2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(increment of 0.1 s), 1 to 10 s (increment of 1 s), 20 s, 30 s, 40 s, 50 s, or 60 s.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

m s m s Type of impact s m Kinetic energy E1 1 2 m2 Thrust energy E2 Fs Fs + mgs Fs mgs Absorbed energy E E1 + E2 Symbol : Speed of impact object (m/s) m: Weight of impact object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8 m/s2) s: Shock absorber stroke (m) Note) The speed of the impact object is measured at the moment of impact with the shock absorber. 8-12-11 12 Series

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load mass kg Load mass kg m s m s Type of impact s m 1 m 2 Kinetic energy E1 Thrust energy E2 Fs Fs + mgs Fs mgs Absorbed energy E E + E Symbols : Speed of impacting object (m/s) m: Mass of impacting object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8m/s) s: Shock absorber stroke (m) Note) The speed of the impacting object is measured at the time of impact with the

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

m s m s Type of impact s m Kinetic energy E1 1 2 m2 Thrust energy E2 Fs Fs + mgs Fs mgs Absorbed energy E E1 + E2 Symbol : Speed of impact object (m/s) m: Weight of impact object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8 m/s2) s: Shock absorber stroke (m) Note) The speed of the impact object is measured at the moment of impact with the shock absorber. 8-12-11 12 Series

CLA

Stop Accuracy (Variation in control system is not included) (mm) Piston Speed (mm/sec) Type of locking SO 100 300 500 I 2 .0 Spring lock O .4 O .S 1.0 Air pressure lock Spring-Air pressure lock O .2 O .3 O .S 1.S Condition/load: 25% of thrust at Skgf/cm2 Solenoid valve: Mount on lock-port Max. piston speed: 500mm/sec If the application is within the allowable kinetic energy specified, the

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Piston speed mm/s Piston speed mm/s Piston speed mm/s 8-14-13 13 Mechanically Jointed Rodless Cylinder Short Type/Basic Type Series MY3A/3B 16, 25, 40, 63 How to Order MY3 A 16 300 LS M9B Type Number of auto switches Nil S n Short type (Rubber bumper) Basic type (Air cushion) 2 pcs. 1 pc. n pcs.

Pressure Range: 0 to 1 MPa, Piping: G 1/4, Output Specification: Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type], Unit Specification: -, Lead Wire: -, Bracket: -, Operation Manual/Calibration Certificate: -

Piping: G1/4, ISO1179, Output: 43 [NPN Open Collector 1 Output (Pin No.:4)+PNP Open Collector 1 Output (Pin no.:2)], Display Unit: -, Option 1: -, Option 2: -

Piping: G1/4, ISO1179, Output: 67 [PNP Open Collector 2 Outputs (Pin no.: 2,4)], Display Unit: -, Option 1: -, Option 2: -

Piping: G1/4, ISO1179, Output: 27 [NPN Open Collector 2 Outputs (Pin no.: 2,4)], Display Unit: -, Option 1: -, Option 2: -

Piping: G1/4, ISO1179, Output: 65 [PNP Open Collector 1 Output (Pin no.: 4)], Display Unit: -, Option 1: -, Option 2: -

e-Rodless Actuator

Speed (mm/s) Speed (mm/s) Speed (mm/s) 6 e-Rodless Actuator Series E-MY2C Cam follower guide type/Nominal size: 16, 25 How to Order Cam follower guide type E-MY2C 16 N 100 TA M9B Nominal size Number of auto switches 16 25 Nil S n 2 pcs. 1 pc. n Stroke Refer to the standard stroke table.

HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Compact Vacuum Ejector Series ZQ

Left Right 15 -60 -60 10 -40 -40 Air consumption -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE

ZQ

ZF Left Right 15 -60 -60 ZP 10 -40 -40 Air consumption ZCU -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP

HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

MGZ Series

based on vertical mounting and speed of 500mm/s.

Nozzle Type Ionizer

Blow Velocity Distribution (Supply Pressure: 0.3 MPa) qEnergy saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0 0 100 100 Distance [mm] Distance [mm] 200 200 4 m/s 14 m/s 300 300 11 m/s 3 m/s 400 400 8 m/s 2 m/s 500 30 30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 8 IZN10E Series Flow Rate Characteristics qEnergy

Compact and Lightweight

The standard bracket and silencer are not assembled with the product, but shipped together. 20 54.5 228 Body Ported Type Vacuum Ejector ZH Series Body Ported: ZH05D A--to ZH20D A--S L S L One-touch and screw-in connection ZK2 SUP. EXH. ZQ L4 ZR ZB H2 Connection thread 2 ZA VAC.

AC Servo Motor Driver (Pulse input type)

(Note) The value will be -1500 to 1500 kpulse/s when kpulse/ -9 s 9 inputting command pulse.