head flange type is not available for the EQY32.

Electric Actuators

: Nil (Top entry) Rod operating range Note 1) 2 x M5 x 0.8 thread depth 9 [1] 1 20 Motor cable length 300 2 x 5 Origin Note 2) Stroke end [Origin] Note 3) 20 [Stroke end] M5 x 0.8 thread depth 9 Manual override screw 21 42 28 12 Note 5) 28 Motor cable mounting direction: L (Entry on the left side) A 7 12 Stroke L2 L1 Mounting surface 18 5.5 12 Note 5) Motor cable mounting direction: U (Bottom

AC Servo Motor Driver (Network card type ）

or less above sea level(note7) Vibration resistance 5.9 m/s2, at 10 Hz to 55 Hz (directions of X, Y and Z axes) Mass [kg] 1.0 1.4 1 6 1.

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 4.3 7.4 7.4 17.7 37.2 2.9 5.9 5.9 17.7 37.2 10 12 12 16 20 7 10 10 15 20 Model Applicable bolts Max. tightening torque (Nm) Max. screw-in depth (Lmm) MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D M5 x 0.8 M6 x 1 M6 x

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 M5 x 0.8 M3 x 0.5 10.5 16 M6 x 1.0 M4 x 0.7 11.5 20 M8 x 1.25 M5 x 0.8 13.5 25 M10 x 1.25 M6 x 1.0 16.5 30, 40 M14 x 1.5 M8 x 1.25 22.5 Clevis pin d Dd9 m m l t L t Applicable bore size (mm) Applicable snap ring Part no.

Clamp Cylinder with Lock

F Shaft: 12H8 Z + Stroke 27 40 97 57 ZZ + Stroke (mm) Bore size Symbol BX BY D F GA IA K L M MA N NA W WA Z ZZ Hs 40 50 63 56 64 74 54 64 74 16 20 20 44 55 69 77 78.5 82 47 58 72 14 17 17 55 58 58 M12 x 1.5 M16 x 1.5 M16 x 1.5 M4 x 7 M4 x 7 M5 x 7 86 87.5 91 51.5 52.5 53.5 5 5.5 5.5 12.5 14 19 114 118.5 122 226 230.5 234 46 51 58.5 Extension locking (F) Dust cover MA 3 x Rc1/4 Retraction

Dual Speed Controller with One-touch Fitting Series ASD

Flow Direction Symbols on Body Meter-out type Meter-in type Symbol JIS Symbol 15-9-67 Series ASD-FM How to Order ASD 3 3 0 F M 01 06 S With seal M5 and U10/32 types, as they are not available with seal. Body size 2 3 4 M5 standard 1/8 standard 1/4 standard Type Applicable tubing O.D.

PSxx-OMM0006CN

M ISE40A 2 K ISE40A -0.11.000 MPa ZSE40A 0.0-101.3 kPa ZSE40AF -100.0100 kPa 1 01 R1/8 (M5) A A N01 NPT1/8 (M5) W1 Rc1/8 B B WF1 G1/81 D D M5 M5X0.8 () E C4 4 C6 6 F + 1IS0228-1 P10/1 X NPN2() Y PNP2() 1 R NPN2 +/ T PNP2 +/ M SI2 P (psi)1 S NPN2 +/ 1 2kPaMPa V PNP2 +/ -9No.PS-OMM0006CN-E /1 1 01 N01 W1 WF1 M5 C4 C6 A A ZS-24-A X X X B B ZS-24-B X X X X X D D ZS-24-D X X X ZS

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

M5 x 0.8 Port 2 M5 x 0.8 Note) 10-V114(A) and 10-V124(A) cannot be mounted on the same manifold.

Solid State Auto Switches

x 0.8 x 16 M5 x 0.8 x 20 M5 x 0.8 x 25 ( ): Denotes the values of D-A44C Dimensions (mm) D-A3C D-A44C 2 x M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland 2 x M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland G 1/2 G 1/2 4 x Z 4 x Z (Applicable cable O.D. 6.8 to 9.6) (Applicable cable O.D. 6.8 to 11.5) Hexagon socket head cap bolt Hexagon socket head cap bolt Indicator

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

KQB2 Universal tee M5 female x M5 female x M5 male Body rotates at 360 around the stud axis 4/2.5 x M5 MS-5UT MS-5AU-4 KS KX For soft nylon and polyurethane tube P.338 KM Push For reducing Rc 1/8 female to M5 female R 1/8 x M5 female 6/4 x M5 MS-5B MS-5AU-6 KF P.338 P.339 M Barb elbow for soft tube Plug Body rotates at 360 around the stud axis For soft nylon tube 3.18/2.18 x M5 Use to plug

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

x 0.8 1/8 1/4 MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C 3.3 5.4 32.5 M 7 9 13 B 6.5 9.5 14 LW 83 123 161 A 80 105 165 (LL) 40 49.6 75 LE 4 5 6 NC 14 21.3 32.4 NT 3.5 5.3 6.5 NE 27 35.5 56.5 NH 2 3 4 NX 5.8 8.5 10.5 NW 48.2 71.8 82.1 NV 3.4 5.5 6.6 Model MY2H16G

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

13.6 15.1 5.5 9.6 7 AS12l1FSGl-U10/32-23 AS12l1FSGl-M5-04 4 8.2 AS12l1FSGl-U10/32-04 AS12l1FSGl-M5-06 6 10.4 18.6 23.1 16.5 8 AS12l1FSGl-U10/32-06 M5 x 0.8 10/32UNF 8 9.4 Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS12l1FSGl-M5

Compact Type

x 0.45 x 6 L (Hexagon socket head cap screw) M3 x 0.5 x 12.5 L (Hexagon head bolt) M3 x 0.5 (Hexagon nut) (12) (5 + Stroke) 2.75 2-M3 x 0.5 through 25 0.2 4 10 Series CXSJ Dimensions: 10 Standard Piping 4-M3 x 0.5 thread depth 4.5 16 12 + Stroke 3.5 8 7.5 2-M5 x 0.8 thread depth 4 (Piping port) 28.5 8 Stroke 15 56 + Stroke 8 3.5 13 1 44.5 + Stroke M5 x 0.8 x 4 L (Hexagon socket head set

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

34 18.5 12.6 9.2 35 4.5 7.5 29h9 29.5h9 14H9 5.3 2.5 4.2 10 3.3 6 3.5 2.2 5.3 4 M5 x 0.8 M4 x 0.7 3 5.5 38 23 15.5 10.5 40 4.5 9.5 33h9 34 h9 17H9 5.3 2.5 4.2 10 4.2 7.5 4.5 2.5 6 4 M5 x 0.8 M5 x 0.8 7 5.5 45 30 18.4 12.2 50 5 7 39h9 40 h9 20H9 6.5 2.5 4.5 11.5 4.2 7.5 4.5 2.5 6 5 (mm) JJ M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 JK JU M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 P M3 x 0.5 M3 x 0.5 M3 x

New

P 1 (IN), 2 (OUT) port 2 x M5 Thread depth N B 2 x P 1 (IN), 2 (OUT) port 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal F Cable 6 to 12 Q D D S G1/2 Qp2 F 34 (44) 31.5 32 R 25 T C K C R E E Sp2 A A B1 2 x P 1 (IN), 2 (OUT) port B1 2 x P 1 (IN), 2 (OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H J H G1/2 (mm) Grommet Grommet (with surge Dimensions Size Port