MGQ

(mm) Eccentric distance l (mm) Eccentric distance l (mm) MGQM32 to 100 (Slide bearing) MGQL32 to 100(25, 50 stroke) 25 50 MGQL32 to 100-Over 50 stroke Load weight m (kg) Load weight m (kg) Eccentric distance l (mm) Eccentric distance l (mm) Eccentric distance l (mm) 8-20-7 8 Series MGQ Construction Series MGQL Series MGQM MGQL12 to 25 12 to 25/MGQM12 to 25 12, 16 Over 30 stroke Over 50 stroke

CYV

+ B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide Central

Rodless Cylinder for Vacuum Series CYV ø15, ø32

+ B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide Central

AC Servo Motor Driver (Pulse input type/Positioning type)

[PA06] [PA05]100P [PA07] Actuator lead L[mm] n1/n2 1 Ex.)

EXxx-OMQ0015CN

A IN L/A OUT 11 SF/BF 12 13 14 15 -27No.EX-OMQ0015CN EX600No. 1 LED OFF H.T

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 285.5 21 273 No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 40 285.5 21 273 No.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

min (ANR)) Accessory Option 1 4 3 8 1 2 3 4 Port size Max. air flow (l /min (ANR)) Standard size Thread type Standard size 360 650 1,500 3,700 7,500 16,000 2 3 4 3 6 15 37 75 160 Rc NPT G 200 500 1,000 Bracket Flow direction (Right Down) With element service indicator 1 1 2 2 3B flange 4B flange AMC 1 2 For details, refer to individual catalog (CAT: ES13-7) separately. 5-10-15

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

PF-OMN0009_C

min 11 cm ) IN OUT PF3W504 PF3W520 (16 L/min ) (16 L/min ) (4 L/min ) (8 L/min ) [cm] [cm] PF3W540 PF3W511() (100 L/min ) (100 L/min ) (50 L/min ) (40 L/min ) (40 L/min ) (50 L/min ) [cm] [cm] -36No.PF-OMN0009CN-F PF3W521() (250 L/min ) (250 L/min ) [cm] -37No.PF-OMN0009CN-F PVC 3F.S.11 cm IN OUT PF3W511/521(PVC ) (100 L/min ) (250 L/min ) [cm] -38No.PF-OMN0009CN-F PF3W504S PF3W520S

VQ5000

(except L and T1 kits) Note 3) Available only for F, L and T1 kits. Note 4) IP65 is available only for L, T and S kits. Note) In case of CM indicate on a specification sheet.

MK

Model Ah9 0 0.052 0 0.052 0 0.062 21 28 35 50 63 MK2l32-llF MK2l40-llF MK2l -llF Through hole & both ends tapped (standard) Model J H K L C D E F G lA B S T I M O P Q R U V X Yh9 Z N 0.1 0.2 0.1 0.2 0.1 0.2 0.1 0.2 0 0.62 0 0.62 0 0.62 0 0.62 MK2B32 MK2B40 MK2B50 MK2B63 34 40 50 60 54 61 73 86 5.5 5.5 6.6 9 31.5 35 41 9 Depth 7 9 Depth 7 45 52 64 77 60 69 86 103 Rc(PT)1/8 12 12 15 15 30 30

PF-OMN0011_C

min (20 L/min 0) 7112 L/min (7 L/min 0) 3.545.0 L/min (3.5 L/min 0.0) 1.718.0 L/min (1.7 L/min 0.0) 0.354.50 L/min (0.35 L/min 0.00) 0.354.50 L/min 1.718.0 L/min 3.545.0 L/min 7112 L/min 20280 L/min 0.01 L/min 0.1 L/min 1 L/min 2 L/min (50 ms) 0.05 L/pulse 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2 L/pulse L/minL 0.5F.S. 0.5F.S. 0.5F.S. 0.5%F.S.(25 ) 9.9 L 9 L 1 0.1L 0.5L 1L NPN

Floating Joint

How to Order JA 40 F 14-150 Option Mounting type None Nil High temperature specifications 5 to 100C Nil F L Basic type Flange type Foot type Applicable bore size (mm) X11 Symbol Applicable bore size (mm) Model 6 10 15 20 30 40 63 80 100 140 160 6 10 10, 15 20 25, 32 40 50, 63 80 100 125, 140 160 Thread nominal size (Standard) Nominal thread size Applicable cylinder nominal thread size Standard

CE

Lead Wire Length Lead wire length designation (example) D-A73 L Lead wire length Nil L Z NNote) 0.5m 3m 5m None Note) Applies only to D C type connector switches.

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P S U W E B K L AA A R X AB I AP Y + Stroke Z + Stroke J V 8-AF AC AD AE 100 piston rod end connection For standard strokes (mm) Bore size (mm) Stroke range (mm) AC G H AB AF AA AE AD F N M D L C K B J AP I A E 63 80 100 75, 100 125, 150 200, 250 300 15 20 depth 14.5 M16 x 2 depth 28 25 25 50 170 13.5 100 66 140 180 30 135 M12 x 1.75 depth 24 228 117 60 65 200 200 15 20

Digital Flow Switch

L/min 0 to 1 L/min 0 to 3 L/min 0.5 to 0.5 L/min 5 to 500 L/min 5 to 500 L/min 10 to 1000 L/min 20 to 2000 L/min 2 to 200 L/min 1 to 1 L/min 10 to 1000 L/min 3 to 3 L/min 20 to 2000 L/min Power supply voltage 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% Temperature characteristics 2% F.S. 2% F.S. (15 to 35C) 2% F.S. (15 to 35C) (25C standard)

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

'i,-.1-)^' l z N F Noz l!

Title not found

s NVZ3000 Symbol With Subplate Body porled Vpe Base mounted type with subplate NVZ3r20 NVZ340 Cv0.25 1 1 / l \ l h u d l / l \ L E l ff NVZ32?