Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Example) For M3: L1 = 6 mm Applicable shaft type: W Applicable shaft type: W L1 +( 3 x P) Q1 = M (mm) L1 = Q2 Y Size (mm) Y = 15 Q1 X M3 1.5 to 9 Size 15 20 M3 4 to 18 M3, M4 1.5 to 10 L2 + (3 x P) 20 30 M3, M4 4.5 to 20 M3, M4, M5 2 to 13 X = L2 = 30 40 M3, M4, M5 5 to 22 M3, M4, M5 4.5 to 15 Q2 = M Symbol: A3 Symbol: A4 The short shaft can be further shortened by machining male threads

SYJ300/500/700

P, R port thread type S 20 20 stations A A X port (External pilot type) M5 x 0.8 A port size Nil Rc X P R A port M5 x 0.8, C4 R port M5 M5 x 0.8 + + + + F G 1/8 C4 4 One-touch fitting A A P port X P R N NPT P port 1/8 N3 5/32" One-touch fitting 1/8 T NPTF X port (External pilot type) M5 x 0.8 R port A port M5 x 0.8, C4 Note) For more than 8 stations, supply/exhaust air to/from both sides

AC

Q[l/min(ANR)] = X X 60 X C X D2 X W 4 X 106 (P2 + 0.101) 0.101 Q[l/min(ANR)] = X X 60 X 1 = 841 X 1002 X 200 4 X 106 (0.8 + 0.101) 0.101 Refer to p.1.13-2 for flow rate characteristics table. Select booster regulator size from flow characteristic stable.

Modular Design with Uniform Body Style

Series Body size Details 20 30 40 50 60 AF p. 61 AFM AFD p. 71 AR(K) p. 79 AW(K) p. 98 AL p. 89 2 A Modular F.R.L.

0.4

Load factor: ((Load mass x 9.8)/Theoretical force) x 100% Conditions Series Conditions CJ2 series CM2 series MB, CA2 series T0604 (O.D. 6/I.D. 4) x 1 m Tube x Length VQC1101 Speed controller AS3002F-06 AN15-C08 Silencer T0806 (O.D. 8/I.D. 6) x 1 m Tube x Length VQC2101 Speed controller AS3002F-08 AN20-C10 Silencer 542 I N D E X P.538 P.540 P.542 P.544 P.550 P.556 Features Variations Cylinder

SX

Valve Rc 1 8 Rc 1 4 Rc 1 8 Rc 1 4 A, B port location P, EA, EB port Rc 1 4 M5 x 0.8 C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C4 (One-touch fitting 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Port size C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) A, B port SV Manifold base weight W (g) n: Stations W = 19n + 45 W = 43n + 77 W = 51n + 81 SZ Note

Air Cylinder

CA2 Bore size MM NA P S TA TC** ZZ WA W WH 20 M8 x 1.25 24 M5 x 0.8 77 11 M5 x 0.8 147 16 25 1.5 25 M10 x 1.25 29 M5 x 0.8 77 11 M6 x 0.75 157 16 25 1.5 32 M10 x 1.25 35.5 Rc1/8 79 11 M8 x 1.0 159 16 25 1.5 40 M14 x 1.5 44 Rc1/8 87 12 M10 x 1.25 187 17 20 1.5 50 M18 x 1.5 55 Rc1/4 102 13 M12 x 1.25 218 18 20 3 63 M18 x 1.5 69 Rc1/4 102 13 M14 x 1.5 218 18 20 3 80 M22 x 1.5 86 Rc3/8 122

Air Cylinder

N L Axial foot: CBM2L Bore size Stroke 4 x LD 2 x LC LH B CJ1 X Y Z Y X LT CJP ZZ + Stroke LS + Stroke LZ LX Rod flange: CBM2F Bore size Stroke * -H -R -W CJ2 N L Head flange: CBM2G Bore size Stroke -H -R -W N L JCM 4 x FD Mounting hole 2 x FD C2 CM2 CM2 Mounting hole FY CM3 B FX FZ FT Z + Stroke CG1 FT Z 20 to 32 40 CG3 Single clevis: CBM2C Bore size Stroke -H -R -W N L CD JMB MB MB1

Aluminum High Vacuum Angle Valve

x 10-9 Nil A B C None w, e w e Seal material XSA 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) XVD Note 1) Values at normal temperature, excluding gas permeation.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

