4/5 Port Air Operated Valve Series SYJA3000

Type S31 Manifold: Side Ported 91.7 [96.1] Approx. 300 (Lead wire length) SS5YJ3-S31Stations -M3 L1 L2 3.5 2-3.5 (For mounting) Manual override M5 x 0.8 (P, R port) 5.2 29.2 7.5 52.2 [54.4] 51.4 [53.6] 17.3 30 3 91.7 [96.1] 78.8 [83.2] 78.8 [83.2] 13.5 A A A A A B B B B B P R P R P R 29.2 P R 30 17.3 25 7.5 12 25 51.4 [53.6] 52.2 [54.4] 13.5 B B B B B A A A A A 3 5.2 2-3.5 (For mounting)

IDX-OM-Y002

50 or less 50 or less Total hardness (mgCaCO3/L) 200 or less 70 or less 70 or less Calcium hardness (mgCaCO3/L) 150 or less 50 or less 50 or less Ion state silica (mgSiO2/L) 50 or less 30 or less 30 or less Iron(mg/L) 1.0 or less 0.3 or less 1.0 or less Copper (mg/L) 0.3 or less 0.1 or less 1.0 or less Reference items Sulfide ion (mg/L) Should not be Should not be Should not be inspected

3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic

Compact Cylinder with Solenoid Valve/

D-A90(V) OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT() Blue Weight (g) D-A93(V) Model D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V LED Brown OUT (+) Brown 41 Lead wire length (m) 0.5 6 6 6 6 8 8 Contact protection box CD-P11 CD-P12 Resistor 3 30 30 30 30 41 Reed switch Zener diode Dimensions (mm) OUT () Blue Blue D-A90/D-A93/D-A96 2 2.8 4.5 2.7 D-A96(V) DC (+) Brown 4 LED

Model Selection 1

4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

XL-OMY0003

XLH-25 XLH-40 XLH-50 AC90240V XLA25-60S-1 XLA25-60S-1 1 1 H4 AC100V 200/40 200/50 / AC200V 800/40 800/50 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 1 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 30 ( 7 XL-OMY0003 . <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) <

Vacuum

SymbolTube size l\,lodel Note) Replacemont Ong sal included with reolacement elefienls @3h6" NZFBl Ol srze Symbol Flow SCFM (N/min) @1/4" NZFBl Ol NZFB2Ol s3/8" NZFB3Ol Inch 3ize' MAX 0.7 (20) MAX 1.1 (30) MAX 2.1 (60) r\rAX 3.5 (100) @1/2" NZFB4Ol lnch slze' (Rebase butlon: Fed) o4mm zFB100 oGmm zFB100 zFB'200 oBmm zF8.200 zF8300 o10mm zFB300 can o8mm can be used with 5/16'tubing. iti slze

Vacuum

SymbolTube size l\,lodel Note) Replacemont Ong sal included with reolacement elefienls @3h6" NZFBl Ol srze Symbol Flow SCFM (N/min) @1/4" NZFBl Ol NZFB2Ol s3/8" NZFB3Ol Inch 3ize' MAX 0.7 (20) MAX 1.1 (30) MAX 2.1 (60) r\rAX 3.5 (100) lnch slze' (Rebase butlon: Fed) @1/2" NZFB4Ol o4mm zFB100 oGmm zFB100 zFB'200 oBmm zF8.200 zF8300 o10mm zFB300 can o8mm can be used with 5/16'tubing. iti slze

Vacuum Pad

( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free pad H Related pad Sponge pad S ( ( ( ( ( Resin attachment K ( ( ( ( Pad with ball spline buffer U ( ( ( ( H Heavy-duty ball joint pad HB Note) The ZP2 series is blast type.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Grommet, L and M type plug connector With surge voltage suppressor How to Order Connector Ass'y Diode to prevent reverse connection SY100 30 4A For DC: Red(+) Coil For 100VAC: SY100 30 1A Black(--) For 200VAC: SY100 30 2A Indicator light and surge voltage suppressor ( Z) For other voltages of AC SY100 30 3A Diode to prevent reverse connection : Red(+) Lead wire length How to Order

