CE

S 3pcs. 3 "n" pcs.

Compact

If the adjusting screw of the speed controller is loosened, the operating speed will increase, so the screw should be tightened completely. m Impact force MXZ12 MXZ16 1.4 2.5 V = mm/s V = mm/s 1.2 2.0 Load weight m [kg] Load weight m [kg] 1.0 1.5 0.8 0.6 1.0 V = 50 V = 50 0.4 V = 100 V = 100 V = 200 V = 200 0.5 V = 500 V = 500 0.2 0.0 0.0 60 50 40 30 20 10 0 0 5 20 15 10 25 30 35 40 45 50

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 114 65 17.5 8 32 64 7 52 6 38.5 25 M5 x 0.8 17-5-48 7 Series LVD Integral Fitting Type (Hyper Fittings

XLAQ/XLDQ

B A A XLAQ Series Case A (mm) Weight (kg) Conductance (L/s) B (mm) Model XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 0.33 40 120 5 0.6 50 133 14 65 1.3 178 45 70 190 2.0 80 : Common to the XLAQ/XLDQ series Variations Variations Bellows seal, Single acting/XLAQ 2-step control, Single acting/XLDQ Bellows type is particulate free and completely cleaned. Pressure balancing mechanism.

MGF

5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load

Vacuum Unit

100 100 100 Vacuum pressure [kPa] 80 90 90 60 80 80 40 Suction flow (High-noise reduction silencer exhaust) Vacuum pressure 70 70 Port exhaust 20 Silencer exhaust/Complex exhaust Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 Suction flow (Port exhaust) 60 60 Suction flow [L/min (ANR)] 50 50 Flow Rate Characteristics Suction flow (Silencer exhaust/ Complex exhaust) Suction flow (Silencer exhaust

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

/60Hz 5 6 V S R 1 2 Series Without light/surge voltage suppressor Nil SY3000 SY5000 3 5 With surge voltage suppressor S With light/surge voltage suppressor Z A, B port size A, B port size 200VAC 50/60Hz 110VAC 50/60Hz [115VAC 50/60Hz] With surge voltage suppressor (non-polar type) Applicable series Applicable series Port size Port size Symbol Symbol R 3 02 C8 C10 Rc(PT) 1/4 8 One-touch fitting

Compact Guide Cylinder

2 x P (Plug) U X PW H VA PE T R 2 x P D GB GA S Q 2 x P (Plug) JC K J PD FB FA C + Stroke A + Stroke G [mm] Bore size Standard stroke A C D FA FB G GA GB H J JC K L MM ML NN 50 (40 x 2) 25, 50, 100, 150, 200 63 43.5 18 15.5 4 51 20.5 12.5 148 25.5 9 25.5 37 M8 x 1.25 20 M8 x 1.25 63 (45 x 2) 67.5 48 20 15.5 4 56 24.5 13.5 162 28 11 28 40 M10 x 1.5 25 M8 x 1.25 Bore size OA OB OL P PD PE

CYP

Dynamic moment Va Calculation example m Operating conditions Cylinder: CYP32 Mounting: Horizontal wall mounting Maximum speed: U = 300 [mm/s] Load mass: m = 1 [kg] (excluding mass of arm section) L1 = 50 [mm] L2 = 50 [mm] L2 L1 Item Load factor n Note 1. Maximum load mass m 1 = m/mmax = 1/5 = 0.20 L2 Review m. L1 M2 = m g (L1 + B) 103 2.

