High Purity Chemical Valve

Lock nut Locks the adjustment knob position. 463 Series LVC Construction Standard type N.C. type N.O. type Double acting type q q q PB PB PB e w e w e w PA PA PA A B A B A B r t y With reducer With flow rate adjustment With bypass u i PB i PA t y A B Suck back (single type) Suck back (unit type) i i i e P P q e P t y e t y e B A A B r w w r With indicator o Parts list No.

VFM300

Push Button (Extended)/VFM250-02-32R, B, G, Y Panel mounted hole JIS Symbol 21N F.O.F. 0.5MPa supply 4.8mm P.T. 1.7mm O.T. 6.5mm T.T.

VFM300

-02-06 VFM350-02-06S Toggle lever VFM350-02-08 VFM350-02-30R VM-30CR Red VM-30CB Black VFM350-02-30B Push button (Mushroom) VM-30CG Green VFM350-02-30G VM-30CY Yellow VFM350-02-30Y VFM350-02-32R VM-32CR Red VM-32CB Black VFM350-02-32B Push button (Extended) VM-32CG Green VFM350-02-32G VM-32CY Yellow VFM350-02-32Y With a set of red, black, green, yellow VM-33C Push button (Flush) VFM350-02

Modular Type Air Filters Series AF

J C 2 A E EE D DD With Auto Drain PANEL FITTING IN OUT Z CC AA K L V U X W T S Y Q F H Bracket and Mounting Nut (Optional) IN OUT J C 2 A E D DD 7 Series AR20~40 Regulator How To Order AR 20 N 02 B Y Z X48 Regulator With External Epoxy Coating, Stainless Fasteners Name Plate, Caution Plate On Bowl in psi, F Body Size Symbol 20 30 40 Size 1/8 3/8 1/2 Handle Orientation Symbol Nil Y Description

VZS

M plug connector 2 position double: VZS3250-M(Z)-01 02 3 position closed center: VZS3350-M(Z)-01 02 3 position exhaust center: VZS3450-M(Z)-01 02 3 position pressure center: VZS3550-M(Z)-01 02 DIN terminal 2 position double: VZS3250-D(Z)-01 02 3 position closed center: VZS3350-D(Z)-01 02 3 position exhaust center: VZS3450-D(Z)-01 02 3 position pressure center: VZS3550-D(Z)-01 02 164 (3 position

Serial Network

U, D)-SSL1 Y VQ2000/4000/5000 EX123 (U, D)-SSL2 Y IP53 or NEMA12 comes as optional.

Speed Controller: Standard Type Series AS In-line Type

0 i y r u e t r i !0 q y !3 !2 !1 o w !3 e t w o u !4 y q !2 AK ASS ASR ASF Meter-in type M5 type U10/32 port AS3210-02 Component Parts No. Description Material Note No. Description Material Note Body A O-ring Zinc alloy NBR q i Body B O-ring Electroless nickel plated Brass NBR w o Needle Bushing Electroless nickel plated Brass PBT e !

Modular/F.R.L. Units Series AC

AD48 AD47 AD38 AD37 Y300 AKM3000-(01) 02 IS1000M-30 Y310-(01) 02 Float type auto drain Y400 AKM4000-(02) 03 IS1000M-40 Y410-(02) 03 02 VHS40-03 04 02 E400-03 04 06 02 IS1000E-4003 04 06 Y44-02 03 Y500 Y600 Spacer Check valve Note 6) Note 7) Pressure switch Note 7) IS1000M-60 IS1000M-50 Y510-(02) 03 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 VHS50-06 10 VHS20-01 02 VHS30

Stainless Steel 316 Fittings

KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 8 14 8 14 10 16 18 24 36 34 41 67 33 40 66 33 40 66 30 38 63 51 67 19.4 23.8 19.4 23.8 20.9

Modular Type Filter Regulator Series AW

y y e e r r r u u u Drain Drain Drain Parts list Material No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

YO YZ YOS (1) Standard (1) High pressure (Metal seal only) (1) (1.0W) K (1) Model Sub-plate part No. (1) (0.5W) Y Low wattage (2) (1) VQZ100-S-01(R) VQZ100 (1.0W) (3) L Latching (2) 01[Rc1/8] 02[Rc1/4] 02 [Rc1/4] 03 [Rc3/8] VQZ200-SVQZ200 Note 1) Option Note 2) When specifying more than one option, please indicate them alphabetically.