IDX-OM-M051

Acid consumption [pH4.8](mgCaCO3/L) 100 or less 50 or less 50 or less Total hardness (mgCaCO3/L) 200 or less 70 or less 70 or less Calcium hardness (mgCaCO3/L) 150 or less 50 or less 50 or less Ionic state silica (mgSiO2/L) 50 or less 30 or less 30 or less Iron (mg/L) 1.0 or less 0.3 or less 1.0 or less Copper (mg/L) 0.3 or less 0.1 or less 1.0 or less Reference items Sulfide ions (mg/L)

IDX-OM-Z004

40 (mg/L) 200 50 50 (mg/L) 200 50 50 [pH4.8](mgCaCO3/L) 100 50 50 (mgCaCO3/L) 200 70 70 (mgCaCO3/L) 150 50 50 (mgSiO2/L) 50 30 30 (mg/L) 1.0 0.3 1.0 (mg/L) 0.3 0.1 1.0 (mg/L) (mg/L) 1.0 0.1 1.0 (mg/L) 0.3 0.3 0.3 (mg/L) 4.0 4.0 4.0 6.07.0 1 2 JIS K 0101 2 a b c 4.2 IDF100150F-W 4 2 IDX-OM-Z004 4 (3) 1 Y Y , Y Y (4) 3 2 (5) 1( 2 3 4 a) 1.

Heavy Duty Stopper Cylinder Series RSH/RS1H

80 300 300 1.0 RS1H80 RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 0.7 10 20 30 40 10 20 30 40 0 0 0.6 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 Graphe Graphr Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 0.2 0.1 80 80 0 5000 1000 2000 3000 4000 Lateral load F [N] 32 70 70 60 60 50 50 32 40 40 30 30 20 20 20 20 10 10 0 0 10 20 30 40 10 20

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Cushion Stroke Model Stroke (mm) 25 30 1 5 0.3 Model CYP15 CYP32 CYP15 CYP32 8-17-6 6 Clean Room Rodless Cylinder Series CYP 15, 32 How to Order MX CYP 15 Z73 200 MTS MY Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

(page 30) for details of the PIN layout 1 and 2. EX600-EU1End plate at U side Mounting method Symbol Description Nil No DIN rail bracket 2 With DIN rail bracket (EX600-ED#-2) 3 With DIN rail bracket (EX600-ED#-3) -27No.EX-OMX1011 Summary of Product parts EX600-ED2EX600-ED3EX600-EU1No.

air-filter-e

100 200 300 400 Symbol Nominal filtration accuracy (m) Nominal filtration accuracy (m) 5 10 20 Industrial Filters Replacement Procedure Actuators Modular F.R.L.

Air Preparation Equipment

100 200 300 400 Symbol Nominal filtration accuracy (m) Nominal filtration accuracy (m) 5 10 20 Industrial Filters Replacement Procedure Actuators Modular F.R.L.

ZSE1/ISE1

(Adjustable) Hysteresis Data ON: when output is ON (Red) ON: when output is ON (Red) ON: when output is ON (OUT1: Red, OUT2: Green) Indicator light Trimmer adjustment 3 turns 200 degrees 3 turns 200 degrees 3 turns 200 degrees None 1 to 5 V 5% F .S.

Round Type Hydraulic Cylinder

M10 x 1.25 M14 x 1.5 M16 x 1.5 12 M4 10 10 7 5.5 5.5 6.5 M4 set screw (1 pc.) 30 10 16 22 60 46 30 12 M4 10 10 7 5.5 5.5 6.5 36 12 16 30 80 56 40 12 M5 12 13 7 9 7 10 M5 set screw (1 pc.) 44 12 24 30 88 64 43 16 M5 12 13 9 9 10 10 Y-type double knuckle joint Bracket pin 20: Y-020B 25: Y-032B 32: Y-04D 40: Y-04B 2 x D drill through RR1 RR1 C1 Chamfer NDH10 NDH10 MM C E1 E1 C1 Chamfer NZ NZ

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 1/8 14 port 3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 3/8, 1/2, 3/4 1 port 3/8, 1/2, 3/4 1 port Dimension inside is for rubber seal.