2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,

Air Fittings Fitting Series For Special Environment

N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 99 10 6 6 89 47 1 4 17 19.5 33.5 23.5 33 13.5 8.5 13 19 10 125 6 108 10 55 73 106 104 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 22.5 37.5 26 36.5 10 15.5 20.5 14.7 86 126 119

Nozzle Type Ionizer

Symbol Pitch ES 17.4 mm Symbol Stations 2 2 3 3 4 4 AC adapter AC cord 96 2144105 1820 L2 L1 Ionizer1 (Order it separately.) 17.4 9.6 28 44 Bracket1 (Order it separately.) Hexagon nut Cleaning kit IZS30-M2 Hexagon socket head cap screw Spacer (5 mm) Part no.

20

Nozzle size Coil tube Fitting Blow gun Recommended system Distance S coupler TCU0604-1-20-X6 KQ2H06-02S Up to 20 mm VMG1-02-01 KK4P-06H 1 TCU0604-1-20-X6 KQ2H06-02S Up to 40 mm VMG1-02-02 KK4P-06H 1.5 TCU0805-1-20-X6 KQ2H08-02S Up to 60 mm VMG1-02-03 KK4P-08H 2 TCU1065-1-20-X6 KQ2H10-02S Over 60 mm VMG1-02-04 KK4P-10H 2.5 Energy Saving Flow Air guns with an effective area around 6 mm2 are

SJ3A6

Flat ribbon cable (10 pins) Symbol Stations 02 09 Symbol Stations 02 04 2 stations 9 stations 2 stations 4 stations Non-polar type, with plug (24 VDC) SJ3A6-5CU-DP (4 sets) SUP/EXH block (D side mounting) J: Flat ribbon cable (PC wiring) S6B: EX510 serial transmission Symbol Stations 02 08 Symbol Stations 02 08 2 stations 8 stations 2 stations 8 stations 1 3 2 D side U side Stations G: Flat

Compact and Lightweight

H2 L3 L2 L1 All Ports: Screw-in Model H1 H2 H3 L1 L2 L3 L4 Connection thread 1 Connection thread 2 Connection thread 3 ZH05DA-01-01-01 12 12 12 67 42.5 27 26 Rc1/8 Rc1/8 Rc1/8 ZH07DA-01-01-01 70.2 ZH10DA-01-01-01 76.4 ZH13DA-01-02-02 17 17 90.8 51 29.5 36.3 Rc1/4 Rc1/4 ZH15DA-02-03-03 17 19 19 108.2 63.3 34.3 37.1 Rc1/4 Rc3/8 Rc3/8 ZH18DA-03-03-03 19 131.1 73.6 41.1 39.1 Rc3/8 ZH20DA-03-04

Output block / Power block

The Power supply can be connected only when the SI unit (EX250, EX260, EX500-Q 02 series) and Power block are side by side. Power supply connector (No.0) and power supply connector (No.1) are connected together internally.

Speed Controller: Standard Type Large Flow In-line Type AS Series

series 02 03 04 06 10 12 14 20 Caution L (2) Note 1) AS800 is available as special.

VFRA3000

5 Port Air Operated Valve Series VFRA3000 Model Configuration Port size Rc(PT) Effective area (mm2) (Cv) Pilot port size Rc(PT) Weight (kg) Valve model 1 4 3 8 37.8 (2.1) 41.4 (2.3) VFRA3111-03 VFRA3211-02 2 position double 0.71 1 8 VFRA3111-02 2 position single 0.61 1 8 1 4 3 8 37.8 (2.1) 41.4 (2.3) VFRA3211-03 VFRA3311-02 3 position closed center 0.72 1 8 1 4 3 8 34.2 (1.9) 36 (2.0) PA,

Manifold Specifications

Electrical entry SC (T only) Type SU Type SC Type SC Type SU Type SC Type SU AXT622-5A AXT336-4AStations AXT336-5Stations Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod

HRX-OM-Z002

HRLE050 200V N L HRLE090 200V L3 L1 L2 Fig. 3-12 Cable wiring (200V) 3.3 Installation Procedure HRLE Series 3-16 HRX-OM-Z002 Chapter 3 Transport and Set Up 400V L1 L2 L3 Fig. 3-13 Cable wiring (400V) HRLE Series 3.3Installation Procedure 3-17 HRX-OM-Z002 Chapter 3 Transport and Set Up 3.3.4 Preparation and wiring of communication cable Be sure to turn OFF the breaker of the facility power

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Note 3) Polyurethane is only applicable for the ZFC050-02. SP ZCUK Made to Order (Refer to page 1115 for details.)

ITV

IITV20 02 5 Example AV Valve stations Electro-pneumatic regulator Blanking plate assembly ITV1030-311S-X26 2 2 stations P398020-13 AU 8 8 stations Electro-pneumatic regulator LOCK UNLOCK RESET SET AF ITV2050-212S-X26 E SMC REGULATOR OUT port size ITV1000/2000 P 02 03 1/4 3/8 LOCK UNLOCK RESET SET MPa AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-

VVXA21/22

L1 L2 384 372 494 476 348 336 448 430 312 300 402 384 276 264 356 338 240 228 310 292 204 192 264 246 168 156 218 200 132 120 172 154 96 84 126 108 VVXA31 VVXA32 Symbol Model A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

ZB-OM00301

10 ZB1-VPN3A KJ H 04 04 C2 2 H 02 2 C4 4 L 04 4 N1 1/8" 01 1/8" N3 5/32" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.

Air Cylinder

Knock pin hole Clevis Pin x Material: Cast iron 80, 100 L2 L1 Material: Carbon steel (mm) Part no.

HRX-OM-W002

) [ ] lamp Lights up when AL.01 Tank level drop failure or AL.02 Tank level dropalarm is generated.

HRX-OM-X071

) [ ] lamp Lights up when AL.01 Tank level drop failure or AL.02 Tank level dropalarm is generated.

IS3000

LED/24 VDC Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 Note) Micro load type: Not available L2 option. 864

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order JSXZ 3 1 C N 02 R 5 G D B w y e r t u o !