4-channel Flow Monitor ( compatible)

0.01 s increments Enclosure IP65 (front side only when the panel is mounted), IP40 for others Withstand voltage 1000 VAC for 1 minute between terminals and housing Environment Insulation resistance 50 M or more between terminals and housing (with 500 VDC megger) Ambient temperature range Operation: 0 to 50 oC, Storage: 10 to 60 oC (No condensation) Operating humidity range Operation and storage

3

Q R S T Q R VXS23 1/4, 3/8 29.5 66 67 58 55 110.5 60 79.5 102.5 50 60 VXS24 1/2 29.5 69.5 67 61.5 55 110.5 63.5 79.5 109 50 63.5 VXS25 3/4 32 78 69.5 70 57.5 113 72 82 120.5 52.5 72 VXS26 1 32 81 69.5 72.5 57.5 113 74.5 82 126.5 52.5 74.5 Model Port size P 224 Zero Differential Pressure Type Pilot Operated 2 Port Solenoid Valve VXS Series For Steam Replacement Parts DIN Connector Part No.

Sine Rodless Cylinder Series REBR Direct Mount Type

REBH25, REBHT25 25 9 REBH15 20 16 REBH25 Load weight W (kg) 25 REBH15 10 REBHT25 9 40 REBHT32 5 4 3 W 2 W 1 0.5 70 100 300 500600 Maximum speed U (mm/s) Moment M1, M3 M2 (Static moment/Dynamic moment ) Allowable moment 100 100 85 96 REBHT32 REBHT32 64 56 50 40 30 50 40 30 (Nm) REBHT25 REBH25 REBHT25 REBH25 Model REBH15 REBH25 REBHT25 REBHT32 M2 16 26 85 96 M3 10 28 56 64 M1 10 28

MXF

2.22 3.41 6.66 20 0.78 1.65 0.3 MXF8 MXF12 MXF16 MXF20 0.2 50 100 200 300 500 700 Average speed Va (mm/s) Collision speed V (mm/s) Note) Use the average speed when calculating static moment.

Round Type Hydraulic Cylinder

+ 45 (n 2) (n = 2, 3, 4, 5) 10 15 50 D(n = 2, 4, 6) Note 3) 15 + 50 (n 2) 2 65 + 50 (n 2) (n = 2, 3, 4, 5) 10 15 65 15 + 50 (n 2) 2 75 + 55 (n 2) (n = 2, 3, 4, 5) 10 15 75 (n = 2, 4, 6) Note 3) (n = 2, 4, 6) Note 3) 20 + 50 (n 2) 2 75 + 55 (n 2) (n = 2, 3, 4, 5) D-B59W 15 20 Note 3) When n is an odd number, an even number that is one larger than this odd number is used for the calculation

MRQ

(rad/s) : Rotation angle.(rad) 180 = 3.14rad t: Rotation time.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

With light/surge voltage suppressor (Non-polar type) : SY100-30-A U Without lead wire (with connector and 2 of sockets only) Lead wire length Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Rated voltage 5 6 V S R 1 2 Electrical entry 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] G H L LN LO M MN

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

VDW Series

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

Modular Type Filter Regulator Series AW

75 75 B 108 160 201 239 242 E 28 40 57 73 73 P 30 44 46 54 56 K 0 5 3.5 1.5 1.2 M 25 30 41 50 50 N 28 34 40 54 54 Q 4.5 5.4 6.5 8.5 8.5 H 26 63 66 76 76 G 25 40 55 80 80 Y 14 19 21 21 U 2 2.3 2.3 2.3 2.3 T 40 55 53 70 70 Z 6 7 7 7 W 18.5 28.5 38.5 42.5 42.5 B 125 177 242 278 278 V 18 30 31 35.5 37 J 27 30.5 38.5 38.5 S 6.5 15.4 8 10.5 10.5 AW10 AW20 AW30 AW40 AW40-06 M5 x 0.8 1/8, 1/4

CYPSeries

Dynamic moment Va Calculation example m Operating conditions Cylinder: CYP32 Mounting: Horizontal wall mounting Maximum speed: U = 300 [mm/s] Load mass: m = 1 [kg] (excluding mass of arm section) L1 = 50 [mm] L2 = 50 [mm] L2 L1 Item Load factor n Note 1. Maximum load mass m 1 = m/mmax = 1/5 = 0.20 L2 Review m. L1 2.