10-SYJ3000 Electrical entry 24, 12, 6, 5, 3 VDC 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC Grommet L plug connector M plug connector M8 connector E: Push-turn locking lever type G: Lead wire length 300 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire WO: Without connector cable CE-compliant +Nil Q +CE-compliant Note) CE-compliant: For DC only. + + H: Lead
When dust enters the valve from the port "3(R), it may cause malfunction. w Operation method To stop the valve midway can cause malfunction. Switch the valve to each position quickly and firmly. 3.6-14
The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
For each additional input block, add 21mm.) n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 55.5 178 200 210.5 2 66 188.5 212.5 223 3 76.5 199 225 235.5 4 87 209.5 237.5 248 5 97.5 220 250 260.5 6 108 230.5 250 260.5 7 118.5 241 262.5 273 8 129 251.5 275 285.5 9 139.5 262 287.5 298 10 150 272.5 300 310.2 11 160.5 283 312.5 323 12 171 293.5 325 335.5 13 181.5 304 325 335.5 14 192 314.5
r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.
(page 72) Y S16 0x01F4 1 R/W (500) H_1 (Setting of OUT1 hysteresis) Setting of OUT1 hysteresis. (page 72) Y U16 0x0032 2 R/W (50) P1L (Lower limit of the OUT1 window comparator) Setting of OUT1 lower limit of window comparator. (page 72) Y S16 0x012C 3 R/W (300) P1H (Upper limit of the OUT1 window comparator) Setting of OUT1 upper limit of window comparator.
Power dissipation (W): For AC , W=V/A cos. For DC, W=V/A (Note) cos (Note) cos shows power factor. w Surge voltage The surge voltage is a high voltage generated momentarily when cutting the power supply. e Hum sound The hum sound is a noise generated through repeated adsorption and releasing on an armature adsorption surface.
Compatible O/W hydraulic fluid Compatible Refer to page 408 for part numbers and dimensions.
5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load
Refer to "3.5 Pairing" for details on pairing. (2) Click [FCS Setting]. -27No.EX##-OMV0017-D Set using the [Frequency Channel Select Window]. (1) (2) (1) W-LAN Channel indicators The W-LAN indicators make it possible to select frequencies corresponding to W-LAN channels at one time. * In the example above, W-LAN Channel: CH.10 is selected. (2) W-CH indicators The W-CH indicators make it possible
Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air New Series VX21/22/23 Reduction of power consumption Reduction of power consumption (DC specification) (DC specification) 6 W 4.5 W 6 W 4.5 W 8 W 7 W 8 W 7 W 11.5 W 10.5 W 11.5 W 10.5 W Low power consumption type: Low power consumption type: 0.8 W 0.8 W (Held at 24 VDC) VX Series New VX Series now on sale!
3 y w o t RE A B !2 w r !0 !1 REC CX CY 25, 32 Option w @0 !1 !7 !8 !5 !9 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC !6 MK(2) (32 only) RS Q G Scraper Stroke adjuster RS H A No. Description Material Note Component Parts RZQ No.
3 y w o t RE A B !2 w r !0 !1 REC CX CY 25, 32 Option w @0 !1 !7 !8 !5 !9 MQQ M RHC !6 MK(2) (32 only) RS Q G Scraper Stroke adjuster RS H A No. Description Material Note Component Parts RZQ No. Description Material Note Hard anodized Piston seal NBR Aluminium alloy Body !0 q MI W S Rod seal NBR Piston assembly !1 w Heat treatment/Special treatment Gasket NBR (MIW8 ...
2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !
"A" End AXT 334-16-1 10 Bushing.Body t2\ axT 334-22-6 1 1 Cushion-Pilot Covea A' End axT 3s4-12.1 PILOT COVER '1" enol"a" ero '124 Type "O" w/o Operators d(4) Screws (ea.) 12) Alum. D.C. PC 0102-1 I N 124 Typ "N". w/operator & (4)Screws (ea.) (2) Alum. D.C. PC 01031 r2c Type "B" w/o Operalor. w/(4) Screws (ea.) Alum. D.C. PiJ0112. 12D Type "4" . w/Operalor & {4) Screvr's (ea.) Alum.
g] Stations: n W = 29n + 21 W = 51n + 35 W = 63n + 64 W = 97n + 80 W = 139n + 550 Note) Supply pressure to 1(P) ports and exhaust pressure from R ports on both sides for 10 stations or more (5 stations or more for the VFA5000).
(Standard), 2.3 W (Low wattage) 4 W (Standard), 2 W (Low wattage) Power consumption (DC) W/o indicator light W/ indicator light AC DC AC DC Surge voltage suppressor JIS Symbol Body ported Base mounted Neon bulb LED Indicator light At the rated voltage Mounting with VK300 Flow Characteristics/Weight Series VK300 can be mounted on the same manifold base VV5K3 of VK3000 series.
A l l o w a b l e L o w e r 7. Allowable Lower Temp. Range Setting range : 0.1 to 10.0 C Min. increment : 0.1 C Indicated content : Temp. from target to lower limit T e m p . R a n g e M O D E < 1 . 5 C (Ex. : 1.5 C) Function : Sets lower limit of temp. where the warning arises. The difference between target temp. and lower limit temp. should be input.