60

VXK2122-02 VXK2-02 VXK2322-02 VXK2132-02 VXK2232-02 VXK2332-02 VXK2242-02 VXK2342-02 VXK2-03 VXK2322-03 VXK2232-03 VXK2332-03 VXK2242-03 VXK2342-03 VXK2110-01 VXK2120-01 VXK2130-01 VXK2110-02 VXK2120-02 VXK2220-02 VXK2320-02 VXK2130-02 VXK2230-02 VXK2330-02 VXK2240-02 VXK2340-02 VXK2250-02 VXK2350-02 VXK2220-03 VXK2320-03 VXK2230-03 VXK2330-03 VXK2240-03 VXK2340-03 VXK2250-03 VXK2350-03

AW

J C 2 A E EE D DD With Auto Drain PANEL FITTING IN OUT Z CC AA K L V U X W T S Y Q F H Bracket and Mounting Nut (Optional) IN OUT J C 2 A E D DD 7 Series AR20~40 Regulator How To Order AR 20 N 02 B Y Z X48 Regulator With External Epoxy Coating, Stainless Fasteners Name Plate, Caution Plate On Bowl in psi, F Body Size Symbol 20 30 40 Size 1/8 3/8 1/2 Handle Orientation Symbol Nil Y Description

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

P 1 3 R 1.5 A Rc 1/8 3(R) port Rc 1/4 1(P) port 2-3 die-cast hole For manifold gasket positioning DIN terminal (Y): VQZ32(R)-Y-C6/C8/C10/02 L plug connector (L): VQZ32(R)-L-C6/C8/C10/02 89 300 (Lead wire length) Indicator light 30.5 <35.5> 92.5 Max. 10 Pg.7 Applicable cable O.D. 3.5 to 7 Indicator light Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 61 53.5 M plug connector (M): VQZ32(

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10.5 Foot bracket 15.4 16.7 PE port P 1 3 R 1.5 A Rc(PT)1/8 R port Rc(PT)1/4 P port 2-3 Die cast hole For manifold gasket positioning DIN terminal (Y): VQZ3l2(R)-lYl-C6, C8, C10, 02 L plug connector (L): VQZ3l2(R)-lLl-C6, C8, C10, 02 88.5 89.5 300 (Lead wire) Indicator light 31.5 35 92.5 MAX.10 Pg.7 Applicable cord O.D.

Smooth Cylinder/Low Speed Cylinder

L1 1273-1 A Series CQ2X Accessory Bracket Dimensions Single Knuckle Joint Double Knuckle Joint For I-G012, I-Z015A I-G02, I-G03 For I-G04, I-G05 I-G08, I-G10 For Y-G012, Y-Z015A Y-G02, Y-G03 For Y-G04, Y-G05 Y-G08, Y-G10 ND hole H10 Axis d9 ND hole H10 Axis d9 Material: Carbon steel Surface material: Nickel plated Material: Cast iron Surface material: Nickel plated Material: Carbon steel

Thermo-chiller/Rack Mount Type

2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

1 Meter-in type Meter-in type M5 type U10/32 type M5 type U10/32 type 15-9-94 4 Tamper Proof Speed Controller With One-touch Fitting, Elbow Type/Universal Type Construction Elbow type Meter-out type Universal type Meter-out type AS3201F-02 AS3301F-02 i w o !6 !5 r t y !2 !3 !0 q u !4 e !1 e r t !0 !1 o q y !2 w u !

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT N Needle Valve/Flow Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (For VQZ100) This is used when changing piping location.