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(mm) 8 6 4 Model 10 12 Connection thread Male connector KSH KXH M5 x 0.8 M6 x 1 1 8 R K R 1 4 M R 3 8 H R 1 2 Male elbow KSL KXL D M5 x 0.8 M6 x 1 MS R 1 8 T R 1 4 VMG R 3 8 R 1 2 Precautions Be sure to read before handling.

L1 ZL Release flow adjusting screw ZY 8 P PE Exhaust part 2-3.5 ZQ 62.8 (Body mounting hole Note 1)) 3 75 Suction filter ZF With L type plug connector ZP Vacuum pressure switch PE P EXH ZCU AMJ S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached

L1 Release flow adjusting screw 8 P PE Exhaust part 2-3.5 62.8 (Body mounting hole Note 1)) 3 75 Suction filter With L type plug connector Vacuum pressure switch PE P EXH S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V

Number of needle rotations Dimensions D3 Applicable tubing O.D. d D1 L3 A L4 M T H (Width across flats) L2 L1 Metric Size/Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L41 A2 M Weight [g] Unlocked Locked Unlocked Locked AS121F-M3-02A-X790 2 11.9 5 AS121F-M3-23A-X790 3.2 7.2 17.2 21.7 5.8 15.8 20.3 16.9 13.3 AS121F-M3-04A-X790 4 8.2 AS121F-M3-06A-X790 6 10.4 18.6 23.1 16.5 6 AS121F-M3-01A-X790

HRX-OM-I051 1stEditionJanuary.2005 Rev.May.2018 Operation Manual Original Instructions Thermo-Chiller HRZ001-L HRZ002-L HRZ004-L HRZ008-L HRZ001-L1 HRZ002-L1 HRZ004-L1 HRZ008-L1 HRZ001-L2 HRZ002-L2 HRZ004-L2 HRZ008-L2 HRZ001-H HRZ002-H HRZ004-H HRZ008-H HRZ001-H1 HRZ002-H1 HRZ004-H1 HRZ008-H1 HRZ002-W HRZ008-W HRZ002-W1 HRZ008-W1 HRZ010-WS HRZ010-W1S HRZ010-W2S Save This Manual Carefully

Dimensions C D L1 L2 Fd Fc C Fn (Fc) (KF Flange) (K Flange) (CF Flange) K B J H A G A Unit: mm Model A B C D Fn Fd Fc G H J KK P.C.D.

L1 L2 384 372 494 476 348 336 448 430 312 300 402 384 276 264 356 338 240 228 310 292 204 192 264 246 168 156 218 200 132 120 172 154 96 84 126 108 VVXA31 VVXA32 Symbol Model A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

l Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!

MY1B m2 m3 Moment (Nm) MY1M M1 = F1 x L1 F1 M2 = F2 x L2 M3 = F3 x L3 F3 F2 MY1C L2 L1 L3 MY1H 4. Accuracy Mechanically jointed rodless cylinders do not guarantee traveling parallelism. When accuracy in traveling parallelism and intermediate stroke position is required, please contact SMC sales representatives.

(mm) Connection thread M thread Uni thread A Weight (g) L2 M D1 D2 L1 Model Urethane KAL23-M5 15 9.6 16 15.5 M5 x 0.8 M6 x 1 7 6 Applicable tubing 8 8 15.5 19.5 21 3.4 2.9 8 4 5 1 8 KAL23-M6 KAL23-U01 10 3.2 17.5 10 KAL04-M5 15.5 M5 x 0.8 M6 x 1 8 16 3.5 3.5 8 KAL04-M6 16 10.4 16 18 4 1 8 KAL04-U01 20.5 20 8 14 10 10 4.2 4.2 1 4 KAL04-U02 22 21.5 14 KAL06-M5 16 M5 x 0.8

l Cross section C-C Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!

Exterior dimensions C D XMA Series Angle Valve Fd Fn Fc C Fc L1 KF Flange K Flange CF Flange ( K ) ( K F ) ( C F ) L2 H B G A A Unit:mm Model n Fd Fc H P.C.D L1 L2 XMA-16 40 103 38 1 30 34 17 40 P.C.D 27 6x4.4 XMA-25 50 113 48 1 40 26 39 XMA-40 65 158 66 2 55 70 41 63 P.C.D. 58.7 6x6.6 XMA-50 70 170 79 2 75 52 68 XMA-63 88 196 100 3 87 95 114 70 69 P.C.D. 92.1 8x8.4 XMA-80 90 235 117 3 114

-X 20m2 m3 Data Moment (Nm) M1 = F1 x L1 F1 F2 M3 = F3 x L3 F3 M2 = F2 x L2 L1 L2 L3 Maximum Load Weight Select the load from within the range of limits shown in the graphs. Note that the maximum allowable moment value may sometimes be exceeded even within the operating limits shown in the graphs. Therefore, also check the allowable moment for the selected conditions.

Brown Load Load Auto switch 1 Auto switch 1 Blue Blue Brown Brown Auto switch 2 Auto switch 2 Blue Blue Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V Load voltage at ON = Power supply voltage Residual voltage x 2 pcs. = 24 V 4 V x 2 pcs. = 16 V Example: Load impedance 3 k Auto switch leakage current 1 mA Example: Power supply voltage 24 VDC

-X 20m2 m3 Data Moment (Nm) M1 = F1 x L1 F1 F2 M3 = F3 x L3 F3 M2 = F2 x L2 L1 L2 L3 Maximum Load Weight Select the load from within the range of limits shown in the graphs. Note that the maximum allowable moment value may sometimes be exceeded even within the operating limits shown in the graphs. Therefore, also check the allowable moment for the selected conditions.

152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 9 248 237.5 216 16 10 260.5 250 232 14 (mm) (mm) 17 373 362.5 344 14.5 Stations L1 L2 L3 L4 11 273 262.5 248 12.5 12 298 287.5 264 17 13 310.5 300 280 15.5 14 323 312.5 296 13.5 15 335.5 325 312 12 16 360.5 350 328 16.5 18 385.5 375 360 13 19 398 387.5 376 11 20 423 412.5 392 15.5 8 210.5 200 184 13.5 Stations L1 L2 L3 L4 10 248 237.5 216 16

Model/Stroke Width at closing (mm) Width at opening (mm) Max. operating frequency Opening/Closing stroke (mm) Mass (g) Bore size (mm) Model (L1) (L2) (L2-L1) c.p.m MHL2-10D MHL2-10D1 MHL2-10D2 MHL2-16D MHL2-16D1 MHL2-16D2 MHL2-20D MHL2-20D1 MHL2-20D2 MHL2-25D MHL2-25D1 MHL2-25D2 MHL2-32D MHL2-32D1 MHL2-32D2 MHL2-40D MHL2-40D1 MHL2-40D2 60 20 56 76 280 40 78 118 345 10 40 60 96 156 425 30

Model Bolt Proper tightening torque N.m L1 MGZ/MGZR20 MGZ/MGZR25 MGZ/MGZR32 MGZ/MGZR40 MGZ/MGZR50 MGZ/MGZR63 MGZ/MGZR80 L2 11 11 16 16 16 16 20 10 10 12 12 15 15 23 2.5 to 3.1 2.5 to 3.1 4.1 to 6.4 4.1 to 6.4 8.8 to 13.8 8.8 to 13.8 30.4 to 47.5 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 L2 L1 2.