SMC Corporation of America
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Pilot Pressure Range NVJA3(1)2-M3 90 80 70 60 50 Type of actuation Port size tu 40 1G3U Ndn.

Pilot Pressure Range NVJA3(1)2-M3 90 80 70 60 50 Type of actuation Port size tu 40 1G3U Ndn.

Different sides Same side Different sides Same side D-C7 D-C8 15 50 10 50 + 45 (n 2) 15 + 45 n 2 2 D-H7 D-H7W D-H7BAL D-H7NF (n = 2, 4, 6 ) 60 + 45 (n 2) 15 60 10 Air Release D-C73C D-C80C D-H7C 15 + 50 n 2 2 Caution 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) 1.

Protective ON/OFF, 11.5 Power supply with/without load Three phase AC200/200-280V10% (50/60Hz) 5.2 54.8% (50%/50%) Dimensions 700 (450) W x 845D x 1705H ( ): in case single type Conventional type: INR-499 Safety EMI S2, EU EMC directive conformity Circulating fluid gauge, Back flow prevention of circulating fluid, etc.

R T 600mm 1 10% () ( 60cm 1 ) 10% 3 IDU Series 5-1 5 1 IDX-OM-W023 5 () 60cm 1 2 INOUT INOUT () IDU Series 5-1 5 2 IDX-OM-W023 6 6-1 IDU8E-10/20 IDU11E-10/20 IDU15E1-10/20 50Hz 1.1 1.5 2.6 3/min (ANR)1 m 60Hz 1.2 1.7 2.8 0.7MPa 55 32 10 580 0.151.0MPa 240 (85%) AC100V 50/60Hz AC100/100110V10%(4) AC200V 50/60Hz AC200/200220V 10%(4) AC100V 50/60Hz 3.4/3.5 5.7/6.0 4.6

Voltage to Operaie (on 60 cycles) DC 8090 B70h 13.2 13.2 OIRECT SOLEI{OIO OPERA'ED: The solenoid operates tho spool directly, and a spring returns the spool and solenoid plunger when the solenoid is de-enrgized RESFO SE Time to Energizq (Sconds) 0.018 0.017 o.ga 0.025 0.012 0.012 0.018 0.018 0.015 0.015 0.025 0.025 0.0r7 0.016 0.023 0.023 1r5/50 1n/@ 1 15/50 120r'@ The sOool has no seals,

L-type block (75) (50) W R P Q Port size Weight (kg) d K W Y AE (mm) (75) (50) W J W (mm) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 47 47 47 50 50 50 50 50 70 70 70 85 85 85 105 105 9 9 9 9 9 9 9 9 62 62 62 65 65 65 65 65 3.5 3.5 3.5 6.2 6.2 6.1 11.9 11.9 Port size Weight (kg) E J P Q Port size Weight (kg) E 69

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

Refer to back page 50 for Safety Instructions, pages 17 to 19 for Fluids Control 2 Port Valves Precautions, and pages 467 to 470 for VDW Series/Specific Product Precautions. Selection Mounting Warning Warning 1.

The tensile strength of the power supply/output connection cable is 50 N; that of the pressure sensor lead wire with connector is 25 N. Applying a greater pulling force than the applicable specified tensile strength to either of these components can lead to malfunction.

50 50 0.1MPa Hysteresis (m) Hysteresis (m) Hysteresis (m) 0.1MPa 40 40 40 Supply pressure 30 30 30 0.1MPa 20 20 20 0.15MPa 0.15MPa 0.15MPa 10 10 10 0.2MPa 0.2MPa 0.2MPa 100 200 300 0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.

50 Citric acid Saturated Formic acid 98 X Oleic acid Nucleic acid Tannic acid Glacial acid 100 X Alcohol Group Cyclohexanol 100 Butyl alcohol 100 Ethyl alcohol 100 Glycerin 100 2-ethylhexanol 100 Methyl alcohol 100 Ethylene glycol 50 Ethylene glycol 100 Cresol 100 (Note) : No change, : Resistance for practical use; : Gradually deteriorated; X: Deteriorated (21

9-1 . 9-1 9-2 . 9-1 9-3 . 9-1 9-4 . 9-3 9-5 . 9-3 10 S 10-1 . 10-1 10-2 . 10-1 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-3 11-6 . 11-4 12 V 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 12-4 . 12-2 13 13-1 . 13-1 -2 IDX-OM-W035 i i i-1 () 3 i-1-1 3 IDFB Series i-1 i-1 IDX-OM-W035 i i-2 5 . i-2-1 i-2 IDFB Series i-2 IDX-OM-W035 i i-2-2 i-2-3 50

S. or l ess O perat i ng t em perat ure 0 t o 50( N o dew condensat i on) St andards CE m arki ng, U L( CSA) Encl osure I P65 I P65 equi val ent M odel I TV10 0 I TV20 0 I TV30 0 Si ze ( m m m m m m ) ( W i t h adapt or) 50 50 161 50 50 183 66 66 204 W ei ght ( N o opt i on) 330 430 730 9 Com m uni cat i on speci f i cat i on ( Com m on) I t em Speci f i cat i ons Rem arks Fi el d bus CCLi

Analog voltage 1 to 5 V Analog voltage 1 to 5 V Or IO-Link hub (Commercially available) Process Data Bit offset 79 78 77 76 75 74 73 72 71 70 69 68 67 66 65 64 Item CH11 measured value: 16-bit signed integer Bit offset 63 62 61 60 59 58 57 56 55 54 53 52 51 50 49 48 Measurement data of sensors for 4 channels are combined and cyclically sent as a process data.

Fittings & Tubing Air Cylinders Rotary Actuators 4 position dual 3 port valve 0.1 to 0.7 2 position double 0.2 to 0.7 3 position External pilot operating pressure range (MPa) 100 kPa to 0.7 Operating pressure range 2 position single, double 0.25 to 0.7 3 position Ambient and fluid temperature (C) 10 to 50 (No freezing.

Compact Pressure Switch Specifications (For further information, refer to Best Pneumatics No. 8) IS10-01 Model 0.1 to 0.4 MPa Set pressure range (OFF) 0.08 MPa Hysteresis 1a Contact point construction 2 VA AC, 2 W DC Max. contact point capacity 12 V 48 V 100 V Voltage (AC, DC) 24 V 50 mA 40 mA 20 mA Max. current 50 mA Symbol 2 1 AMR4000 AMR3000 L AMR5100 686 Regulator with Mist Separator

mounted on the cylinder. 1 Low Maintenance Filter Series FN1 Option Reservoir FNR100N-10 FNR100V-10 FNR101N-10 FNR101V-10 Model Tank capacity Port size 1.1l 1.8l Rc 1 Stainless steel SUS304 Bowl & Cover O-ring Material FPM FPM NBR NBR 1.5kg FN111 (Element 250mm) 1.9kg FN112 (Element 500mm) Weight Applicable filter Dust recovery filter FND100N-10-M149X0 FND100V-10-M149X0 Model Port size R1

Dimensions 46.5 Cover 26.5 12 14 Turn counterclockwise until the cover stops. 42 Pull R1/4 2) Use a flat head screwdriver (with a 2.9 mm blade width) to set the limit indicator. Be careful not to bend other needle or damage the dial plate.

Max.120'F(50'C) 2position : 20 ms or less 3position : 50 ms or less (70 PSI) Operating pressute range Ambient and fluid temPerature Flesponse time Max.