(Pitch) With external pilot specifications P = 10.5 13.5 46.7 22.3 11.8 18.1 8.4 10 12.6 23 29.2 28.6 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 45.5 5 3 E 5 3 E 5 3 E 5 3 E 52.7 59 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 C2 P 1 P 1 P 1 C2 One-touch fitting PE PE X X [1(P), 3/5(E) port] Applicable tubing O.D.: 8 5/16" C1 C1 2 x M12 One-touch fitting [X: External pilot port] Applicable tubing

Electric Actuator/Slider Type

[mm] Size Stroke range (mm) C D EH EV F G H J K L M O1 R S 25 15 to 100 13 20 44 45.5 2 4 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 105 to 400 32 20 to 100 13 25 51 56.5 2 4 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 105 to 500 63 Up to 200 21 40 76 82 4 8 M16 x 2 44 36 37.4 60 M8 x 1.25 16 78 205 to 500 505 to 800 Size Stroke range (mm) T U B V Without lock With lock A W Z A W Z 25 15 to 100 46.5

Thermo-chiller/Rack Mount Type

W: 800 [W] Power supply output VI: 1.0 [kVA] W Efficiency Q = P = Q = P = V x I x Power factor In this example, using an efficiency of 0.7: In this example, using a power factor of 0.85: 800 0.7 = 1.0 [kVA] x 0.85 = 0.85 [kW] = 850 [W] = = 1143 [W] Cooling capacity = Considering a safety factor of 20%, Cooling capacity = Considering a safety factor of 20%, 850 [W] x 1.2 = 1020 [W] 1143 [W

New

D z300 Q F 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole R C C R E 1.2 1.2 1.2 1.2 E B1 B1 2 x P Port size 2 x P Port size B B DIN terminal Conduit terminal Y Y W W U U X X U1 U1 X1 X1 Cable 6 to 12 F Q 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole D D S G1/2 Qp2 F 34 (44) 31.5 25 T C R R G1/2 E E Sp2 B1 2 x P Port size 2 x P Port size B1 B B (mm) Mounting bracket dimensions Size One-touch fitting

Proposals for Energy Saving

P x 90% Note 2) Air consumption rate differs depending on the set pressure.

Series SV

With external pilot specification (Pitch) P = 24 24 48.6 20 11 25 11.8 13.7 14.5 E 3/5 E 3/5 E 3 E 3 4 A A 4 4 A A 4 A 4 A 4 A 4 A 4 A 4 A 4 35.8 40.4 35 58.3 63.9 74.8 B 2 P 1 P 1 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 B 2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 N11 C2 C2 x PE X PE C1 C1 2-M12 One-touch fitting [X: External pilot port] Applicable tubing O.D.: 6

Modular F.R.L. Units

High pressure 2.0 MPa (-X425) P.53 P.77 P.107 Low temperature 30 to 60C (-X430) P.53 P.77 P.106 High temperature 5 to 80C (-X440) P.53 P.77 P.106 Clean series (10-) P.54 P.63 P.80 P.80 P.111 P.111 Copper, fluorine and silicone-free + Low particle generation (21-) P.54 P.63 P.80 P.80 P.111 P.111 Related Product Modular adapter Example) Air filter + 3 port valve Easy modular connections for

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

8 1(IN), 2(OUT) port 17.5 17.5 2 x M5 x 6.5 15 15 2 x M5 x 6.5 CS: Conduit DS: DIN terminal DZ: DIN terminal with light Applicable cable 6 to 12 18 67 36 55.3 G1/2 48.9 500 18 36 NPT1/2 63 17.5 63 17.5 42.1 40.6 IN IN 8 8 28 30 30 28 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x M5 x 6.5 15 2 x M5 x 6.5 15 15 Direct Operated 2-Port Solenoid Valve JSX Series Dimensions

Air Fittings & Tubing

tube Body rotates at 360 around the stud axis M-5B For nylon tube Ml 6/4 X M5 6/4 X R(PT)1/8 M-5HL-6 M-01AN-6 P.2.1-49 P.2.1-52 P.2.1-51 Hl Plug O To plug unused M5 port Barb fitting M-01AU-4 Hose elbow (H) 4/2.5 X M5 4/2.5 X R(PT)1/8 M-5HLH-4 M-5P For soft nylon and polyurethane tube R (PT) Dl P.2.1-52 6/4 X M5 6/4 X R(PT)1/8 1 8 Gasket M-01AU-6 P.2.1-49 M-5HLH-6 Material: PVC To seal M5

2/3 Port Valve

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 A J Q B T K R C U S D V E W F X H Y N.O.