A

-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4

Soft Start-up Valve AV2000/3000/4000/5000

-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4

53

Description Size 1 Valve Rc1/2 2 Valve Rc1 3 Y-strainer (#40) (Accessory)* Rc1 4 Flow meter Prepare a flow meter with an appropriate flow range. 5 Valve (Part of thermo-chiller) Rc1/4 6 Pressure gauge 0 to 1 MPa 7 Y-strainer (#40) or filter Rc1/2 8 Valve Rc3/8 9 Y-strainer (#40) or filter Rc3/8 * If foreign objects of 20 m or larger may enter, install a particle filter separately.

HRX-OM-S004

Y strainer (40 meshes) 20A 1pc. Barrel nipple 20A 1pc. Drain pan for the pump 1pc.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Soft Start-up Valve

V Y U H H U Dimensions [mm] Standard specifications Port size A B C D E F G H J 1(P) 2(A) 3(R) Model AV2000-m02-1 to 6D/Y(Z)m-A 1/4 1/4 1/4 66 97 47 24.5 40 96 33 Width across flats 22 58 AV3000-m03-1 to 6D/Y(Z)m-A 3/8 3/8 3/8 76 97 50 29.5 40 96 38 Width across flats 24 63 AV4000-m04-1 to 6D/Y(Z)m-A 1/2 1/2 1/2 98 107 56 39.5 52 106 49 Width across flats 30 61 AV5000-m06, 10-1 to 6D/Y(Z)

P

Buffer connection thread Symbol Thread dia. 1 A8 Symbol Pad dia. 1 02 to 08 2 A10 B5 3 A14 2 10 to 16 3 20 to 32 B8 4 40, 50 4 ZP U6 B8 Y [qY type adaptor] B 3 ZP K20 [wBuffer] 3.8-63

Sensor Range: 3 [For Compound Pressure (-100~100kPa)], Port Size: 02 [R1/4 (M5 Female Thread)], Output Specifications: L2 (IO-Link/Switch: 1 output + 2 outputs), Lead Wire: N (None)

Sensor Range: 6 [For Positive Pressure (0~5MPa)], Port Size: 02 [R1/4 (M5 Female Thread)], Output Specifications: L2 (IO-Link/Switch: 1 output + 2 outputs)

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: M (SI Unit Only)

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: S (Lead Wire with M12 Connector; Straight, 5 m)

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m)

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: M (SI Unit Only), Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m), Bracket: A (Bracket A, Interchangeable with ISE70)

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: None, Bracket: A (Bracket A, Interchangeable with ISE70)

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: M (SI Unit Only), Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m)

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: S (Lead Wire with M12 Connector; Straight, 5 m), Bracket: B (Bracket B), Operation Manual/Calibration Certificate

Pressure Range: ISE71 (0 to 1.6 MPa), Piping: 02 (Rc 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: S (Lead Wire with M12 Connector; Straight, 5 m), Bracket: B (Bracket B), Operation Manual/Calibration Certificate

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: M (SI Unit Only), Lead Wire: None, Bracket: A (Bracket A, Interchangeable with ISE70)

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: M (SI Unit Only), Lead Wire: S (Lead Wire with M12 Connector; Straight, 5 m), Bracket: A (Bracket A, Interchangeable with ISE70)

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type])